JPS63130156U - - Google Patents
Info
- Publication number
- JPS63130156U JPS63130156U JP2195587U JP2195587U JPS63130156U JP S63130156 U JPS63130156 U JP S63130156U JP 2195587 U JP2195587 U JP 2195587U JP 2195587 U JP2195587 U JP 2195587U JP S63130156 U JPS63130156 U JP S63130156U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- generation section
- plasma
- fine powder
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Nozzles (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2195587U JPS63130156U (de) | 1987-02-17 | 1987-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2195587U JPS63130156U (de) | 1987-02-17 | 1987-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63130156U true JPS63130156U (de) | 1988-08-25 |
Family
ID=30818877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2195587U Pending JPS63130156U (de) | 1987-02-17 | 1987-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63130156U (de) |
-
1987
- 1987-02-17 JP JP2195587U patent/JPS63130156U/ja active Pending
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