JPS63132290U - - Google Patents
Info
- Publication number
- JPS63132290U JPS63132290U JP2266487U JP2266487U JPS63132290U JP S63132290 U JPS63132290 U JP S63132290U JP 2266487 U JP2266487 U JP 2266487U JP 2266487 U JP2266487 U JP 2266487U JP S63132290 U JPS63132290 U JP S63132290U
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen gas
- nitrogen
- raw material
- purity
- generation equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2266487U JPS63132290U (cs) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2266487U JPS63132290U (cs) | 1987-02-20 | 1987-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63132290U true JPS63132290U (cs) | 1988-08-30 |
Family
ID=30820261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2266487U Pending JPS63132290U (cs) | 1987-02-20 | 1987-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63132290U (cs) |
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1987
- 1987-02-20 JP JP2266487U patent/JPS63132290U/ja active Pending