JPS63131121U - - Google Patents
Info
- Publication number
- JPS63131121U JPS63131121U JP2315987U JP2315987U JPS63131121U JP S63131121 U JPS63131121 U JP S63131121U JP 2315987 U JP2315987 U JP 2315987U JP 2315987 U JP2315987 U JP 2315987U JP S63131121 U JPS63131121 U JP S63131121U
- Authority
- JP
- Japan
- Prior art keywords
- target
- back plate
- ceramics
- metals
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 230000017525 heat dissipation Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000013077 target material Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2315987U JPS63131121U (es) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2315987U JPS63131121U (es) | 1987-02-18 | 1987-02-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63131121U true JPS63131121U (es) | 1988-08-26 |
Family
ID=30821202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2315987U Pending JPS63131121U (es) | 1987-02-18 | 1987-02-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63131121U (es) |
-
1987
- 1987-02-18 JP JP2315987U patent/JPS63131121U/ja active Pending