JPS63142275A - Inspection of conductive pattern - Google Patents

Abstract

PURPOSE:To enable conductive patterns to be easily and quickly inspected by connecting one end of each conductive pattern formed on a substrate to a common electrode connected to one measuring terminal of a resistance measuring instrument. CONSTITUTION:A common electrode 2 and a probe 3 are connected to the measuring terminals of a resistance measuring instrument 4. One end of each conductive pattern P formed on a substrate 1 is connected to the electrode 2. The contact part of the probe 3 for the patterns P has a width which allows independent contact with one end of each pattern P. The probe 3 is sequentially moved while sliding on the end parts of the patterns P to which the electrode 2 is not connected whereby the electric resistance of the patterns P is sequentially measured by the measuring instrument 4. On the other hand, when disconnection or partial lacking is generated in the patterns P, since the electric resistance of the defective patterns P is different from that of the normal patterns P, the measurement of the electric resistance of the patterns P enables the defective patterns P to be easily and quickly detected.

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to the inspection of parallel conductive strips on an insulating substrate, conductive patterns on a printed circuit board, etc. used to construct a matrix-like electronic document such as a touch panel or various displays. In particular, the present invention relates to a method of inspecting a conductive pattern using a plastic film as a substrate used in a liquid crystal display device.

[Prior art]

Conventionally, as a method for detecting abnormalities such as disconnections or missing parts of a conductive pattern, the electrical resistance of the conductive pattern is measured by touching each end of the conductive pattern with a probe, and this is repeated to detect all There is a method for inspecting conductive patterns. However, such a method of inspecting each conductive pattern one by one takes time to inspect all patterns, and is therefore not preferable when 100% inspection is required.

Another method is to use a head with a number of probes arranged according to the shape of the conductive pattern to be inspected, and use this head to bring the probes into contact with each conductive pattern at the same time. The method not only requires a large number of probes and resistance measuring instruments;
It is necessary to prepare a head for each substrate with a different conductive pattern, and furthermore, the spacing between the probes placed on the head is limited by the size of the probes, so it is not suitable for use with conductive patterns arranged in high density. is difficult.

〔the purpose〕

The present invention makes it possible to easily and quickly inspect disconnection or partial missing of an i-electrode pattern formed on a substrate by resistance value, and also enables inspection for high-density tri-electrode patterns. It is an object of the present invention to provide a method for inspecting a conductive pattern that can be easily inspected.

〔composition〕

The configuration of the present invention will be explained below based on the embodiment shown in FIG.

A common electrode 2 and a probe 3 are respectively connected to each measurement terminal of a resistance measuring device 4, and each conductive pattern P such as a grid electrode formed on a substrate such as a plastic substrate of a liquid crystal display device is connected to a common electrode 2 and a probe 3. One end is connected to the common electrode 2 mentioned above.

The contact portion of the probe 3 with respect to the four-electrode pattern is wide enough to independently contact one end of one conductive pattern, and the probe 3 is connected to the end of the conductive pattern P that is not connected to the common electrode 2. The electrical resistance of each conductive pattern is sequentially measured by the resistance measuring device 4 by sliding the conductive pattern on the conductive pattern.

If a conductive pattern is broken or partially missing, the electrical resistance of the defective conductive pattern will be different from the normal electrical resistance, so measuring the electrical resistance of each conductive pattern as described above will identify the defect. A certain conductive pattern can be detected.

As shown in the figure, the resistance measuring device in this embodiment has one measuring terminal connected to one power terminal of the DC power source 6 via the resistor 5, and the other measuring terminal connected to one of the power terminals of the DC power source 6. An X-Y recorder 7 connected to the other power supply terminal and between the measurement terminals records the voltage detected while the probe 3 is sliding as the electrical resistance of each conductive pattern.

FIG. 2 is a diagram showing a specific example in which the common electrode is connected to one end of each of the conductive patterns described in FIG.
Electrode holder 21 to which pressure contact electrode 8 is attached
is rotatable about an axis O fixed to the surface plate stage T as a rotational fulcrum, and a clamp 23 provided on the opposite side of the rotational fulcrum of this electrode holder 21 is engaged with a hook 24 of the surface plate stage T. - The pressure contact electrode 8 is pressed against one end of each side of the conductive pattern of the substrate 1 set on the surface plate stage T by the force of the spring of the clamp 23.

As the pressure contact electrode 8, for example, a conductive film made of silicone rubber mixed with fine carbon powder can be used.

FIG. 3 is a diagram showing an example of an inspection apparatus for carrying out an inspection to which the present invention is applied, in which one end of each electrode pattern on the substrate 1 is brought into contact with a pressure contact electrode 8 by the mechanism explained in connection with FIG. 2 above. , probe mounting board 1 on which probe 3 is installed
1 is a pulley 13 fixed to the shaft of a motor 12 and a belt 1
4, the probe 3 is moved in the direction of the arrow in the figure while being held on the guide shaft 15.

The probe 3 attached to the probe mounting board 11 has a probe tip housed in a sleeve provided with a spring, and the probe 3 is moved up and down by an air cylinder, a spring, a plunger, etc. The contact pressure is appropriately adjusted by the force of the sleeve spring.

Further, as a method for installing the substrate 1 on the surface plate stage T, there are a method using suction, a method using a mechanical lamp, or the like. Furthermore, it goes without saying that the workability will be further improved if the surface plate stage T is capable of rotation and fine adjustment in the front, rear, left, and right directions.

〔effect〕

According to the present invention, one end of each of the conductive patterns formed on the substrate is connected to a common electrode connected to one measuring terminal of a resistance measuring device, and a probe connected to the other measuring terminal is connected to the other end of the conductive pattern. Since each conductive pattern is inspected by sliding the probe sequentially over each end of the probe, the conductive pattern can be inspected quickly. Since the probe was placed in contact with the end of each conductive pattern,
Inspection of dense conductive patterns with moderate pinch of probe contacts can be performed.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing an embodiment of the present invention, FIG. 2 is a diagram showing a specific example of a pressure contact electrode, and FIG. 3 is a diagram showing an inspection apparatus to which the present invention is applied. 1 is a substrate, 2 is a common electrode, 3 is a probe, 4 is a resistance measuring device, and P is a conductive pattern.

Claims (2)

[Claims] (1) A plurality of conductive patterns (
A common electrode (2) connected to one measuring terminal of the resistance measuring device (3) at each one electrode terminal or end of P)
The probe (3) connected to the other measuring terminal of the resistance measuring device is sequentially moved over the other electrode terminal or end of the conductive pattern to measure the electrical resistance of each conductive pattern using the resistance measuring device. 1. A method for inspecting a conductive pattern, the method comprising sequentially measuring and detecting defects in the conductive pattern. (2) The electrical conductivity according to claim 1, characterized in that the connection to the plurality of conductive patterns by the common electrode is performed by a pressure contact electrode (8) that short-circuits the terminals or ends of the plurality of conductive patterns. How to inspect patterns.