JPH0345955U - - Google Patents
Info
- Publication number
- JPH0345955U JPH0345955U JP10597289U JP10597289U JPH0345955U JP H0345955 U JPH0345955 U JP H0345955U JP 10597289 U JP10597289 U JP 10597289U JP 10597289 U JP10597289 U JP 10597289U JP H0345955 U JPH0345955 U JP H0345955U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- crucible
- crucibles
- heating
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は一実施例を示す断面図、第２図は同実
施例におけるるつぼを示す斜視図、第３図は一実
施例と従来の加熱素子の特性を示す図、第４図、
第５図及び第６図はそれぞれ従来の加熱素子を示
す斜視図、第７図はさらに他の従来の加熱素子を
示す断面図である。
２０，２２……るつぼ、２４……加熱用導線、
２６……焼結用充填剤。
FIG. 1 is a sectional view showing one embodiment, FIG. 2 is a perspective view showing a crucible in the same embodiment, FIG. 3 is a diagram showing characteristics of one embodiment and a conventional heating element, FIG.
5 and 6 are perspective views showing conventional heating elements, respectively, and FIG. 7 is a sectional view showing still another conventional heating element. 20, 22... Crucible, 24... Heating conductor,
26... Filler for sintering.
Claims (1)
熱素子であつて、セラミツク製るつぼの内側にそ
れより小さいセラミツク製るつぼが入つた二重る
つぼの間に加熱用導線を有し、両るつぼと加熱用
導線は両るつぼの隙間の入口部分でセラミツク部
材により一体化されている加熱素子。 A heating element used to heat a deposition source in a vacuum evaporation apparatus, which has a heating conductor between a double crucible in which a smaller ceramic crucible is placed inside a ceramic crucible, and has a heating conductor between both crucibles and the heating element. The heating element is integrated with a ceramic material at the entrance of the gap between both crucibles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10597289U JPH0345955U (en) | 1989-09-08 | 1989-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10597289U JPH0345955U (en) | 1989-09-08 | 1989-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0345955U true JPH0345955U (en) | 1991-04-26 |
Family
ID=31654722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10597289U Pending JPH0345955U (en) | 1989-09-08 | 1989-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345955U (en) |
-
1989
- 1989-09-08 JP JP10597289U patent/JPH0345955U/ja active Pending