JPS63131133U - - Google Patents

Info

Publication number

JPS63131133U

JPS63131133U JP2315887U JP2315887U JPS63131133U JP S63131133 U JPS63131133 U JP S63131133U JP 2315887 U JP2315887 U JP 2315887U JP 2315887 U JP2315887 U JP 2315887U JP S63131133 U JPS63131133 U JP S63131133U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

substrate

vacuum chuck

semiconductor

center

Prior art date

1987-02-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 6
• 239000000758 substrate Substances 0.000 claims 6
• 238000004519 manufacturing process Methods 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1