JPS63136273U - - Google Patents
Info
- Publication number
- JPS63136273U JPS63136273U JP2901187U JP2901187U JPS63136273U JP S63136273 U JPS63136273 U JP S63136273U JP 2901187 U JP2901187 U JP 2901187U JP 2901187 U JP2901187 U JP 2901187U JP S63136273 U JPS63136273 U JP S63136273U
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- expansion cylinders
- flat surface
- slit
- cryopump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987029011U JPH0519587Y2 (en, 2012) | 1987-02-28 | 1987-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987029011U JPH0519587Y2 (en, 2012) | 1987-02-28 | 1987-02-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63136273U true JPS63136273U (en, 2012) | 1988-09-07 |
| JPH0519587Y2 JPH0519587Y2 (en, 2012) | 1993-05-24 |
Family
ID=30832508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987029011U Expired - Lifetime JPH0519587Y2 (en, 2012) | 1987-02-28 | 1987-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519587Y2 (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58131381A (ja) * | 1982-01-29 | 1983-08-05 | Anelva Corp | クライオポンプ及びクライオポンプ用冷凍機 |
-
1987
- 1987-02-28 JP JP1987029011U patent/JPH0519587Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58131381A (ja) * | 1982-01-29 | 1983-08-05 | Anelva Corp | クライオポンプ及びクライオポンプ用冷凍機 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519587Y2 (en, 2012) | 1993-05-24 |