JPS63134541U - - Google Patents
Info
- Publication number
- JPS63134541U JPS63134541U JP2678487U JP2678487U JPS63134541U JP S63134541 U JPS63134541 U JP S63134541U JP 2678487 U JP2678487 U JP 2678487U JP 2678487 U JP2678487 U JP 2678487U JP S63134541 U JPS63134541 U JP S63134541U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- semiconductor
- semiconductor elements
- measuring characteristics
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 4
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2678487U JPS63134541U (de) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2678487U JPS63134541U (de) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63134541U true JPS63134541U (de) | 1988-09-02 |
Family
ID=30828190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2678487U Pending JPS63134541U (de) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63134541U (de) |
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1987
- 1987-02-24 JP JP2678487U patent/JPS63134541U/ja active Pending