JPS63135845A - Light emission analyzer - Google Patents

Abstract

PURPOSE:To automate the operation of a spectroscope and a high frequency generator with one control system, by controlling the setting of a high frequency power and igniting operation for each element in a light emission analyzer having the spectroscope and the high frequency power generator. CONSTITUTION:A power measuring list is inputted into a control computer 2 to match measurement of each element. To set the power matching element to be measured, a setting instruction is transmitted to an input/output controller 20 from the computer 2. A signal of the instruction is inputted into an electron varying attenuator 16. A high frequency signal is inputted into the electron varying attenuator 16 from a crystal resonator 17 to be increased or decreased depending on a set value. Then, an output of the electron varying attenuator 16 is converted with a power amplifier 14 into power to supply a plasma generation power E to a load coil 10. When the power E reaches a set value, a plasma 9 is ignited. After the ignition, the power E is controlled with the controller 20. A sample 4 is put into the plasma 9 together with an argon gas 5 to analyze elements with a spectroscope 1 and the results are transferred to the computer 2. This enables automation of the entire system with one controller thereby assuring efficient operation.

Description

[Detailed description of the invention] [Industrial application field] The present invention uses plasma emission spectrometry (ICP).

The present invention relates to an apparatus for analyzing the amount of elements in metals as emission spectrum intensity, and particularly to an emission spectrum analyzer suitable for eliminating errors in measurement operations by automatically setting high frequency power used as a means for emitting light.

[Conventional technology]

FIG. 2 shows a conventionally used high frequency power source for inductively coupled plasma light emission. In this method, the high-frequency power supply system for plasma generation is completely independent from the spectrometer 1, control computer 2, and data processing computer 3, and the ignition of the plasma and the rise and fall of the output power are controlled by a manual ignition switch 25 and a variable output adjustment. It was done with resistor 18. With this method, in order to obtain the appropriate power for the element to be analyzed, you have to manually raise the power to a point where it can be ignited before measurement, then operate the ignition, and then set it to the power required for measurement, which is a hassle. In order to eliminate the above-mentioned drawbacks, the present invention is designed to perform all operations automatically.

[Problem that the invention seeks to solve]

In the conventional technology mentioned above, the spectrometer and the high-frequency power generator were operated and set the conditions independently for the sake of operability of the device, so when making measurements, the user of the device always set the high-frequency power to match the analyzed element. For this reason, no consideration was given to automation of measurement values, and there was a problem in measurement efficiency.6 The purpose of the present invention is to solve the above problems by developing a spectrometer and a high-frequency power generator. The goal is to automate operations using one control system.

[Means for solving problems]

The above purpose is to automatically control the input voltage of the high-frequency power generator using a control computer, thereby constantly monitoring the output and raising and lowering the upper limit with high resolution, maintaining safety and adapting to the conditions of the element to be measured at that time. By being able to perform analysis under suitable output power settings, measurement efficiency is improved and operability is simplified.

[Effect]

In the ICP emission spectrometer of the present invention, the spectrometer and the high-frequency power generator are integrated and operate and monitor within one control system, and furthermore, due to automation, if the high-frequency power decreases or stops for some reason, the plasma Even if a fire goes out, spectrometer measurements can be stopped immediately, which prevents errors and waste in measurements and operations.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

The spectrometer 1 is equipped with a grating that separates light wavelengths suitable for each element, a photomultiplier that detects optical signals, and an amplifier, and also has the function of converting an analog signal into a digital signal and transmitting it to a computer. First, in order to emit plasma suitable for the element to be measured, the data processing computer 4 issues a power setting command to the input/output control number 20 from the 0th order 2, which sends a signal to the control computer 2. 20, which receives this command, is the input of the D/A converter 21. Don't increase the amount of digital 21
Scan the analog quantity of the output. This signal is transmitted to the amplifier 22
and enters the selector switch 19. At this time, 19 is switched to the a side (automatic), and the output of 22 is input to the electronic variable attenuator 16. On the other hand, a high frequency signal of 27.12M7 enters 16 from crystal oscillator 17, increases or decreases depending on the magnitude of the signal from 22, and its output is amplified by excitation amplifier 15.
The power amplifier 14 converts the signal into electric power. This power passes through an incident power detector 13 and a phase detector 12 and is supplied to the load coil 1o. At this time, the incident power detected at 13 enters amplifiers 23 and 16 simultaneously. The output of 23 is input to an A/D converter 24, which converts it into a digital signal and inputs it to 20. When the output of the power amplifier 14 detects a signal corresponding to about IKv, the increment of the digital signal sent from 20 to 21 is stopped, 2 issues an ignition command to 20 again, and 20 turns on the ignition switch 25. rave nighter
6 emits a discharge current to ignite the plasma generating section 9.

Upon receiving the light of the ignited plasma, the spectrometer 1 sends an ignition confirmation signal to the spectrometer 2.0 Having learned that the ignition was successful, the spectrometer 1 enters into operation to further control the measured power 20 requested in step 3. On the other hand, the detection signal from the phase detector 12 is input to the motor driver 7, drives the motor 8, controls the variable capacitor 11, and automatically performs the impedance matching in 11.10. Argon gas 5 and measurement sample 4 are supplied. In addition, by switching the selector switch 19 to the m side (manual), you can manually operate the output adjustment variable resistor 18 to adjust the power. By creating a table on the computer, the amm electric power control computer can automatically set the power suitable for the element, which has two features: increasing measurement efficiency and eliminating measurement errors.

〔Effect of the invention〕

In the prior art, two devices are operated independently.

However, according to the present invention, the entire system can be operated automatically and efficiently by controlling it from one device, which simplifies the customer's operability of the device, especially for plasma It also has the effect of preventing mistakes in the setting conditions for generated power.

[Brief explanation of the drawing]

FIG. 1 is a generation system diagram of high-frequency plasma in an ICP emission spectrum analyzer according to an embodiment of the present invention, and FIG. 2 is a generation system diagram of high-frequency plasma in a conventional ICP emission spectrum analyzer. 1... Spectrometer, 2... Control computer, 3...
- Data processing computer, 4... Sample, 5... Argon gas, 6... Igniter, 7... Motor driver, 8... Motor, 9... Plasma generation unit, 10
...Load coil, 11...Variable capacitor, 12
...Phase detector. 13... Incident power detector, 14... Power amplifier, 1
5... Excitation amplifier, 16... Electronic variable attenuator, 17
...Crystal resonator, 18...Variable resistor for output adjustment,
19... Selector switch, 20... Input/output controller, 2
1...D/A converter, 22.23...Amplifier, 24
... A/D converter, 25... Ignition switch.

Claims (1)

[Claims] 1. In an analysis device consisting of a spectrometer, a high-frequency power generator, and a control and data processing computer, the high-frequency power setting and ignition operation, as well as the operation of the spectrometer, can be automatically operated by the control computer. Features of the luminescence spectrometer. 2. Claim 1 is characterized by having a function of creating a measurement table for each element in a data processing computer and automatically setting power suitable for the analysis element in the table at the time of measurement. A luminescence spectrometer.