JPS63128733U - - Google Patents

Info

Publication number
JPS63128733U
JPS63128733U JP2163787U JP2163787U JPS63128733U JP S63128733 U JPS63128733 U JP S63128733U JP 2163787 U JP2163787 U JP 2163787U JP 2163787 U JP2163787 U JP 2163787U JP S63128733 U JPS63128733 U JP S63128733U
Authority
JP
Japan
Prior art keywords
wafer
wafers
counting
imaging
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2163787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0631721Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987021637U priority Critical patent/JPH0631721Y2/ja
Publication of JPS63128733U publication Critical patent/JPS63128733U/ja
Application granted granted Critical
Publication of JPH0631721Y2 publication Critical patent/JPH0631721Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Controlling Sheets Or Webs (AREA)
  • Image Processing (AREA)
JP1987021637U 1987-02-16 1987-02-16 ウエハの枚数読取り装置 Expired - Lifetime JPH0631721Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987021637U JPH0631721Y2 (ja) 1987-02-16 1987-02-16 ウエハの枚数読取り装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987021637U JPH0631721Y2 (ja) 1987-02-16 1987-02-16 ウエハの枚数読取り装置

Publications (2)

Publication Number Publication Date
JPS63128733U true JPS63128733U (cs) 1988-08-23
JPH0631721Y2 JPH0631721Y2 (ja) 1994-08-22

Family

ID=30818259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987021637U Expired - Lifetime JPH0631721Y2 (ja) 1987-02-16 1987-02-16 ウエハの枚数読取り装置

Country Status (1)

Country Link
JP (1) JPH0631721Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009032829A (ja) * 2007-07-25 2009-02-12 Dainippon Screen Mfg Co Ltd 基板検出装置および基板処理装置
JP2009270984A (ja) * 2008-05-09 2009-11-19 Fujitsu Ltd 位置検出装置、位置検出プログラム、位置検出方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7119970B2 (ja) * 2018-12-12 2022-08-17 トヨタ自動車株式会社 位置検出方法及び位置検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61286708A (ja) * 1985-06-12 1986-12-17 Hokuyo Automatic Co 板材の積層枚数測定器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61286708A (ja) * 1985-06-12 1986-12-17 Hokuyo Automatic Co 板材の積層枚数測定器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009032829A (ja) * 2007-07-25 2009-02-12 Dainippon Screen Mfg Co Ltd 基板検出装置および基板処理装置
JP2009270984A (ja) * 2008-05-09 2009-11-19 Fujitsu Ltd 位置検出装置、位置検出プログラム、位置検出方法

Also Published As

Publication number Publication date
JPH0631721Y2 (ja) 1994-08-22

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