JPS63133045A - 検査用照明器具 - Google Patents

検査用照明器具

Info

Publication number
JPS63133045A
JPS63133045A JP28038086A JP28038086A JPS63133045A JP S63133045 A JPS63133045 A JP S63133045A JP 28038086 A JP28038086 A JP 28038086A JP 28038086 A JP28038086 A JP 28038086A JP S63133045 A JPS63133045 A JP S63133045A
Authority
JP
Japan
Prior art keywords
inspected
optical element
light source
light
annular light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28038086A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0579139B2 (enExample
Inventor
Tetsuya Kimoto
木本　哲也
Hidekazu Harima
播磨　秀和
Toshihiko Sakaguchi
阪口　敏彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP28038086A priority Critical patent/JPS63133045A/ja
Publication of JPS63133045A publication Critical patent/JPS63133045A/ja
Publication of JPH0579139B2 publication Critical patent/JPH0579139B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP28038086A 1986-11-25 1986-11-25 検査用照明器具 Granted JPS63133045A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28038086A JPS63133045A (ja) 1986-11-25 1986-11-25 検査用照明器具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28038086A JPS63133045A (ja) 1986-11-25 1986-11-25 検査用照明器具

Publications (2)

Publication Number Publication Date
JPS63133045A true JPS63133045A (ja) 1988-06-04
JPH0579139B2 JPH0579139B2 (enExample) 1993-11-01

Family

ID=17624211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28038086A Granted JPS63133045A (ja) 1986-11-25 1986-11-25 検査用照明器具

Country Status (1)

Country Link
JP (1) JPS63133045A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4816817B2 (ja) * 2009-12-17 2011-11-16 住友金属工業株式会社 管状品の検査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821146A (ja) * 1981-07-30 1983-02-07 Kirin Brewery Co Ltd 欠陥検査方法および装置
JPS5858020A (ja) * 1981-09-30 1983-04-06 松下電工株式会社 洗面化粧台
JPS60217325A (ja) * 1984-04-13 1985-10-30 Nippon Kogaku Kk <Nikon> エピダ−ク用対物レンズ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821146A (ja) * 1981-07-30 1983-02-07 Kirin Brewery Co Ltd 欠陥検査方法および装置
JPS5858020A (ja) * 1981-09-30 1983-04-06 松下電工株式会社 洗面化粧台
JPS60217325A (ja) * 1984-04-13 1985-10-30 Nippon Kogaku Kk <Nikon> エピダ−ク用対物レンズ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4816817B2 (ja) * 2009-12-17 2011-11-16 住友金属工業株式会社 管状品の検査装置

Also Published As

Publication number Publication date
JPH0579139B2 (enExample) 1993-11-01

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Legal Events

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EXPY Cancellation because of completion of term