JPS63137933U - - Google Patents
Info
- Publication number
- JPS63137933U JPS63137933U JP3163587U JP3163587U JPS63137933U JP S63137933 U JPS63137933 U JP S63137933U JP 3163587 U JP3163587 U JP 3163587U JP 3163587 U JP3163587 U JP 3163587U JP S63137933 U JPS63137933 U JP S63137933U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafer
- storage hole
- semiconductor
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3163587U JPS63137933U (es) | 1987-03-03 | 1987-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3163587U JPS63137933U (es) | 1987-03-03 | 1987-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137933U true JPS63137933U (es) | 1988-09-12 |
Family
ID=30837553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3163587U Pending JPS63137933U (es) | 1987-03-03 | 1987-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137933U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173560A (ja) * | 2004-11-16 | 2006-06-29 | Sumitomo Electric Ind Ltd | ウエハガイド、有機金属気相成長装置および窒化物系半導体を堆積する方法 |
-
1987
- 1987-03-03 JP JP3163587U patent/JPS63137933U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006173560A (ja) * | 2004-11-16 | 2006-06-29 | Sumitomo Electric Ind Ltd | ウエハガイド、有機金属気相成長装置および窒化物系半導体を堆積する方法 |
| KR101127748B1 (ko) * | 2004-11-16 | 2012-03-23 | 스미토모덴키고교가부시키가이샤 | 웨이퍼 가이드, 유기 금속 기상 성장 장치 및 질화물계반도체를 퇴적하는 방법 |