JPS63137939U - - Google Patents

Info

Publication number
JPS63137939U
JPS63137939U JP3096787U JP3096787U JPS63137939U JP S63137939 U JPS63137939 U JP S63137939U JP 3096787 U JP3096787 U JP 3096787U JP 3096787 U JP3096787 U JP 3096787U JP S63137939 U JPS63137939 U JP S63137939U
Authority
JP
Japan
Prior art keywords
stage
wafer transfer
boat
transfer table
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3096787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0610686Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987030967U priority Critical patent/JPH0610686Y2/ja
Publication of JPS63137939U publication Critical patent/JPS63137939U/ja
Application granted granted Critical
Publication of JPH0610686Y2 publication Critical patent/JPH0610686Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987030967U 1987-03-03 1987-03-03 ウエハ移し替装置 Expired - Lifetime JPH0610686Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987030967U JPH0610686Y2 (ja) 1987-03-03 1987-03-03 ウエハ移し替装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987030967U JPH0610686Y2 (ja) 1987-03-03 1987-03-03 ウエハ移し替装置

Publications (2)

Publication Number Publication Date
JPS63137939U true JPS63137939U (US20030157025A1-20030821-C00031.png) 1988-09-12
JPH0610686Y2 JPH0610686Y2 (ja) 1994-03-16

Family

ID=30836262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987030967U Expired - Lifetime JPH0610686Y2 (ja) 1987-03-03 1987-03-03 ウエハ移し替装置

Country Status (1)

Country Link
JP (1) JPH0610686Y2 (US20030157025A1-20030821-C00031.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015159836A1 (ja) * 2014-04-14 2015-10-22 富士フイルム株式会社 応力測定方法、応力測定用部材、および応力測定用セット

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991735U (ja) * 1982-12-10 1984-06-21 日本電気ホームエレクトロニクス株式会社 半導体ウエ−ハ移し替え装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991735U (ja) * 1982-12-10 1984-06-21 日本電気ホームエレクトロニクス株式会社 半導体ウエ−ハ移し替え装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015159836A1 (ja) * 2014-04-14 2015-10-22 富士フイルム株式会社 応力測定方法、応力測定用部材、および応力測定用セット

Also Published As

Publication number Publication date
JPH0610686Y2 (ja) 1994-03-16

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