JPS63142826U - - Google Patents

Info

Publication number
JPS63142826U
JPS63142826U JP3440287U JP3440287U JPS63142826U JP S63142826 U JPS63142826 U JP S63142826U JP 3440287 U JP3440287 U JP 3440287U JP 3440287 U JP3440287 U JP 3440287U JP S63142826 U JPS63142826 U JP S63142826U
Authority
JP
Japan
Prior art keywords
fork
dedicated
tubular
tip
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3440287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3440287U priority Critical patent/JPS63142826U/ja
Publication of JPS63142826U publication Critical patent/JPS63142826U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
JP3440287U 1987-03-11 1987-03-11 Pending JPS63142826U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3440287U JPS63142826U (en, 2012) 1987-03-11 1987-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3440287U JPS63142826U (en, 2012) 1987-03-11 1987-03-11

Publications (1)

Publication Number Publication Date
JPS63142826U true JPS63142826U (en, 2012) 1988-09-20

Family

ID=30842917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3440287U Pending JPS63142826U (en, 2012) 1987-03-11 1987-03-11

Country Status (1)

Country Link
JP (1) JPS63142826U (en, 2012)

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