JPS63129808U - - Google Patents
Info
- Publication number
- JPS63129808U JPS63129808U JP2395987U JP2395987U JPS63129808U JP S63129808 U JPS63129808 U JP S63129808U JP 2395987 U JP2395987 U JP 2395987U JP 2395987 U JP2395987 U JP 2395987U JP S63129808 U JPS63129808 U JP S63129808U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light beam
- polygon mirror
- light
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395987U JPS63129808U (fr) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395987U JPS63129808U (fr) | 1987-02-19 | 1987-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63129808U true JPS63129808U (fr) | 1988-08-24 |
Family
ID=30822750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2395987U Pending JPS63129808U (fr) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63129808U (fr) |
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1987
- 1987-02-19 JP JP2395987U patent/JPS63129808U/ja active Pending