JPS63142827U - - Google Patents
Info
- Publication number
- JPS63142827U JPS63142827U JP3560287U JP3560287U JPS63142827U JP S63142827 U JPS63142827 U JP S63142827U JP 3560287 U JP3560287 U JP 3560287U JP 3560287 U JP3560287 U JP 3560287U JP S63142827 U JPS63142827 U JP S63142827U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- coating apparatus
- jig
- photoresist coating
- spinner head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3560287U JPS63142827U (sv) | 1987-03-10 | 1987-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3560287U JPS63142827U (sv) | 1987-03-10 | 1987-03-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63142827U true JPS63142827U (sv) | 1988-09-20 |
Family
ID=30845246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3560287U Pending JPS63142827U (sv) | 1987-03-10 | 1987-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63142827U (sv) |
-
1987
- 1987-03-10 JP JP3560287U patent/JPS63142827U/ja active Pending