JPS63135739A - Transfer and air shower device - Google Patents
Transfer and air shower deviceInfo
- Publication number
- JPS63135739A JPS63135739A JP28257086A JP28257086A JPS63135739A JP S63135739 A JPS63135739 A JP S63135739A JP 28257086 A JP28257086 A JP 28257086A JP 28257086 A JP28257086 A JP 28257086A JP S63135739 A JPS63135739 A JP S63135739A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- air shower
- transfer
- transfer chamber
- floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 2
- 239000000428 dust Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Intermediate Stations On Conveyors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はクリーンルームを要する工場や物流施設等に於
ける搬送兼エアーシャワー装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a conveyance/air shower device used in factories, logistics facilities, etc. that require clean rooms.
(従来の技術およびその問題点〕
クリーン環境に於ける取り扱いを要するワークに付着し
ている粉塵等を、該ワークの自動搬送の経路に置いて除
去するための従来のエアーシャワー装置は、例えば第2
図に示すようにコンベヤ等の搬送機aによる水平搬送経
路中にエアーシャワー室すを構成し、該エアーシャワー
室すの両側に、夫々の側の搬送機aに対応して、自動ド
アCを備えたワーク出入口dを構成すると共に、エアー
シャワー室す内にも水平搬送用の搬送@eを設け、ワー
クfは前記搬送機a、eによって同一フロア−を水平に
搬送する際にエアーシャワー室す内に於いてエアーシャ
ワー部qによってエアーシャワー洗浄をされる構成であ
る。(Prior art and its problems) A conventional air shower device for removing dust, etc. attached to a workpiece that requires handling in a clean environment by placing it on the automatic transport path of the workpiece, for example, 2
As shown in the figure, an air shower room is constructed in the horizontal transport path by a transporter a such as a conveyor, and automatic doors C are installed on both sides of the air shower room, corresponding to the transporter a on each side. In addition to configuring a workpiece entrance d with a workpiece entrance d, a conveyor @e for horizontal conveyance is also provided in the air shower room, and when the workpiece f is horizontally conveyed on the same floor by the conveyors a and e, The structure is such that air shower cleaning is performed by the air shower section q during the cleaning process.
従来のエアーシャワー装置は、このように同一のフロア
−に於ける自動搬送経路中にのみ設けられているので、
建設コストの高いクリーンルームのスペースの有効利用
、効果的な粉塵等の除去及びシステムの能力の向上等の
点に於いて限界があった。Conventional air shower devices are installed only on the automatic conveyance path on the same floor, so
There were limitations in terms of effective use of clean room space, which is expensive to construct, effective removal of dust, etc., and improvement of system capacity.
本発明はこれらの点を従来よりも向上させることを目的
とするものであり、以下実施例に対応する図面に基づい
て詳細に説明する。The present invention aims to improve these points over the conventional ones, and will be described in detail below based on drawings corresponding to embodiments.
(問題点を解決するための手段〕
符号1は製薬工場、半導体工場等の工場や物流施設等の
、クリーンルームを要する施設の上下のフロア−28,
2b間に構成した搬送室を示すものであって、この搬送
室1内に、搬送機3によりワーク4を搬送自在に構成す
る。そして該搬送室1は前記各フロア−2a、2bに於
ける搬送機5a、5bに対応して、自動ドア6a、6b
を備えたワーク出入ロアa、7bを構成する。前記搬送
機3は、昇降により前記ワーク4を上下のフロア−2a
、 2’o問に搬送すると共に、夫々のフロア−2a、
2bに於ける搬送機5a、5bとの間でワーク4を移載
可能であれば、ワーク4を横方向に移送自在なコンベヤ
や移動台車を昇降自在とした構成等、適宜の構成で良い
。また夫々のフロア−2a、2bに於ける搬送機5a、
5bの構成及び設置個数も適宜である。しかして、本発
明は、前記搬送室1内に、上下に渡ってエアーシャワー
部8を設けたことを特徴とする。エアーシャワー部8は
空気噴射用のファン、フィルター、スリット又はノズル
と吸気口とを適宜に配設して構成する。(Means for solving the problem) Reference numeral 1 refers to the upper and lower floors 28 of facilities that require clean rooms, such as pharmaceutical factories, semiconductor factories, etc., and logistics facilities.
2b shows a transfer chamber configured between the transfer chamber 1 and the transfer chamber 1, in which a workpiece 4 is configured to be freely transferred by a transfer machine 3. The transfer chamber 1 has automatic doors 6a, 6b corresponding to the transfer machines 5a, 5b on each floor 2a, 2b.
The workpiece entry/exit lowers a and 7b are configured. The conveyor 3 moves the workpiece 4 to the upper and lower floors 2a by raising and lowering it.
, 2'o, and each floor-2a,
As long as the workpiece 4 can be transferred between the conveyors 5a and 5b in the conveyor 2b, any suitable structure may be used, such as a conveyor that can move the workpiece 4 laterally or a structure that allows the moving cart to be moved up and down. Also, the conveyor 5a on each floor 2a, 2b,
The configuration and number of units 5b installed are also appropriate. Therefore, the present invention is characterized in that an air shower section 8 is provided vertically within the transfer chamber 1. The air shower section 8 is constructed by appropriately arranging an air injection fan, filter, slit or nozzle, and an intake port.
以上の構成に於いて、例えば低階のフロア−2bから高
階のフロア−2aにワーク4を搬送するに際して、まず
搬送機5bによって出入ロアbに搬送したワーク4は、
一時的に□開とした自動ドア6bを通過させて搬送室1
内の搬送機3に移載し、そして該搬送機3を上昇さ゛ぜ
て高階に搬送する。In the above configuration, when transporting the workpiece 4 from the lower floor 2b to the higher floor 2a, for example, the workpiece 4 is first transported to the entrance/exit lower b by the transporter 5b.
Pass through the automatic door 6b that is temporarily opened □ and enter the transfer room 1.
The material is then transferred to the transport machine 3 inside the building, and the transport machine 3 is raised and transported to a higher floor.
しかしてワーク4を搬送I3に移載し、ドア6bを閉状
態とした後にエアーシャワー部8を動作させることによ
り、ワーク4を低階からへ階に搬送する間に搬送室1内
でエアーシャワー洗浄を行なうことができる。本発明は
エアーシャワー部8を、上下方向の搬送室1内に設ける
ので、図示例に示すように部分的に搬送室1内の全周に
渡って設りることができ、また上下に渡って設けていて
、上昇してくるワーク4に照射するので、ワーク4には
いろいろな角度からエアーシャワーが照射され、従って
前述した従来の5A置と比較して、より効果的に粉塵等
を除去することができる。After the workpiece 4 is transferred to the transport chamber I3 and the door 6b is closed, the air shower unit 8 is operated, so that an air shower is generated in the transport chamber 1 while the workpiece 4 is transported from the lower floor to the upper floor. Can be washed. In the present invention, since the air shower section 8 is provided inside the transfer chamber 1 in the vertical direction, it can be provided partially over the entire circumference inside the transfer chamber 1 as shown in the illustrated example, and can also be installed over the entire circumference of the transfer chamber 1 in the vertical direction. Since the workpiece 4 is irradiated with the workpiece 4 that is rising, the air shower is irradiated onto the workpiece 4 from various angles. Therefore, compared to the conventional 5A installation mentioned above, dust etc. are removed more effectively. can do.
このようにしてワーク4が高階に到着したらエアーシャ
ワー部8の動作を停止し、しかる後に自動ドア6aを一
時的に開として、ワーク4を搬送機3から搬送機5aに
移載し、この搬送615aにより、5階のフロア−2a
の所望場所に搬送することができる。尚、以上の動作は
マイクロコンピュータ等を用いて容易に自動制御するこ
とができる。When the work 4 reaches the upper floor in this way, the operation of the air shower section 8 is stopped, and then the automatic door 6a is temporarily opened to transfer the work 4 from the transport machine 3 to the transport machine 5a. 615a, 5th floor floor-2a
can be transported to the desired location. Note that the above operations can be easily automatically controlled using a microcomputer or the like.
また、図示例に於いては、フロア−数は2であるが、3
以上のフロア−数に対して本発明を適用し得ることは勿
論であり、こうしてワーク4を適宜のフロア−間に搬送
する際に1アーシヤワー洗浄することができる。In addition, in the illustrated example, the number of floors is 2, but 3
It goes without saying that the present invention can be applied to the above number of floors, and in this way, when the workpiece 4 is transferred between appropriate floors, it is possible to wash the workpiece 4 by one shower.
本発明は以上の通り、クリーンルームを要する工場や物
流施設等の施設に於いて、上下のフロア−間に構成した
搬送室内を経てワークを上下に搬送する際に、該搬送室
内に於いてエアーシャワー洗浄を行なう構成であるので
、■クリーン度のレベルの異なったフロア−間のバリヤ
ーを容易に構築可能である。■従来は利用していなかっ
た、フロア−間の搬送時間を利用してエアーシャワー洗
浄を行なうので、システムとしての能力を大幅に増大し
得る。■従来と比較して、より効果的な粉塵等の除去が
可能である。■建設コストの高いクリーンル・−ムのス
ペースを有効利用することができる等の格別なる効果が
ある。As described above, in facilities such as factories and logistics facilities that require a clean room, when a workpiece is transported vertically through a transport chamber constructed between upper and lower floors, an air shower is installed in the transport chamber. Since it is configured to perform cleaning, it is possible to easily construct a barrier between floors with different levels of cleanliness. (2) Since air shower cleaning is performed using the transport time between floors, which was not used in the past, the capacity of the system can be greatly increased. ■Compared to conventional methods, it is possible to remove dust more effectively. ■It has special effects such as being able to effectively utilize the space of a clean room, which is expensive to construct.
第1図は本発明の構成及び動作を模式的に示す断面図、
第2図は従来例の構成及び動作を模式的に示す断面図で
ある。
符号1・・・搬送室、2a、 2b・・・フロア−13
゜5a、5b・・・搬送機、4・・・ワーク、6a、6
b・・・自動ドア、7a、7b・・・ワーク出入口、8
・・・エアーシャワー部。
出 願 人 大成建設株式会社
エ −ザ イ 株式・・会社、
代 理 人 三 背 晃・
司1−―FIG. 1 is a sectional view schematically showing the configuration and operation of the present invention,
FIG. 2 is a sectional view schematically showing the configuration and operation of a conventional example. Code 1...Transportation room, 2a, 2b...Floor-13
゜5a, 5b...Conveyor, 4...Workpiece, 6a, 6
b... Automatic door, 7a, 7b... Work entrance/exit, 8
...Air shower section. Applicant: Taisei Corporation EISAI Co., Ltd., Agent: Akira Sanse.
Tsukasa 1--
Claims (1)
よりワークを搬送自在に構成すると共に、該搬送室は前
記各フロアーに於ける搬送機に対応して、自動ドアを備
えたワーク出入口を構成し、前記搬送室内に、上下に渡
ってエアーシャワー部を設けたことを特徴とする搬送兼
エアーシャワー装置Works are configured to be freely transported by a transport machine in a transport room constructed between the upper and lower floors of the facility, and the transport room is configured with a work entrance/exit equipped with an automatic door corresponding to the transport machine on each floor. A conveyance/air shower device characterized in that an air shower section is provided above and below within the conveyance chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61282570A JPH068696B2 (en) | 1986-11-27 | 1986-11-27 | Conveying and air-shower device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61282570A JPH068696B2 (en) | 1986-11-27 | 1986-11-27 | Conveying and air-shower device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63135739A true JPS63135739A (en) | 1988-06-08 |
JPH068696B2 JPH068696B2 (en) | 1994-02-02 |
Family
ID=17654203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61282570A Expired - Lifetime JPH068696B2 (en) | 1986-11-27 | 1986-11-27 | Conveying and air-shower device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH068696B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0546804U (en) * | 1991-12-03 | 1993-06-22 | 石川島播磨重工業株式会社 | In-building transportation equipment |
JP2006022993A (en) * | 2004-07-07 | 2006-01-26 | Sanki Eng Co Ltd | Foreign matter intrusion prevention facility |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61124486A (en) * | 1984-11-19 | 1986-06-12 | 株式会社ダイフク | Conveyor between clean room |
-
1986
- 1986-11-27 JP JP61282570A patent/JPH068696B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61124486A (en) * | 1984-11-19 | 1986-06-12 | 株式会社ダイフク | Conveyor between clean room |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0546804U (en) * | 1991-12-03 | 1993-06-22 | 石川島播磨重工業株式会社 | In-building transportation equipment |
JP2006022993A (en) * | 2004-07-07 | 2006-01-26 | Sanki Eng Co Ltd | Foreign matter intrusion prevention facility |
JP4637518B2 (en) * | 2004-07-07 | 2011-02-23 | 三機工業株式会社 | Foreign matter intrusion prevention equipment |
Also Published As
Publication number | Publication date |
---|---|
JPH068696B2 (en) | 1994-02-02 |
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