JPS6313633U - - Google Patents

Info

Publication number
JPS6313633U
JPS6313633U JP10660286U JP10660286U JPS6313633U JP S6313633 U JPS6313633 U JP S6313633U JP 10660286 U JP10660286 U JP 10660286U JP 10660286 U JP10660286 U JP 10660286U JP S6313633 U JPS6313633 U JP S6313633U
Authority
JP
Japan
Prior art keywords
face plate
processing device
disk
porous
peripheral edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10660286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0627306Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986106602U priority Critical patent/JPH0627306Y2/ja
Publication of JPS6313633U publication Critical patent/JPS6313633U/ja
Application granted granted Critical
Publication of JPH0627306Y2 publication Critical patent/JPH0627306Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1986106602U 1986-07-11 1986-07-11 ディスクの加工装置 Expired - Lifetime JPH0627306Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986106602U JPH0627306Y2 (ja) 1986-07-11 1986-07-11 ディスクの加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986106602U JPH0627306Y2 (ja) 1986-07-11 1986-07-11 ディスクの加工装置

Publications (2)

Publication Number Publication Date
JPS6313633U true JPS6313633U (enrdf_load_html_response) 1988-01-29
JPH0627306Y2 JPH0627306Y2 (ja) 1994-07-27

Family

ID=30982114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986106602U Expired - Lifetime JPH0627306Y2 (ja) 1986-07-11 1986-07-11 ディスクの加工装置

Country Status (1)

Country Link
JP (1) JPH0627306Y2 (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014501440A (ja) * 2010-12-14 2014-01-20 エーファウ・グループ・エー・タルナー・ゲーエムベーハー ウェハを保持しマウントするための保持装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694238U (enrdf_load_html_response) * 1979-12-18 1981-07-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694238U (enrdf_load_html_response) * 1979-12-18 1981-07-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014501440A (ja) * 2010-12-14 2014-01-20 エーファウ・グループ・エー・タルナー・ゲーエムベーハー ウェハを保持しマウントするための保持装置

Also Published As

Publication number Publication date
JPH0627306Y2 (ja) 1994-07-27

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