JPS63134543U - - Google Patents

Info

Publication number
JPS63134543U
JPS63134543U JP2575487U JP2575487U JPS63134543U JP S63134543 U JPS63134543 U JP S63134543U JP 2575487 U JP2575487 U JP 2575487U JP 2575487 U JP2575487 U JP 2575487U JP S63134543 U JPS63134543 U JP S63134543U
Authority
JP
Japan
Prior art keywords
wafer
transport device
sheet
frame
transports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2575487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2575487U priority Critical patent/JPS63134543U/ja
Publication of JPS63134543U publication Critical patent/JPS63134543U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP2575487U 1987-02-24 1987-02-24 Pending JPS63134543U (US06168776-20010102-C00028.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2575487U JPS63134543U (US06168776-20010102-C00028.png) 1987-02-24 1987-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2575487U JPS63134543U (US06168776-20010102-C00028.png) 1987-02-24 1987-02-24

Publications (1)

Publication Number Publication Date
JPS63134543U true JPS63134543U (US06168776-20010102-C00028.png) 1988-09-02

Family

ID=30826201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2575487U Pending JPS63134543U (US06168776-20010102-C00028.png) 1987-02-24 1987-02-24

Country Status (1)

Country Link
JP (1) JPS63134543U (US06168776-20010102-C00028.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59935A (ja) * 1982-06-25 1984-01-06 Toshiba Corp カセツトリング搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59935A (ja) * 1982-06-25 1984-01-06 Toshiba Corp カセツトリング搬送装置

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