JPS62199814U - - Google Patents
Info
- Publication number
- JPS62199814U JPS62199814U JP8837386U JP8837386U JPS62199814U JP S62199814 U JPS62199814 U JP S62199814U JP 8837386 U JP8837386 U JP 8837386U JP 8837386 U JP8837386 U JP 8837386U JP S62199814 U JPS62199814 U JP S62199814U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- gas flow
- controller
- sensor
- digital
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 3
- 230000001105 regulatory effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8837386U JPS62199814U (OSRAM) | 1986-06-10 | 1986-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8837386U JPS62199814U (OSRAM) | 1986-06-10 | 1986-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62199814U true JPS62199814U (OSRAM) | 1987-12-19 |
Family
ID=30946424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8837386U Pending JPS62199814U (OSRAM) | 1986-06-10 | 1986-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62199814U (OSRAM) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60163103A (ja) * | 1984-02-01 | 1985-08-26 | Taisei Denki Seisakusho:Kk | 流量制御装置 |
-
1986
- 1986-06-10 JP JP8837386U patent/JPS62199814U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60163103A (ja) * | 1984-02-01 | 1985-08-26 | Taisei Denki Seisakusho:Kk | 流量制御装置 |
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