JPS6163835U - - Google Patents
Info
- Publication number
- JPS6163835U JPS6163835U JP14781884U JP14781884U JPS6163835U JP S6163835 U JPS6163835 U JP S6163835U JP 14781884 U JP14781884 U JP 14781884U JP 14781884 U JP14781884 U JP 14781884U JP S6163835 U JPS6163835 U JP S6163835U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- drying
- rotary table
- vacuum
- porous sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14781884U JPS6163835U (sv) | 1984-09-29 | 1984-09-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14781884U JPS6163835U (sv) | 1984-09-29 | 1984-09-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6163835U true JPS6163835U (sv) | 1986-04-30 |
Family
ID=30706043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14781884U Pending JPS6163835U (sv) | 1984-09-29 | 1984-09-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6163835U (sv) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493029A (sv) * | 1972-04-27 | 1974-01-11 | ||
JPS5374374A (en) * | 1976-12-15 | 1978-07-01 | Hitachi Ltd | Rotary vacuum chuck table |
-
1984
- 1984-09-29 JP JP14781884U patent/JPS6163835U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493029A (sv) * | 1972-04-27 | 1974-01-11 | ||
JPS5374374A (en) * | 1976-12-15 | 1978-07-01 | Hitachi Ltd | Rotary vacuum chuck table |