JPS63140063U - - Google Patents

Info

Publication number
JPS63140063U
JPS63140063U JP3037387U JP3037387U JPS63140063U JP S63140063 U JPS63140063 U JP S63140063U JP 3037387 U JP3037387 U JP 3037387U JP 3037387 U JP3037387 U JP 3037387U JP S63140063 U JPS63140063 U JP S63140063U
Authority
JP
Japan
Prior art keywords
roll
winding roll
vapor deposition
induction heating
heating coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3037387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3037387U priority Critical patent/JPS63140063U/ja
Publication of JPS63140063U publication Critical patent/JPS63140063U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3037387U 1987-03-04 1987-03-04 Pending JPS63140063U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3037387U JPS63140063U (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3037387U JPS63140063U (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Publications (1)

Publication Number Publication Date
JPS63140063U true JPS63140063U (enrdf_load_stackoverflow) 1988-09-14

Family

ID=30835117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3037387U Pending JPS63140063U (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Country Status (1)

Country Link
JP (1) JPS63140063U (enrdf_load_stackoverflow)

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