JPS631411A - Fine dust-free type liquid filtering and feeding device - Google Patents

Abstract

PURPOSE:To enhance filtering effect and feed liquid substance always in a purified and dust-free state to a place where the same is used by providing a returning means equipped with a closing valve and a filtering means between immediate upstream of a use point and a group of liquid containers. CONSTITUTION:A liquid circulation line consisting of liquid lines 22-28 passing through liquid filtering means 4 between liquid containers 1 and 2, and a second liquid circulation line (returning means) consisting of liquid lines 30 and 26-38 passing through a liquid filtering means 5 between the liquid containers 1 and 2 and a use point U.P. are provided. After being circulated several times and purified, a liquid substance containing fine solid particles is fed to the use point U.P. through a closing valve 50, a liquid line 29 and a closing valve 51. In case feeding of the liquid substance to a liquid using device is discontinued or stopped temporarily at the use point U.P., the liquid substance is circulated between the liquid containers 1 or 2 and the use point U.P. by the returning means.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a liquid filtration supply device, and more specifically, the present invention relates to a liquid filtration and supply device, and more specifically, a device for filtering a liquid substance containing fine solid particles as impurities,
This invention relates to a liquid filtration and supply device for supplying high-purity liquid goods.

In recent years, high purity resin has been required in fields such as the pharmaceutical industry, food industry, and electronics industry, and this one-time operation of the scale has become one of the minor operations.

For example, manufacturing of printed wiring JJ boards in the electronics industry, Naomi IC. In the field of manufacturing electronic circuits such as LSIs, if the liquids and products used contain impurities such as fine solid particles, the incidence of defective products increases, so it is especially important to avoid high-purity products. is required. The size of impurities here refers to a particle size of 0.1 to 10 μrrl.

Even if these impurities such as fine solid particles are removed by precision purification during the manufacturing of liquid chemicals, they can still get mixed in during transportation or storage of liquid chemicals, or even in the piping from the storage tank to the Shikawa site. In addition to silica particles, particles sorbed to the tube wall or newly generated fine dust at the interface between the liquid and its passage are constantly supplied into the liquid. Therefore, it is necessary to thoroughly filter the liquid substance before use and to maintain the liquid substance in a dust-free state before supplying it to the place of use.

(Prior Art and Problems) Conventionally, a device described in Japanese Patent Publication No. 58-24166 has been provided as a device for supplying a dust-free liquid substance, but this device has an extremely simple filtration means and is It is a long-term formula and a sufficient temporary effect cannot be obtained.

Also, Japanese Patent Publication No. 38-4539, or Japanese Patent Application Laid-open No. 1983
Japanese Patent No. 71012 discloses an 8i system in which a liquid substance is circulated between two fixed containers through a filtration means many times to increase the filtration effect, and then supplied to a place of use. In these methods, the liquid substance is circulated through the filtration means many times, so the filtration effect is higher than that of the one-time type. Risk of contamination of liquid substances.

Also, if the use of a liquid substance (medicinal solution) is interrupted at the place where the liquid substance is used, will it stop in the liquid path from the filtration means to the point of use? Contaminants adhering to the inner walls of the liquid passages are released from the contaminated liquid substances, allowing the contamination of the liquid substances to progress, and when the use of liquid substances in the youth boiler is resumed, the contaminated liquid substances are removed. There is a risk of supplying it to the point of use. Particularly in the case of this interruption, if the liquid path to the youth boiler 1 is long, the degree of contamination of the liquid substance will be high. The risk of this contamination is not limited to when restarting the supply, but also when returning the liquid substance remaining in the liquid path to the container, re-contaminating the clean liquid in the container by impurities that are generated in the return pipe and mixed in. There is always a risk that this will happen.

[Purpose of the invention]

The present invention is a device invented in view of the drawbacks of the conventional filtration and supply devices as described above, and is a device that filters the liquid material without stagnation in the liquid passage even if the liquid material is unused at the point of use. The purpose is to enhance the effectiveness and always supply the liquid material utilization section in a clean and dust-free state.

[Structure of the invention]

That is, the apparatus of the present invention is a filtration supply device capable of supplying a liquid substance containing fine solid particles as impurities from a group of liquid containers to a point of use as a cleaning liquid through a liquid passage having a filtration means. The structure is characterized in that a return means having an on-off valve and a filtration means is provided between the liquid container group and the liquid container group immediately before the use point, thereby increasing the filtration effect and directing the liquid substance into the liquid passage. It is possible to supply the product to the place of use in a clean and dust-free condition without having to stop the product for 7 meters.

The filtration supply device of the present invention is suitable for cleaning other chemical products such as nitric acid, hydrogen peroxide, ammonia water, etc. and supplying them in a dust-free state.

〔Example〕

Next, details of the present invention will be explained with reference to the accompanying drawings showing an example of an embodiment of the filtration supply device according to the present invention.

FIG. 1 shows an external perspective view of a clean bench that accommodates a liquid container in a filtration supply device according to the present invention, where A is the clean bench main body, AI. A2 each indicates a housing section for a liquid container.

FIG. 2 does not show a piping diagram of the filtration supply Vt position according to the present invention.

In FIG. 2, 1.2 represents a liquid container, 3 represents a gas filtration means, 4 and 5 represent a liquid filtration means, and 6 represents a pressure reducing valve. The liquid containers 1 and 2 are provided with gas passages 14.15 for liquid transport and liquid passages 20.15 for the discharge and entry of liquid substances.
21 is attached. The gas passages 14 and 15 are connected to the gas passages 12 and 13, respectively, and the gas passages 12 and 15 are connected to the gas passages 12 and 13, respectively.
, 13 are connected to one end of a gas passage 11 which communicates with a gas supply port for liquid transport via opening/opening valves 42 and 43. The gas passage 11 is provided with a gas filtering means 3, an intermittent valve 41, and a pressure reducing valve 6. Further, the gas passage 14.15 is connected to the gas discharge passage 16 via an on-off valve 44.45.

On the other hand, liquid passages 20.21 for discharging and inputting liquid substances are connected to liquid passages 22.23 and 27.28, respectively, via on-off valves 46a, 46b, 47a, and 47b.

The liquid passages 22, 23 communicate with one end of a liquid passage 24, in which liquid filtering means 4 are arranged. The liquid passage 24 is connected to one end of a liquid passage 25, and the liquid passage 25 is connected to a liquid passage 26 via an on-off valve 48, and one end of the liquid passage 26 is connected to a liquid passage 27, 28. , a first liquid circulation passage that circulates in the liquid container 1 or 2 is formed. Further, the liquid passage 24 is connected to the inter-closing valve 5.
The liquid passage 29 is connected to a use point (indicated by P in the drawing) via an on-off valve 51, and communicates with the liquid passage 30 via an on-off valve 52. are doing. A liquid filtering means 5 is interposed in the liquid passage 3o, and the liquid passage 30 is connected to the liquid passage 26 through four on-off valves, and the liquid passage 27.2 is connected to the liquid passage 26 through four on-off valves.
A second liquid circulation path (return means) is formed which circulates to the liquid containers 1 and 2 via 8.

Next, referring to FIG. 2, an outline of the operation of the apparatus of the present invention will be briefly explained. The liquid container 1 is pressurized by injecting a liquid transporting gas made of an inert gas into the liquid container 1 from the gas supply port through the gas passages 11, 12, and 14. The liquid substance in the liquid container 1 is transferred from the liquid channel 20.22 to the liquid container 2 by the aforementioned first liquid circulation path. Once all of the liquid substance in the liquid container 1 has been transferred to the liquid container 2, pressurized gas is sent to the liquid container 2 from the gas passage 13.15, and the liquid substance in the liquid container 2 is transferred to the liquid passage 2.
1.23, and is transferred to the liquid container 1 through the first liquid idle circulation passage.

In this way, the liquid substance is transferred between the liquid containers 1 and 2 into the liquid i! a
, after being circulated and cleaned several times through the first liquid idle circulation passage via the means 4, a, the use point U. Supplied to P.

In addition to the liquid pressurization means using gas for transporting the liquid, a bomb may be disposed on the liquid container outlet side of the liquid passage 24 for transportation.

On the other hand, use point U. If the use of the liquid substance in the device is interrupted or temporarily stopped at J5, the liquid substance is transferred to the liquid container group 1 or 2 and the use point U.P by the above-mentioned return means. It is circulated between P.

The liquid filtering means 5 in this return means is preferably arranged as close as possible to the liquid container.

The device 5A of the present invention is designed to prevent impurities from being mixed into the liquid substance, or even if there is a possibility of mixing, the cleanliness can be maintained by the filtration means while suppressing the possibility as much as possible. . Therefore, it is desirable that the present invention can be implemented in a large-sized liquid supply device, and can also be applied to a small-sized portable device to manage the cleanliness of liquid substances.

When the present invention is implemented in a small portable location, the storage location for the liquid container is kept at a cleanliness level of i. The container is installed in a clean bench of about 100~100 mm, and the piping entry area of the container is cleaned and managed, and then replaced with a newly filled liquid container. This control prevents new impurities from entering through the piping connections.

In the liquid filtration and supply apparatus of the present invention shown in FIG. 1, the liquid container is stored in a clean bench and cleaned by a cleaning means to prevent contamination during transport.

In addition, the liquid container itself is generally portable,
It can be exchanged with a liquid container filled with a liquid substance by a competent official.

〔Effect of the invention〕

As described above, the liquid temporary supply device of the present invention includes a liquid circulation path consisting of a liquid passage that passes through a liquid filtering means between liquid containers, and a liquid circulation path that passes through a liquid filtering means between the liquid container and a point of use. Since the liquid circulation passage is equipped with a return means, the liquid substance itself is sufficiently cleaned, and even if the supply of the liquid substance from the use point is interrupted or stopped, the liquid container and the use point are Since the liquid substance is circulated between the pipes, the liquid substance is not stagnated in the pipe, and therefore, the contaminants that adhere to the inner wall of the pipe due to stagnation are always removed from the liquid filtration means in the return means. This prevents contamination of the liquid substance and allows it to be supplied in a dust-free state at all times.

In addition, since the liquid container is movable, it is easy to replace the container, and since the liquid container is stored in a clean bench, sufficient cleanliness can be achieved when the container is taken out. .

[Brief explanation of the drawing]

FIG. 1 shows an external perspective view of a clean bench that houses a liquid container in a liquid filtration and supply device according to the present invention, and FIG.
The figure shows a piping diagram of a liquid filtration and supply device according to the present invention. A...Clean bench body, Al. A2...Liquid container storage section, △3...Air cleaning means, 1.2...Liquid container, 3...Gas filtration means, 4.5...Liquid filtration means, 6... Pressure reducing valve, 11, 12, 13.14.15
... Gas passage, 16... Gas discharge passage, 20.21
, 22, 23.24, 25.26.27.28.29.
30...Liquid passage, 41, 42, 43, 44, 45.
46a, 46b, 47a, 47b, 48. ,49,50
．． 51.52...Opening/closing valve.

Claims (1)

[Scope of Claims] 1) A filtration supply device capable of supplying a liquid substance containing fine fixed particles as impurities from a group of liquid containers to a point of use as a cleaning liquid through a liquid passage having a filtration means. A fine dust-free type liquid filtration and supply device, characterized in that a return means having an on-off valve and a filtration means is provided between the liquid container group and the liquid container group immediately before the point of use. 2) The fine dust-free liquid filtration and supply device according to claim 1, wherein the liquid container is a movable container. 3) The fine dust-free type liquid filtration and supply device according to claims 1 and 2, characterized in that the liquid container is housed and disposed within a clean bench.