JPS63138991U - - Google Patents
Info
- Publication number
- JPS63138991U JPS63138991U JP1987032488U JP3248887U JPS63138991U JP S63138991 U JPS63138991 U JP S63138991U JP 1987032488 U JP1987032488 U JP 1987032488U JP 3248887 U JP3248887 U JP 3248887U JP S63138991 U JPS63138991 U JP S63138991U
- Authority
- JP
- Japan
- Prior art keywords
- excimer laser
- workpiece
- scanning means
- lens
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987032488U JPS63138991U (tr) | 1987-03-05 | 1987-03-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987032488U JPS63138991U (tr) | 1987-03-05 | 1987-03-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63138991U true JPS63138991U (tr) | 1988-09-13 |
Family
ID=30839210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987032488U Pending JPS63138991U (tr) | 1987-03-05 | 1987-03-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63138991U (tr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8686315B2 (en) | 2001-09-25 | 2014-04-01 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device |
-
1987
- 1987-03-05 JP JP1987032488U patent/JPS63138991U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8686315B2 (en) | 2001-09-25 | 2014-04-01 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device |
US9748099B2 (en) | 2001-09-25 | 2017-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device |