JPS63139609U - - Google Patents
Info
- Publication number
- JPS63139609U JPS63139609U JP3056687U JP3056687U JPS63139609U JP S63139609 U JPS63139609 U JP S63139609U JP 3056687 U JP3056687 U JP 3056687U JP 3056687 U JP3056687 U JP 3056687U JP S63139609 U JPS63139609 U JP S63139609U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas flow
- bridge circuit
- sensor
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3056687U JPS63139609U (OSRAM) | 1987-03-02 | 1987-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3056687U JPS63139609U (OSRAM) | 1987-03-02 | 1987-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63139609U true JPS63139609U (OSRAM) | 1988-09-14 |
Family
ID=30835494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3056687U Pending JPS63139609U (OSRAM) | 1987-03-02 | 1987-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63139609U (OSRAM) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61157912A (ja) * | 1984-12-29 | 1986-07-17 | Nippon Tairan Kk | 質量流量制御装置 |
-
1987
- 1987-03-02 JP JP3056687U patent/JPS63139609U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61157912A (ja) * | 1984-12-29 | 1986-07-17 | Nippon Tairan Kk | 質量流量制御装置 |