JPS63140628U - - Google Patents

Info

Publication number
JPS63140628U
JPS63140628U JP3207587U JP3207587U JPS63140628U JP S63140628 U JPS63140628 U JP S63140628U JP 3207587 U JP3207587 U JP 3207587U JP 3207587 U JP3207587 U JP 3207587U JP S63140628 U JPS63140628 U JP S63140628U
Authority
JP
Japan
Prior art keywords
information
needle
control signal
probe
input information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3207587U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3207587U priority Critical patent/JPS63140628U/ja
Publication of JPS63140628U publication Critical patent/JPS63140628U/ja
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の一実施例に係る制御系を示す
ブロツク図、第2図a〜dは第1図の実施例にお
ける外部入力情報を説明するためのチエツクトラ
ンジスタの電極パツドの平面略図、第3図および
第4図は、それぞれ本考案の第2および第3の実
施例に係る制御系を説明するためのブロツク図で
ある。 1……情報入出力部、2……CPU(コントロ
ールプロセツサユニツト)、3……針間隔設定部
、4……ROMまたはRAM、5……自動データ
採取部。
1 is a block diagram showing a control system according to an embodiment of the present invention; FIGS. 2a to 2d are schematic plan views of electrode pads of check transistors for explaining external input information in the embodiment of FIG. 1; FIGS. 3 and 4 are block diagrams for explaining control systems according to second and third embodiments of the present invention, respectively. 1... Information input/output section, 2... CPU (control processor unit), 3... Needle interval setting section, 4... ROM or RAM, 5... Automatic data collection section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 外部オペレータからの情報を入力する情報入力
部と、前記入力情報を受け、この入力情報に応じ
探針の針間隔を制御する制御信号を出力するコン
トロールプロセツサユニツトと、前記コントロー
ルプロセツサユニツトからの制御信号により、針
間隔を設定する針間隔設定部とを含むことを特徴
とする自動制御多探針チエツカー。
an information input unit for inputting information from an external operator; a control processor unit for receiving the input information and outputting a control signal for controlling the needle spacing of the probe according to the input information; An automatic control multi-probe checker comprising: a needle interval setting section that sets the needle interval according to a control signal.
JP3207587U 1987-03-04 1987-03-04 Pending JPS63140628U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3207587U JPS63140628U (en) 1987-03-04 1987-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3207587U JPS63140628U (en) 1987-03-04 1987-03-04

Publications (1)

Publication Number Publication Date
JPS63140628U true JPS63140628U (en) 1988-09-16

Family

ID=30838401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3207587U Pending JPS63140628U (en) 1987-03-04 1987-03-04

Country Status (1)

Country Link
JP (1) JPS63140628U (en)

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