JPS63140620U - - Google Patents

Info

Publication number
JPS63140620U
JPS63140620U JP3368787U JP3368787U JPS63140620U JP S63140620 U JPS63140620 U JP S63140620U JP 3368787 U JP3368787 U JP 3368787U JP 3368787 U JP3368787 U JP 3368787U JP S63140620 U JPS63140620 U JP S63140620U
Authority
JP
Japan
Prior art keywords
tube
furnace core
core tube
scavenger
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3368787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0737310Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987033687U priority Critical patent/JPH0737310Y2/ja
Publication of JPS63140620U publication Critical patent/JPS63140620U/ja
Application granted granted Critical
Publication of JPH0737310Y2 publication Critical patent/JPH0737310Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
JP1987033687U 1987-03-05 1987-03-05 熱処理炉 Expired - Lifetime JPH0737310Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987033687U JPH0737310Y2 (ja) 1987-03-05 1987-03-05 熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987033687U JPH0737310Y2 (ja) 1987-03-05 1987-03-05 熱処理炉

Publications (2)

Publication Number Publication Date
JPS63140620U true JPS63140620U (US07122547-20061017-C00273.png) 1988-09-16
JPH0737310Y2 JPH0737310Y2 (ja) 1995-08-23

Family

ID=30841528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987033687U Expired - Lifetime JPH0737310Y2 (ja) 1987-03-05 1987-03-05 熱処理炉

Country Status (1)

Country Link
JP (1) JPH0737310Y2 (US07122547-20061017-C00273.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426664A (en) * 1977-07-29 1979-02-28 Nec Corp Tool for heat treatment of semiconductor wafer
JPS59119031U (ja) * 1983-02-01 1984-08-11 セイコーインスツルメンツ株式会社 拡散装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426664A (en) * 1977-07-29 1979-02-28 Nec Corp Tool for heat treatment of semiconductor wafer
JPS59119031U (ja) * 1983-02-01 1984-08-11 セイコーインスツルメンツ株式会社 拡散装置

Also Published As

Publication number Publication date
JPH0737310Y2 (ja) 1995-08-23

Similar Documents

Publication Publication Date Title
JPS63140620U (US07122547-20061017-C00273.png)
JPS6391442U (US07122547-20061017-C00273.png)
JPS63124736U (US07122547-20061017-C00273.png)
JPH0160199U (US07122547-20061017-C00273.png)
JPS5871520U (ja) ガスバ−ナ
JPS62182247U (US07122547-20061017-C00273.png)
JPS6173892U (US07122547-20061017-C00273.png)
JPS61101309U (US07122547-20061017-C00273.png)
JPS6177901U (US07122547-20061017-C00273.png)
JPH0242645U (US07122547-20061017-C00273.png)
JPS6196083U (US07122547-20061017-C00273.png)
JPS63185968U (US07122547-20061017-C00273.png)
JPS648026U (US07122547-20061017-C00273.png)
JPS5992331U (ja) タ−ル燃焼バ−ナ
JPH0194749U (US07122547-20061017-C00273.png)
JPS63121235U (US07122547-20061017-C00273.png)
JPS63154925U (US07122547-20061017-C00273.png)
JPH01101035U (US07122547-20061017-C00273.png)
JPH0252439U (US07122547-20061017-C00273.png)
JPS6438312U (US07122547-20061017-C00273.png)
JPS62116104U (US07122547-20061017-C00273.png)
JPS58129635U (ja) 熱処理装置
JPS63167241U (US07122547-20061017-C00273.png)
JPS6415043U (US07122547-20061017-C00273.png)
JPS62134507U (US07122547-20061017-C00273.png)