JPS63128728U - - Google Patents
Info
- Publication number
- JPS63128728U JPS63128728U JP1871987U JP1871987U JPS63128728U JP S63128728 U JPS63128728 U JP S63128728U JP 1871987 U JP1871987 U JP 1871987U JP 1871987 U JP1871987 U JP 1871987U JP S63128728 U JPS63128728 U JP S63128728U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample stand
- stand
- temperature
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Control Of Temperature (AREA)
Description
第１図は、本考案の一実施例の縦断面図、第２
図ａ，ｂは、第１図の試料台の解体斜視図、第３
図ａ，ｂは、本考案の他の実施例の説明図である
。
１……試料、２……試料台、３……ヒータ。
Fig. 1 is a longitudinal sectional view of one embodiment of the present invention;
Figures a and b are disassembled perspective views of the sample stage in Figure 1 and Figure 3.
Figures a and b are explanatory diagrams of other embodiments of the present invention. 1...sample, 2...sample stand, 3...heater.
Claims (1)
可能な試料台において、該試料台にヒータを埋め
込み、かつ、前記試料台の材質をセラミツクスに
したことを特徴とする試料温度制御装置。 A sample temperature control device comprising: a removable sample stand between a refrigerant chamber in a vacuum container and a temperature-controlled sample; a heater is embedded in the sample stand; and the material of the sample stand is ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1871987U JPS63128728U (en) | 1987-02-13 | 1987-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1871987U JPS63128728U (en) | 1987-02-13 | 1987-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63128728U true JPS63128728U (en) | 1988-08-23 |
Family
ID=30812648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1871987U Pending JPS63128728U (en) | 1987-02-13 | 1987-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63128728U (en) |
-
1987
- 1987-02-13 JP JP1871987U patent/JPS63128728U/ja active Pending