JPS6153930U - - Google Patents
Info
- Publication number
- JPS6153930U JPS6153930U JP13873284U JP13873284U JPS6153930U JP S6153930 U JPS6153930 U JP S6153930U JP 13873284 U JP13873284 U JP 13873284U JP 13873284 U JP13873284 U JP 13873284U JP S6153930 U JPS6153930 U JP S6153930U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support pin
- electrode
- substrate support
- supports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13873284U JPS6153930U (ko) | 1984-09-14 | 1984-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13873284U JPS6153930U (ko) | 1984-09-14 | 1984-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6153930U true JPS6153930U (ko) | 1986-04-11 |
Family
ID=30697128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13873284U Pending JPS6153930U (ko) | 1984-09-14 | 1984-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6153930U (ko) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63179525A (ja) * | 1987-01-21 | 1988-07-23 | Tokyo Electron Ltd | アッシング装置 |
| JPS63244643A (ja) * | 1987-03-30 | 1988-10-12 | Tokyo Electron Ltd | プローブ装置 |
| JPH0258336U (ko) * | 1988-10-19 | 1990-04-26 | ||
| JPH08279473A (ja) * | 1995-04-06 | 1996-10-22 | Nippon Pillar Packing Co Ltd | 半導体ウエハーの熱処理装置 |
| JP2019083307A (ja) * | 2017-08-31 | 2019-05-30 | バット ホールディング アーゲー | 動的靭帯バランシングシステム |
-
1984
- 1984-09-14 JP JP13873284U patent/JPS6153930U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63179525A (ja) * | 1987-01-21 | 1988-07-23 | Tokyo Electron Ltd | アッシング装置 |
| JPS63244643A (ja) * | 1987-03-30 | 1988-10-12 | Tokyo Electron Ltd | プローブ装置 |
| JPH0258336U (ko) * | 1988-10-19 | 1990-04-26 | ||
| JPH08279473A (ja) * | 1995-04-06 | 1996-10-22 | Nippon Pillar Packing Co Ltd | 半導体ウエハーの熱処理装置 |
| JP2019083307A (ja) * | 2017-08-31 | 2019-05-30 | バット ホールディング アーゲー | 動的靭帯バランシングシステム |