JPS63141551U - - Google Patents
Info
- Publication number
- JPS63141551U JPS63141551U JP3290387U JP3290387U JPS63141551U JP S63141551 U JPS63141551 U JP S63141551U JP 3290387 U JP3290387 U JP 3290387U JP 3290387 U JP3290387 U JP 3290387U JP S63141551 U JPS63141551 U JP S63141551U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- cooling tank
- sub
- cooling device
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Description
添付図面は本考案を超伝導レンズに実施した場
合の一例を示す縦断面図である。
１：鏡筒、２：主冷却槽、３：液体ヘリウム、
４：超伝導レンズ、５：ヨーク、６：超伝導コイ
ル、７：ライナチユーブ、８：副冷却槽、９：断
熱材、１０：液体窒素、１１，１２：銀メツキ層
、１３：供給パイプ、１４，１５：上及び下シー
ルド板、１６：断熱材、１７，１８：加熱コイル
。
The accompanying drawing is a longitudinal sectional view showing an example of a superconducting lens in which the present invention is applied. 1: lens barrel, 2: main cooling tank, 3: liquid helium,
4: superconducting lens, 5: yoke, 6: superconducting coil, 7: liner tube, 8: sub-cooling tank, 9: heat insulating material, 10: liquid nitrogen, 11, 12: silver plating layer, 13: supply pipe, 14, 15: Upper and lower shield plates, 16: Heat insulating material, 17, 18: Heating coil.
Claims (1)
槽と、該主冷却槽を熱シールドするための副冷却
槽とを備えた電子顕微鏡等における冷却装置にお
いて、前記副冷却槽を加熱するための手段を設け
たことを特徴とする電子顕微鏡等における冷却装
置。 In a cooling device for an electron microscope, etc., comprising a main cooling tank for cooling an electron lens or a sample, and a sub-cooling tank for heat shielding the main cooling tank, a means for heating the sub-cooling tank is provided. A cooling device for an electron microscope, etc., characterized in that it is provided with a cooling device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3290387U JPS63141551U (en) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3290387U JPS63141551U (en) | 1987-03-06 | 1987-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63141551U true JPS63141551U (en) | 1988-09-19 |
Family
ID=30840010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3290387U Pending JPS63141551U (en) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63141551U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6332847A (en) * | 1986-07-25 | 1988-02-12 | Hitachi Ltd | Oryogenic sample cooling device for electron microscope or the like |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911644U (en) * | 1972-05-05 | 1974-01-31 | ||
| JPS5945400B2 (en) * | 1977-07-29 | 1984-11-06 | 株式会社日立製作所 | Drum type fully automatic washing machine |
-
1987
- 1987-03-06 JP JP3290387U patent/JPS63141551U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911644U (en) * | 1972-05-05 | 1974-01-31 | ||
| JPS5945400B2 (en) * | 1977-07-29 | 1984-11-06 | 株式会社日立製作所 | Drum type fully automatic washing machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6332847A (en) * | 1986-07-25 | 1988-02-12 | Hitachi Ltd | Oryogenic sample cooling device for electron microscope or the like |
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