JPS63141733A - Clad board - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Application This invention relates to applying a material to a metal or alloy substrate discontinuously in the longitudinal direction using a cold pressure welding method, for example, in the form of islands or stripes at regular intervals. This island-shaped clad plate is made by cladding the adhered material with high efficiency and good quality and adhesion without requiring diffusion annealing treatment after cold welding. Regarding the board.

BACKGROUND ART Fe-Ni sealing material (40-55%N1-Fe)-A is used as a cladding material for electronic components.
l plate, (substrate-adherent material, same arrangement hereinafter) Fe-Ni sealing material (40-55% N1-Fe) -A
u board, Fe-Ni sealing material (40-55%N1-Fe
)-Cu plate, Fe-Ni sealing material (40-55%N1
-Fe)-Cu alloy plate, Fe-Ni sealing material (40~
55%N1-Fe) Ag brazing plate, Fe-Ni sealing material (40-55%N1-Fe) Ag plate, Kovar alloy plate (25-50%Ni-10-20%Co-Fe)
Island-shaped clad plate made of Ag solder plate, etc. (see Figure 1a)
, or Fe-Ni sealing material (40-55%N1-F
e)-Al plate, Kovar alloy plate (25-50% Ni-1
0~20%Co-Fe)-Ag brazing plate, etc. (see Fig. 1B), or a multilayer clad plate in which a layered substrate is similarly crimped, plated, or vapor-deposited with an adhesion material. is being used.

For example, in the production of Al island-like cladding material, 4
A metal substrate strip of 2% Ni-Fe alloy was annealed in a reducing atmosphere, the substrate surface was cleaned, and then the area to be bonded on the surface to be cold-pressed was further cleaned by buffing. After that, the AI plates are stacked at the desired position in the longitudinal direction including the part to be adhered, cold pressure welded, and then the A
The I plate is removed by mechanical polishing with a brush or a chemical removal method using alkali, etc., cold rolled at least once, and then diffusion annealed at 600°C or less to form the A1 strip. and the metal substrate, and furthermore,
In order to adjust the dimensions and shape of the cladding material, cold rolling is performed at least once, and then the temperature is lower than 550°C in order to remove the internal stress strain that remains unevenly inside the substrate due to the island-shaped cladding. or heat treatment with
The manufacturing method involves applying tension to the cladding strips by heating at 50°C or less to add elongation and straightening, or the substrate surface is cleaned by a chemical method such as alkaline degreasing or electrolytic degreasing, and then vacuum evaporation method is used. A method of masking areas other than the required areas and laminating AI in spots, or after printing a resist and degreasing and polishing the substrate surface using a chemical method,
Au, Ag wet plating methods, etc. are generally employed.

However, in mechanical polishing such as wire buff polishing, it is difficult to polish only the required parts, so the surface of the substrate other than the surface scheduled for pressure welding, for example, the entire surface, may be polished, and the polishing may cause cracks on the polished surface. There is a risk of generation of scaly metal powder, adhesion, and residual foreign matter, and when the adherends are pressure welded, metal powder, foreign matter, or gas may be drawn into the pressure contact surface, causing swelling on the surface of the adherend material. There is.

In addition, the cracks generate metal fine powder during cold welding or subsequent cold rolling, causing the metal fine powder to adhere to the clad plate, causing problems such as deterioration of the quality of the clad plate surface. The manufacturing method requires a large number of steps and heat treatments, resulting in increased manufacturing costs and problems such as flaws and deterioration of surface quality on the AI and A1 alloy surfaces during diffusion annealing.

In addition, the productivity of vacuum evaporation and electroplating methods is lower than that of cold pressure welding, the cost increases due to the use of vacuum equipment, it is not possible to obtain a dense A1 surface, and there are problems such as processing of electroplating solution. there were.

Purpose of the Invention The present invention provides a conventional island-shaped clad plate that
Eliminates the problems caused by cleaning the surface of the metal substrate, and also makes it easy to clean only the area to be adhered, which was difficult in the past, prevents blistering on the surface of the adherend and provides excellent clad plate surface quality. The objective is to obtain an island-shaped clad plate that can be completely joined only by the cold pressure welding process, by omitting the conventionally indispensable diffusion annealing process after cold pressure welding.

Structure and Effects of the Invention As a result of various studies aimed at cleaning the substrate surface of an island-shaped cladding material, improving the quality of the adherend surface of the cladding plate, and increasing the adhesion strength, the present invention has been developed. The laser beam is irradiated only on the desired surface to be bonded, and the laser beam irradiation is stopped on surfaces other than the surface to be bonded, or the light is shielded to prevent irradiation. By irradiating a laser beam with a light wavelength, foreign matter, oil, and moisture adhering to the surface of the target area will be absorbed by the laser beam, gasified, and removed, resulting in a clean surface. When the adherend material is pressed onto the surface, interatomic bonds easily occur because the surface is clean, and sufficient adhesion strength is obtained for practical use. It has been found that since no cleaning is performed, no interatomic bonds occur, and the plate can be easily peeled off, making it possible to easily obtain an island-shaped clad plate with excellent quality properties.

Furthermore, by using a laser beam with a wavelength that is easily absorbed not only by foreign objects but also by the substrate, that is, a wavelength of 5 pm or less, the extreme surface layer of 10 pm or less, preferably on the submicron order, can be melted; During cold welding of the adherend, the hardened layer on the surface of the substrate undergoes internal sliding deformation to create minute cracks on the surface, exposing the new internal surface and creating a close bond between the substrate and the adherend. It can significantly improve strength, prevent cracks on the surface, generation and adhesion of metal powder and residual foreign matter that occur with conventional mechanical polishing, eliminate gas entrainment, and eliminate blistering on the surface of the cladding material. , when the adherend material is Al, the above-mentioned diffusion annealing process is not necessary, and cold welding can be performed as is.
Alternatively, it has been found that by only cold rolling after cold welding, the adherend material can be easily removed by brushing, etc. in areas other than the areas to be adhered, so it is easy to obtain an island-shaped clad plate that is discontinuous in the longitudinal direction. This invention has now been completed.

In this invention, a molten solidified hardened layer of the substrate material is interposed at a required location on at least one main surface of a single plate or a laminated substrate made of a metal or alloy, and an adherend material is applied discontinuously in the longitudinal direction of the substrate. This is a clad plate characterized by being made of

More specifically, at least one laser beam is applied only to the portion to be deposited on at least one main surface of a metal or alloy substrate having at least one smooth main surface, such as a 42% Ni-Fe alloy or a Kovar alloy. Irradiation is performed using various irradiation modes, and parts other than the intended surface to be adhered are treated as non-irradiated surfaces that are not irradiated with the laser beam. or A1
When alloy strips are cold welded at a rolling reduction rate of 25% to 70%, cracks occur in the molten solidified hardened layer on the irradiated surface, which is the intended surface to be adhered to, due to laser beam irradiation, and cracks form within these cracks. The AI or A1 alloy strip is pressed in during cold welding, and the welding is complete.

On the other hand, the molten, solidified, and hardened layer is not formed on the surface other than the surface to be adhered, and the bond between the adherend material and the substrate is weak and can be easily peeled off. Therefore, by polishing with a brush or the like after press-bonding the adherend material, the adherend material other than the surface to be adhered to which the laser beam was irradiated can be easily removed, making it possible to obtain an island-like clad plate with the desired pattern. can.

In addition, in order to obtain an island-like clad plate with a desired pattern, it is difficult to carry out wire puff polishing discontinuously in the longitudinal direction of the substrate and only on the surface to be coated. In this case, since it is light, it can be blocked arbitrarily, and it can be irradiated only to the intended areas to be adhered in a desired pattern in the longitudinal direction of the substrate, which has the advantage that it is possible to manufacture island-shaped cladding plates of various shapes.

The present invention makes it possible to highly clean the substrate surface, improve the quality of the adherend surface of the cladding plate, and improve the adhesion strength, thereby making it possible to obtain an island-shaped cladding plate with high efficiency.

Preferred Embodiment of the Invention In the present invention, an island-like clad plate is one in which an adhesive material is pressure-bonded discontinuously in the longitudinal direction of at least one main surface of a substrate, as shown in FIG. 1a. As shown in the figure, in addition to a clad plate in which square-shaped adhered materials (2) are adhered to the center of the substrate (1) in the width direction at predetermined intervals in the longitudinal direction,
As shown in the same figure, it is also possible to form a clad plate in which rectangular adhered materials (2) covering the entire width of the substrate (1) are adhered at regular intervals in the longitudinal direction of the substrate (1), and furthermore, 1st
As shown in Figure C, the pattern in figure a is repeated in the width direction of the substrate (1), and a square-shaped adherent material (2) is applied to the substrate (1).
) It is also possible to obtain a clad plate in which corrugations are applied at three locations in the width direction, and adhesive material is discontinuously crimped onto portions corresponding to three stripes in the longitudinal direction.

The shape, dimensions, and longitudinal spacing of the adherend material can be arbitrarily selected depending on the application, etc., and a desired discontinuous pattern can be adopted depending on the application. Although adhesion patterns arranged at equal intervals are preferred from the viewpoint of manufacturability, the shape of the pattern may be arbitrary, the same shape does not have to be repeated, and the pattern intervals do not have to be constant.

It is also possible to apply the material to a relatively wide substrate in the patterns shown in Figures b and a, and then use a slitter to produce a clad plate of the desired width.

In this invention, the method of irradiating the laser beam is to use a mirror to run a spot-like beam two-dimensionally on the surface of the material to be adhered, or to spread the beam in the width direction of the plate using a lens or mirror. Either the entire surface to be coated is irradiated uniformly, or at least one laser beam is irradiated onto the surface to be coated in various irradiation forms such as an entire strip, a zigzag pattern, a meandering pattern, or a striped pattern. irradiate. In addition, surfaces other than the surface to be adhered are treated as non-irradiated surfaces that are not irradiated with the laser beam.

Furthermore, when the surface of the substrate to be adhered is irradiated with a laser beam in, for example, a zigzag pattern, the surface condition of the irradiated surface of the substrate is changed by cleaning the irradiated surface and melting, solidifying and hardening the extreme surface layer, as described above. The non-irradiated part on the surface to be formed and deposited is
This surface is completely different from the surface that is not irradiated with the laser beam described above, that is, the non-irradiated surface other than the surface to be adhered, and the surface is cleaned by the thermal effect accompanying the zigzag laser beam irradiation. For this reason, when the adherend material is cold pressure welded to the irradiated part of the zigzag laser beam, which is not the entire surface irradiation, the adherend material and the substrate material will be firmly bonded in the irradiated part, as described above, and the non-irradiated part will also be bonded. Since the surface is cleaned, the adhesion between the adherend material and the substrate material is improved, and sufficient adhesive strength can be obtained.

In this invention, the type and combination of the substrate and the material to be adhered may be any combination that allows cladding, and the laser beam irradiation may be applied as long as it can remove deposits, oil and moisture from the surface, preferably at 10 pm. Any method may be used as long as it is possible to melt and solidify the following extreme surface layer. For example, the beam is focused in a spot shape and irradiated in a direction perpendicular to the substrate surface, and the substrate and the laser beam are aligned in the longitudinal direction of the substrate. The laser beam can be moved in the same direction or in the opposite direction, or it can be moved in the longitudinal direction of the substrate while vibrating the laser beam in the width direction of the substrate, causing the laser beam to oscillate intermittently.
Methods such as stopping the coating to obtain an island-like irradiation surface with a desired pattern, or blocking light from areas other than the surface to be coated can be adopted.

Alternatively, a method may be adopted in which the laser beam is oscillated from a laser oscillator, focused by a collimator and a lens, and guided to a desired position by an optical fiber for irradiation.

In this invention, the laser beam irradiation conditions are as follows:
Beam power density is 100kW/mm2 to 1500
A range of kW/mm2 is preferred, more preferably 3
00kW/mm2 to 900kW/mm2.

If the power density of the laser beam is less than 100 kW/mm2, there will be no surface cleaning effect for pressure welding, and if the power density of the laser beam is less than 100 kW/mm2,
If it exceeds 00 kW/mm2, the surface will become extremely uneven and holes will be formed in the substrate as the power density increases, which is not preferable.

In addition, it is effective if the laser wavelength is 5 pm or less, but if it exceeds 2 pm, the absorption effect on the substrate is poor, so 2
- It is desirable to use the following wavelengths:

The metal or alloy substrate in this invention includes Fe-Ni sealing material (40-55% N1-Fe), Kovar alloy plate (25-50% Ni-10-20% Co-Fe), Cu
Aggregate board Be 1.1% or less, Ti 1.0% or less, Cr
1.6% or less, Fe 6.0% or less, Ni 15.0% or less, Zn 43% or less, BO, 5% or less, Si 6.
0% or less, Pb O, 08% or less, PO65 or less, Te
O, 6% or less, Mg 0.6% or less, Zr O, 7%
Below, Mn 7% or less, Co 2% or less, Ag 1.5% or less, Cd 1.3% or less, A1 12% or less, Sn 12
% or less, provided that the additional element is 2
If more than one species is contained, the total amount is 45% or less, and the remainder is Cu.
) is preferred.

In this invention, the metal or alloy substrate may be a single plate, or a laminated layer of, for example, the Cu alloy and 42% Ni-Fe alloy, or the Cu alloy and Kovar alloy to improve conductivity, corrosion resistance, and strength. A plate can also be used.

Note that the laminated substrate may be pressure-bonded after surface cleaning using a laser beam, or may be pressure-bonded after surface cleaning by conventional wire brushing.

In addition, as the adherend material, Au plate, Al plate, A1 alloy plate,
Preferred are Ag plates, Ag brazing plates, brass brazing plates, and solder plates.

Further, the thickness of the island-shaped clad plate according to the present invention is preferably 0.05 to 1.0 mm, and the thickness may be appropriately selected depending on the intended use.

DISCLOSURE OF THE INVENTION BASED ON DRAWINGS FIG. 2 is a perspective explanatory view of a substrate showing the cladding method in this invention. Here, an example will be described in which a rectangular Al plate is cold-welded at the widthwise center of a 42% Ni-Fe alloy plate in the form of islands at regular intervals in a portion corresponding to one strip.

The 42% Ni-Fe alloy plate (10) coil is uncoiled and advances to the cold welding roll (11). Behind the pressure welding roll (11), there is an irradiation box (12) for irradiating the upper surface of the alloy plate (10) with a laser beam.
) are placed, and the irradiation box (12) is placed on the alloy plate (10).
The structure is such that the entire structure is surrounded, Ar gas is vented inside, and a laser beam can be irradiated in an M gas atmosphere.

The laser beam is emitted from a laser oscillator (13), such as a YAG laser, and is sent to a collimator (14),
Through the galvanic mirror (15), the m lens (16
), after condensing and focusing the light, move the required distance from the focal point,
The position of the fO lens (16) is adjusted so that the required width of the widthwise central position of the alloy plate (10) can be irradiated at the spaced apart position.

The laser beam can be intermittently irradiated onto the substrate by opening and closing a shutter (18) placed between the galvanic mirror (15) and the m-lens (16), thereby forming only discontinuous irradiated portions in the longitudinal direction of the substrate. can. Furthermore, by oscillating the laser beam intermittently, the irradiation surface can be provided discontinuously in the longitudinal direction of the alloy plate (10).

The laser beam generator used in this invention can increase the laser scanning speed by using a polyhedral mirror or a segment mirror instead of the galvanic mirror (15), and can increase the laser scanning speed by using a cylindrical lens. By irradiating the sheet width direction all at once, it is possible to improve the processing speed.

The alloy plate (10) is irradiated with a laser beam in a zigzag or striped manner on the surface to be adhered at regular intervals in the center position in the width direction, so that the extreme surface layer is melted and solidified, and deposits on the surface are removed.
It becomes a new surface from which oil, fat, and moisture have been removed.

In addition, the shutter (18) is closed or the oscillation of the laser beam is stopped, and irradiation is not performed on surfaces other than the surface to be deposited.

On the other hand, the Al plate (17) is uncoiled and then fed from above the alloy plate (10) to the pressure roll (11).
It is pressed onto the surface irradiated by the laser beam irradiation. At this time, on the surface to be adhered to, the molten solidified layer on the irradiated surface produces minute cracks on the surface due to the influence of internal sliding deformation, and the new internal surface is exposed and the Al plate (17) is pressed against it. Superior cleanliness compared to mechanically polished surfaces
The alloy plate (10) and the Al plate (17) are brought into closer contact with each other.

However, since areas other than the surface to be adhered are not irradiated with a laser beam, the material to be adhered is not in close contact with the substrate, and can be easily removed by brushing after pressure bonding. Only by this method, an island-shaped clad plate having an Al plate (17) attached thereon can be obtained with high efficiency.

In Fig. 1, an example was explained in which the adherend material was cold-welded on the alloy plate in a rectangular shape at regular intervals, but it is also possible to apply it in multiple patterns in the width direction of the substrate or at unequal intervals in the longitudinal direction. can be manufactured in the same manner, and excellent adhesion strength and product properties can be obtained. Further, a double-sided clad plate having pressure contact not only on one main surface but also on the other surface can be manufactured in the same manner.

Therefore, the oscillation method of the laser beam, the irradiation output, the distance between the focal point of the m lens and the irradiation surface, the moving speed of the irradiated side, etc. should be adjusted appropriately depending on the material and dimensions of the substrate material and the material dimensions of the adhered material. It is necessary to select.

Example Ha-Nagi metal substrate was made of 42% Ni-Fe with a plate thickness of 0.38 mm and a plate width of 27 mm.
As the alloy plate and adhering material, an Al plate with a thickness of 0.02 mm, a width of 10 mm, and a purity of 99.7% was used.

Atmospheric gas in the irradiation box, Ar gas, substrate movement speed 1
The speed was 0 m/min.

A 100W output, 10kHz Q switch laser was used as the laser irradiation device, and the method shown in Fig. 2 described above was used.
Under the conditions of a lens focal distance of 100 mm, a wavelength of 1.00 pm, and a laser power density of 500 kW/mm2, the shutter was closed and the laser was intermittently applied to a rectangular spot-shaped part measuring 10.5 mm in the width direction of the substrate and 7 mm in the longitudinal direction of the substrate. The beam is irradiated to form discontinuous irradiated surfaces at intervals of 40 mm in the longitudinal direction of the substrate, forming an irradiated surface and a non-irradiated surface as shown in Figure 1a, and the direction of the technician including the irradiated surface. The Al plate was rolled at a rolling rate of 30% using a pressure roll.
Cold pressure welded.

After that, unnecessary Al plates were removed by brushing with a 0.15 mr nylon brush, and the plate was cold rolled once to a plate thickness of 0.25 mm and a plate width of 27 m.
An island-shaped clad plate according to the present invention having a size of m was obtained. Note that the total rolling reduction was 34.2%.

At this time, the shape of the adherend material part was approximately square with dimensions of 10.3 mm x 10.7 mm, and the interval between the parts was 60 mm in the longitudinal direction.

The dimensions, external appearance, and mechanical properties of the plates were investigated, and the results are shown in Table 1.

As is clear from Table 1, by the method of the present invention, it is possible to easily obtain an island-shaped clad plate, which was difficult to manufacture in the past, and the island-shaped clad plate has excellent appearance and excellent quality. I know that it will happen.

Furthermore, the hardness from the surface to the inside of the substrate before pressure bonding after laser beam irradiation in the present invention and the hardness from the surface to the inside of the substrate after wire puff polishing in the comparative example were measured. The results are shown below.

As is clear from Figure 3, the surface layer after wire puff polishing has a thickness of about 10 yen and is hardened, and since the hardened layer has a lower deformability than the inside, cracks occur due to deformation during pressure welding. The adherend adheres well to the new surface that appears in the crack. This can be understood from the fact that when heat treatment is performed as an adhesion test after pressure bonding, this crack becomes a starting point for diffusion.

The above-mentioned aspect caused by wire puff polishing is effective as a surface treatment before pressure welding, but on the other hand, if such treatment is performed until deposits, oil, and moisture are reduced and a clean surface necessary for pressure welding is obtained, polishing The surface may become extremely rough, causing problems such as the generation and adhesion of scale-like metal powder and the entrainment of gas to the pressure contact surface.In addition, such polishing should be limited to the island-shaped areas on the substrate where the deposition is planned. It is difficult to apply.

On the other hand, in the laser beam irradiation according to the present invention, since the beam can be irradiated continuously for 1 fi, it is possible to irradiate only the required island-shaped parts as in the embodiment, and by selecting the irradiation conditions, it is possible to irradiate the laser beam on a rough surface. By removing deposits, oil, fat, and moisture, and providing a melt-solidified hardened layer of the required thickness, selective adhesion of adherend materials is possible.

In addition, hardening is observed in this molten solidified layer, and the hardened layer generates minute cracks on the surface due to the influence of internal slip deformation during pressure welding, and the new surface appearing in the crack is smaller than that in the comparative example. This can be confirmed by the fact that when heat treatment is applied as an adhesion test after pressure welding, diffusion progresses uniformly. Ta.

[Brief explanation of the drawing]

FIG. 1 is a top view of a substrate showing the deposition pattern of the deposited material in the island-shaped clad plate of the present invention. Second
The figure is a perspective explanatory view of an apparatus for manufacturing a clad plate according to the present invention. FIG. 3 is a graph showing the relationship between substrate depth and Vickers hardness of the clad plate of the present invention. 10... Alloy plate, 11... Pressure roll, 12...
Irradiation box, 13... Laser oscillator, 14...
Collimator, 15... Galvanic mirror, 16...
・m lens, 17...AI board, 18...shutter.

Claims (1)

[Claims] 1 A material is applied discontinuously in the longitudinal direction of the substrate with a molten solidified hardened layer of the substrate material interposed at a required location on at least one principal surface of a single plate or laminated substrate made of a metal or alloy. A clad plate characterized by: