JPS63131755U - - Google Patents
Info
- Publication number
- JPS63131755U JPS63131755U JP2269787U JP2269787U JPS63131755U JP S63131755 U JPS63131755 U JP S63131755U JP 2269787 U JP2269787 U JP 2269787U JP 2269787 U JP2269787 U JP 2269787U JP S63131755 U JPS63131755 U JP S63131755U
- Authority
- JP
- Japan
- Prior art keywords
- target
- thickened
- utility
- sputtering target
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013077 target material Substances 0.000 claims description 2
- 230000003628 erosive effect Effects 0.000 claims 1
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2269787U JPS63131755U (enExample) | 1987-02-20 | 1987-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2269787U JPS63131755U (enExample) | 1987-02-20 | 1987-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131755U true JPS63131755U (enExample) | 1988-08-29 |
Family
ID=30820326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2269787U Pending JPS63131755U (enExample) | 1987-02-20 | 1987-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131755U (enExample) |
-
1987
- 1987-02-20 JP JP2269787U patent/JPS63131755U/ja active Pending