JPS63128734U - - Google Patents

Info

Publication number
JPS63128734U
JPS63128734U JP2096287U JP2096287U JPS63128734U JP S63128734 U JPS63128734 U JP S63128734U JP 2096287 U JP2096287 U JP 2096287U JP 2096287 U JP2096287 U JP 2096287U JP S63128734 U JPS63128734 U JP S63128734U
Authority
JP
Japan
Prior art keywords
holding plate
wafer
thickness
support stand
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2096287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2096287U priority Critical patent/JPS63128734U/ja
Publication of JPS63128734U publication Critical patent/JPS63128734U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lining Or Joining Of Plastics Or The Like (AREA)
JP2096287U 1987-02-16 1987-02-16 Pending JPS63128734U (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2096287U JPS63128734U (US20100012521A1-20100121-C00001.png) 1987-02-16 1987-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2096287U JPS63128734U (US20100012521A1-20100121-C00001.png) 1987-02-16 1987-02-16

Publications (1)

Publication Number Publication Date
JPS63128734U true JPS63128734U (US20100012521A1-20100121-C00001.png) 1988-08-23

Family

ID=30816962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2096287U Pending JPS63128734U (US20100012521A1-20100121-C00001.png) 1987-02-16 1987-02-16

Country Status (1)

Country Link
JP (1) JPS63128734U (US20100012521A1-20100121-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123726A (ja) * 1988-11-02 1990-05-11 Mitsubishi Electric Corp ウエハ貼付装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123726A (ja) * 1988-11-02 1990-05-11 Mitsubishi Electric Corp ウエハ貼付装置

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