JPS63136273U - - Google Patents

Info

Publication number
JPS63136273U
JPS63136273U JP2901187U JP2901187U JPS63136273U JP S63136273 U JPS63136273 U JP S63136273U JP 2901187 U JP2901187 U JP 2901187U JP 2901187 U JP2901187 U JP 2901187U JP S63136273 U JPS63136273 U JP S63136273U
Authority
JP
Japan
Prior art keywords
cryopanel
expansion cylinders
flat surface
slit
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2901187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519587Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987029011U priority Critical patent/JPH0519587Y2/ja
Publication of JPS63136273U publication Critical patent/JPS63136273U/ja
Application granted granted Critical
Publication of JPH0519587Y2 publication Critical patent/JPH0519587Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1987029011U 1987-02-28 1987-02-28 Expired - Lifetime JPH0519587Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987029011U JPH0519587Y2 (enrdf_load_stackoverflow) 1987-02-28 1987-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987029011U JPH0519587Y2 (enrdf_load_stackoverflow) 1987-02-28 1987-02-28

Publications (2)

Publication Number Publication Date
JPS63136273U true JPS63136273U (enrdf_load_stackoverflow) 1988-09-07
JPH0519587Y2 JPH0519587Y2 (enrdf_load_stackoverflow) 1993-05-24

Family

ID=30832508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987029011U Expired - Lifetime JPH0519587Y2 (enrdf_load_stackoverflow) 1987-02-28 1987-02-28

Country Status (1)

Country Link
JP (1) JPH0519587Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58131381A (ja) * 1982-01-29 1983-08-05 Anelva Corp クライオポンプ及びクライオポンプ用冷凍機

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58131381A (ja) * 1982-01-29 1983-08-05 Anelva Corp クライオポンプ及びクライオポンプ用冷凍機

Also Published As

Publication number Publication date
JPH0519587Y2 (enrdf_load_stackoverflow) 1993-05-24

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