JPS63142828U - - Google Patents

Info

Publication number
JPS63142828U
JPS63142828U JP3560587U JP3560587U JPS63142828U JP S63142828 U JPS63142828 U JP S63142828U JP 3560587 U JP3560587 U JP 3560587U JP 3560587 U JP3560587 U JP 3560587U JP S63142828 U JPS63142828 U JP S63142828U
Authority
JP
Japan
Prior art keywords
substrate
rotating
spinner device
opening
closing lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3560587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3560587U priority Critical patent/JPS63142828U/ja
Publication of JPS63142828U publication Critical patent/JPS63142828U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3560587U 1987-03-10 1987-03-10 Pending JPS63142828U (US20020095090A1-20020718-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3560587U JPS63142828U (US20020095090A1-20020718-M00002.png) 1987-03-10 1987-03-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3560587U JPS63142828U (US20020095090A1-20020718-M00002.png) 1987-03-10 1987-03-10

Publications (1)

Publication Number Publication Date
JPS63142828U true JPS63142828U (US20020095090A1-20020718-M00002.png) 1988-09-20

Family

ID=30845253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3560587U Pending JPS63142828U (US20020095090A1-20020718-M00002.png) 1987-03-10 1987-03-10

Country Status (1)

Country Link
JP (1) JPS63142828U (US20020095090A1-20020718-M00002.png)

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