JPS63140628U - - Google Patents
Info
- Publication number
- JPS63140628U JPS63140628U JP3207587U JP3207587U JPS63140628U JP S63140628 U JPS63140628 U JP S63140628U JP 3207587 U JP3207587 U JP 3207587U JP 3207587 U JP3207587 U JP 3207587U JP S63140628 U JPS63140628 U JP S63140628U
- Authority
- JP
- Japan
- Prior art keywords
- information
- needle
- control signal
- probe
- input information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000013480 data collection Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第1図は本考案の一実施例に係る制御系を示す
ブロツク図、第2図a〜dは第1図の実施例にお
ける外部入力情報を説明するためのチエツクトラ
ンジスタの電極パツドの平面略図、第3図および
第4図は、それぞれ本考案の第2および第3の実
施例に係る制御系を説明するためのブロツク図で
ある。
1……情報入出力部、2……CPU(コントロ
ールプロセツサユニツト)、3……針間隔設定部
、4……ROMまたはRAM、5……自動データ
採取部。
1 is a block diagram showing a control system according to an embodiment of the present invention; FIGS. 2a to 2d are schematic plan views of electrode pads of check transistors for explaining external input information in the embodiment of FIG. 1; FIGS. 3 and 4 are block diagrams for explaining control systems according to second and third embodiments of the present invention, respectively. 1... Information input/output section, 2... CPU (control processor unit), 3... Needle interval setting section, 4... ROM or RAM, 5... Automatic data collection section.
Claims (1)
部と、前記入力情報を受け、この入力情報に応じ
探針の針間隔を制御する制御信号を出力するコン
トロールプロセツサユニツトと、前記コントロー
ルプロセツサユニツトからの制御信号により、針
間隔を設定する針間隔設定部とを含むことを特徴
とする自動制御多探針チエツカー。 an information input unit for inputting information from an external operator; a control processor unit for receiving the input information and outputting a control signal for controlling the needle spacing of the probe according to the input information; An automatic control multi-probe checker comprising: a needle interval setting section that sets the needle interval according to a control signal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3207587U JPS63140628U (en) | 1987-03-04 | 1987-03-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3207587U JPS63140628U (en) | 1987-03-04 | 1987-03-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63140628U true JPS63140628U (en) | 1988-09-16 |
Family
ID=30838401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3207587U Pending JPS63140628U (en) | 1987-03-04 | 1987-03-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63140628U (en) |
-
1987
- 1987-03-04 JP JP3207587U patent/JPS63140628U/ja active Pending
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