JPS63140062U - - Google Patents
Info
- Publication number
- JPS63140062U JPS63140062U JP3112287U JP3112287U JPS63140062U JP S63140062 U JPS63140062 U JP S63140062U JP 3112287 U JP3112287 U JP 3112287U JP 3112287 U JP3112287 U JP 3112287U JP S63140062 U JPS63140062 U JP S63140062U
- Authority
- JP
- Japan
- Prior art keywords
- connector rod
- power
- ion implantation
- supplied
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910000510 noble metal Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3112287U JPS63140062U (cs) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3112287U JPS63140062U (cs) | 1987-03-05 | 1987-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140062U true JPS63140062U (cs) | 1988-09-14 |
Family
ID=30836570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3112287U Pending JPS63140062U (cs) | 1987-03-05 | 1987-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140062U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61285743A (ja) * | 1985-06-12 | 1986-12-16 | Hitachi Ltd | 電気的装置 |
-
1987
- 1987-03-05 JP JP3112287U patent/JPS63140062U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61285743A (ja) * | 1985-06-12 | 1986-12-16 | Hitachi Ltd | 電気的装置 |