JPS63128545A - Quadrupole type mass spectrometer - Google Patents
Quadrupole type mass spectrometerInfo
- Publication number
- JPS63128545A JPS63128545A JP61274114A JP27411486A JPS63128545A JP S63128545 A JPS63128545 A JP S63128545A JP 61274114 A JP61274114 A JP 61274114A JP 27411486 A JP27411486 A JP 27411486A JP S63128545 A JPS63128545 A JP S63128545A
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- section
- output transformer
- analysis tube
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004458 analytical method Methods 0.000 claims abstract description 30
- 230000005540 biological transmission Effects 0.000 claims abstract description 12
- 230000003321 amplification Effects 0.000 claims description 21
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 21
- 230000010355 oscillation Effects 0.000 claims description 15
- 150000002500 ions Chemical class 0.000 description 10
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 241000252233 Cyprinus carpio Species 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は化学物質の組成や雰囲気ガス等のガスの分析に
用いられる四重型質量分析計に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a quadruple mass spectrometer used for analyzing the composition of chemical substances and gases such as atmospheric gases.
（従来の技術）
四重型質量分析計は、イオンを生成するイオンソース部
、四重極電極部及びイオン検出部から構成される分析管
を備えている。(Prior Art) A quadruple mass spectrometer includes an analysis tube that includes an ion source section that generates ions, a quadrupole electrode section, and an ion detection section.
該四重極電極は、互いに、対称の位置に配置された４本
のロッドで構成され、２対のロッドには、それぞれ高周
波電圧と直流電圧を重畳した電圧すなわちＵ＋Ｖ ｃｏ
ｓｗｔと−ｕ−ｖ■盲ｔなる電圧が印加されており、イ
オンソース部で生成され該電極中に入射したイオンのう
ち、該電極に印加された電圧の大きさに応じた電荷対質
ω比のみが四重極電極を通過し、イオンコレクタ又は２
次電子増培管から成るイオン検出器で検出される。この
イオン検出器の出力は直流増幅器で増幅され、オシロス
コープ又はペンレコーダに加えられ、質量スペクトルが
得られる。The quadrupole electrode is composed of four rods arranged symmetrically to each other, and each of the two pairs of rods receives a voltage that is a superimposition of a high frequency voltage and a DC voltage, that is, U+V co
A voltage of swt and -u-v■blind t is applied, and among the ions generated in the ion source and incident on the electrode, the charge-to-mass ω ratio is determined according to the magnitude of the voltage applied to the electrode. Only the quadrupole electrode passes through the ion collector or two
It is detected by an ion detector consisting of a secondary electron multiplier. The output of this ion detector is amplified with a DC amplifier and applied to an oscilloscope or pen recorder to obtain a mass spectrum.
上記四重電極の２対のロッドに高周波電圧及び直流電圧
を供給する高周波出力回路は、高周波発振部、高周波増
幅部及び高周波出力トランス部から成っており、従来、
第３図示のように、高周波発振部ａ、高周波増幅部す及
び高周波出力トランス部Ｃをボックスｄに収納して分析
管ｅの近傍に配画し、長さ６０１１１１位の同軸テーブ
ルｈによって分析管ｅの四重極電極へ直流電圧及び高周
波電圧を供給するように方式のものが多い。The high-frequency output circuit that supplies high-frequency voltage and DC voltage to the two pairs of rods of the quadruple electrode is composed of a high-frequency oscillation section, a high-frequency amplification section, and a high-frequency output transformer section.
As shown in Figure 3, a high-frequency oscillation section a, a high-frequency amplification section, and a high-frequency output transformer section C are housed in a box d and arranged near the analysis tube e, and the analysis tube is connected to a coaxial table h having a length of about 601111. There are many systems that supply DC voltage and high frequency voltage to the quadrupole electrodes of e.
この方式の伯に、第４図示のように、同軸ケーブルを用
いず、前記ボックスｄを分析管ｅに直結する方式も知ら
れている。An alternative to this method is also known, as shown in Figure 4, in which the box d is directly connected to the analysis tube e without using a coaxial cable.
また、第５図示のように、分析管ｅに高周波出力トラン
ス部Ｃを直結し、高周波発振部ａ及び高周波増幅部すを
分析管ｅから分離配置し、該高周波増幅部すと高周波出
力トランス部Ｃを例えば３ＴｒＬ位の同軸ケーブルｈで
接続したものも考えられる。Further, as shown in Figure 5, a high frequency output transformer section C is directly connected to the analysis tube e, a high frequency oscillation section a and a high frequency amplification section are arranged separately from the analysis tube e, and the high frequency amplification section and the high frequency output transformer section are arranged separately. It is also possible to connect C with a coaxial cable h of about 3TrL, for example.
尚、上記各図において、９はコントロール部である。Note that in each of the above figures, 9 is a control section.
（発明が解決しようとする問題点）
第３図示の方式において、高周波出力トランス部Ｃと分
析管Ｃを接続する同軸ケーブルｈの訓電要領は、高周波
出力トランス部Ｃ（タンク回路）の共振周波数ｆを決め
るｆ ＝ １／（２πＬＣ）なる式中のＣに含まれるた
め、同軸テーブルｈの長さを伸ばすと、共振周波数ｆは
２〜３８Ｈ２の間の適当な値で固定されているため、高
周波出力トランス部ＣのインダクタンスＬを小さくしな
ければならない。該りを小さくすると高周波電圧が下が
り、そのため分析できる質量範囲が狭くなる。したがっ
て従来の第３図示の方式では、同軸ケーブルｈの長さを
長くできず、１ｍ位に制限されるので、測定のために分
析管ｅを取付ける真空容器にボックスｄを置くための台
を設けなければならず、分析管の取付場所に制限を与え
ていた。(Problem to be Solved by the Invention) In the method shown in Figure 3, the instruction point for the coaxial cable h connecting the high frequency output transformer section C and the analysis tube C is the resonant frequency of the high frequency output transformer section C (tank circuit). Since it is included in C in the formula f = 1/(2πLC) that determines f, if the length of the coaxial table h is increased, the resonant frequency f is fixed at an appropriate value between 2 and 38H2, so The inductance L of the high frequency output transformer section C must be made small. Reducing the spread will lower the high frequency voltage, which will narrow the mass range that can be analyzed. Therefore, in the conventional method shown in Figure 3, the length of the coaxial cable h cannot be increased and is limited to about 1 m, so a stand is provided to place the box d in the vacuum container in which the analysis tube e is attached for measurement. This placed restrictions on where the analysis tube could be installed.
従来の第４図示の方式でも同じで、分析管の回りにボッ
クスを配置するためのスペースが必要で、近くに配管な
どがあるとそれ等が邪魔になり希望する場所に取付けら
れないという不便があった。また第５図示の方式では、
小さな高周波出力トランス部Ｃを分析管ｅに直結するの
で、分析管を測定の対象となる真空装置に付は易くなる
が、高周波電力損失が比較的大きく、また、イオンソー
ス等に接続するケーブルに高周波ノイズを誘導しやすい
不都合があった。The same is true for the conventional method shown in Figure 4, which requires space to place the box around the analysis tube, and if there are pipes nearby, they will get in the way and cause the inconvenience of not being able to install the box in the desired location. there were. Furthermore, in the method shown in Figure 5,
Since the small high-frequency output transformer C is directly connected to the analysis tube e, it is easier to connect the analysis tube to the vacuum equipment that is the object of measurement, but the high-frequency power loss is relatively large, and the cable connecting to the ion source etc. This has the disadvantage of easily inducing high-frequency noise.
本発明は、従来の上述のような不都合を解消する四重極
型質吊分析計を提供することをその目的とするものであ
る。An object of the present invention is to provide a quadrupole quality suspension analyzer that eliminates the above-mentioned conventional problems.
（問題点を解決するための手段）
本発明は、上述の目的を達成するために、高周波発振部
、高周波増幅部及び高周波出力トランス部から成る高周
波出力回路を備え、該高周波出力トランス部の出力が四
重極電極に印加される四重型質量分析計において、高周
波発振部と高周波増幅部及び該増幅部に接続された高周
波出力トランス部とを分離配置すると共に高周波伝送ケ
ーブルで互いに接続し、該高周波増幅部及び高周波出力
トランスを分析管に直結したことを特徴とする。(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention includes a high-frequency output circuit consisting of a high-frequency oscillation section, a high-frequency amplification section, and a high-frequency output transformer section, and the output of the high-frequency output transformer section. In a quadruple mass spectrometer in which a high-frequency oscillator is applied to a quadrupole electrode, a high-frequency oscillation section, a high-frequency amplification section, and a high-frequency output transformer section connected to the amplification section are arranged separately and connected to each other with a high-frequency transmission cable. It is characterized in that the high frequency amplification section and high frequency output transformer are directly connected to the analysis tube.
（作 用）
高周波発振部で発生した８周波電圧は、低電圧のまま高
周波電装ケーブルにより分離配置された高周波増幅部へ
送られ、該高周波増幅部で増幅される。増幅された高周
波電圧に高周波出力トランス部で昇圧されると共に直流
電圧に重畳されて分析管の四重極電極に供給される。(Function) The 8-frequency voltage generated in the high-frequency oscillation section is sent as a low voltage to the separately arranged high-frequency amplification section via a high-frequency electrical equipment cable, and is amplified in the high-frequency amplification section. The amplified high-frequency voltage is boosted by the high-frequency output transformer, superimposed on the DC voltage, and supplied to the quadrupole electrodes of the analysis tube.
（実施例） 本発明の実施例を添付図面につき説明する。(Example) Embodiments of the invention will be described with reference to the accompanying drawings.
第１図において（１）は高周波発振部、（２）は高周波
増幅部、（３）は高周波出力トランス部で、これ等高周
波発振部（１）、高周波増幅部（２）及び高周波出力ト
ランス部（３）は、分析管（４）の四重極電極に高周波
電圧と直流電圧を供給する高周波出力回路を構成する。In Figure 1, (1) is a high-frequency oscillation section, (2) is a high-frequency amplification section, and (3) is a high-frequency output transformer section. (3) constitutes a high frequency output circuit that supplies high frequency voltage and DC voltage to the quadrupole electrode of the analysis tube (4).
高周波増幅部（２）及び高周波出力トランス部（３）は
、ケース（５）に収容して分析管（４）に取付けられ、
該高周波増幅部（ｈは分離して配置した高周波発振部（
１）と例えば５０〜７５Ωのインピーダンスを有し、例
えば３ｍの長さの高周波伝送ケーブル（６）により接続
される。The high frequency amplification section (2) and the high frequency output transformer section (3) are housed in a case (5) and attached to the analysis tube (4),
The high frequency amplification section (h is a separately arranged high frequency oscillation section (
1) and is connected by a high frequency transmission cable (6) having an impedance of, for example, 50 to 75 Ω and having a length of, for example, 3 m.
高周波発振部（１）は水晶発掘式のものや、自動発振（
ＬＣ発振）式のものがよく使われており、１０ａＲＸ１
０ＣｒＲ位の基板上に構成される。The high frequency oscillator (1) may be of the excavated crystal type or automatic oscillation (
LC oscillation) type is often used, and 10aRX1
It is constructed on a substrate of 0CrR.
高周波増幅部（２）は、第２図示のように例えばトラン
ジスタ（７＞から成り、そのエミッタ及びベースは高周
波伝送ケーブル（６）に接続されている。The high frequency amplifying section (2) is made up of, for example, a transistor (7) as shown in the second diagram, and its emitter and base are connected to the high frequency transmission cable (6).
高周波出カドランス部（３）は、高周波出カドランス（
８）を含むタンク回路（９）から成っている。これを更
に詳細に説明すると、高周波トランス（８）の１次コイ
ル（１（ｈ）は直流電源及び上記トランジスタ（７）の
コレクタに接続され、２次コイル（１０２）及び２次コ
イル（１０ａ）の各１端はそれぞれ＋Ｕ電圧直流電源及
び−〇電圧直流電源に接続され、その他端は分析管の各
１対の四重極電極ａ１１１に接続されている。（１２＋
） （１２２）はタンク回路（９）を構成する同調用コ
ンデンサで、該コンデンサ（１２１） （１２２）の調
整により高周波出カドランス（８）の１次コイル（１０
ｄに入力する高周波の周波数に２次コイル（１０２）
（１Ｇ ３）を含む２次回路が共娠するように調整する
もので、その調整の結果、四重極電極ａｖ ａｖへ印加
される高周波電圧が分割用コンデンサ（１３ａ３で分割
され、この電圧はダイオード（ｌ＠ａ＠で整流され、接
続線ａ９を介して高周波発振部（１）にフィードバック
されて高周波電圧の安定化を行っている。この電圧は質
昂数の表示にも用いられる。ａｅはアース線である。The high frequency output portion (3) is a high frequency output portion (3).
It consists of a tank circuit (9) including: To explain this in more detail, the primary coil (1 (h) of the high frequency transformer (8) is connected to the DC power supply and the collector of the transistor (7), and the secondary coil (102) and the secondary coil (10a) One end of each is connected to a +U voltage DC power supply and a -○ voltage DC power supply, respectively, and the other end is connected to each pair of quadrupole electrodes a111 of the analysis tube. (12+
) (122) is a tuning capacitor that constitutes the tank circuit (9), and by adjusting the capacitors (121) and (122), the primary coil (10
A secondary coil (102) is connected to the high frequency input to d.
(1G 3) is adjusted so that the secondary circuit including It is rectified by the diode (l@a@) and is fed back to the high frequency oscillation unit (1) via the connection line a9 to stabilize the high frequency voltage. This voltage is also used to display the quality number. ae is the ground wire.
上記高周波出カドランス（８）の１次コイル（？Ｏｄ及
び２次コイル（１０２） （１０３）はそれぞれトロイ
ダルコア（１７＋に巻回され、１次コイル（１（ｈ）と
２次コイル（１０２） （１０３）の巻数比は２：５０
程度で、２次コイ）Ｌｔ （１０２） （１０３） ニ
ハ最高１０００Ｖ ｐ−ｐ高周波電圧が取り出せるよう
になっている。The primary coil (?Od) and secondary coils (102) (103) of the high frequency output transformer (8) are each wound around a toroidal core (17+), and the primary coil (1 (h) and secondary coil (102) The turns ratio of (103) is 2:50
It is possible to extract a maximum high frequency voltage of 1000V p-p at a secondary carp) Lt (102) (103).
以上の高周波増幅部（２）及び高周波出カドランス部（
３）を構成する部品は例えばφ５０ｘ １１００（）位
の筒状の小型のケース（５）に収容することができる。The above high frequency amplification section (2) and high frequency output section (
The parts constituting 3) can be housed in a small cylindrical case (5) with a diameter of about 50 x 1100 mm, for example.
このケース（５）は分析管（４）に直接取付けられる。This case (5) is attached directly to the analysis tube (4).
第１図において、（’１ｇは電源を有し制御信号を発生
するコントロール部で、該コントロール部■はイオンソ
ース部へ行く線など多数の１束のケーブルによって分析
管（４）に接続されており、上記高周波伝送ケーブル（
６）もこの１束のケーブル（図示しない）と−緒になっ
ている。In Fig. 1, ('1g is a control section that has a power source and generates control signals, and this control section (2) is connected to the analysis tube (4) by a bundle of cables such as wires going to the ion source section. The above high frequency transmission cable (
6) is also connected to this bundle of cables (not shown).
以上の実施例の構成によれば、分析管（４）から分離配
置された高周波発振部（１）で発生した低圧の高周波が
高周波伝送ケーブル（６）により伝送され、分析管（４
）の近くに配置されたトランジスタ（７）で増幅され、
その高周波電圧は＾周波出力トランス部（３）で直流電
圧に重畳されて四重極電極（１つに印加される。According to the configuration of the above embodiment, the low voltage high frequency generated by the high frequency oscillator (1) separated from the analysis tube (4) is transmitted by the high frequency transmission cable (6), and
) is amplified by a transistor (7) placed near the
The high frequency voltage is superimposed on the DC voltage in the frequency output transformer section (3) and applied to one quadrupole electrode.
尚、上記高周波主カドランス（８）はトロイダルコアを
用いたが空芯でもよい。Note that although a toroidal core is used for the high frequency main quadrance (8), an air core may be used.
（発明の効果）
以上説明したように、本発明によれば、高周波発振部を
分析管から分離配置し、該分析管に高周波増幅部を及び
高周波出カドランス部を直結し、高周波発振部と高周波
増幅部とを高周波伝送ケーブルで接続したので、高周波
伝送ケーブルにおける高周波電力損失は第５図示の方式
に比して少なくてすむ。また高周波発振部の消費電力は
高周波伝送ケーブルが３ｍのとき約１７２になり、ケー
ブル長が長くなればその差がもっと大きくなる。(Effects of the Invention) As explained above, according to the present invention, the high-frequency oscillation section is arranged separately from the analysis tube, the high-frequency amplification section and the high-frequency output cadence section are directly connected to the analysis tube, and the high-frequency oscillation section and the high-frequency Since the amplification section is connected with the high frequency transmission cable, the high frequency power loss in the high frequency transmission cable can be reduced compared to the system shown in FIG. Furthermore, the power consumption of the high frequency oscillator is approximately 172 when the high frequency transmission cable is 3 m long, and the difference becomes larger as the cable length becomes longer.
更に第３図の方式や第４図の方式のように分析管の近く
に高周波出力回路を置くための台を設ける必要がなく、
分析管の回りに高周波出力回路部品を置く大きなスペー
スも要しない効果があり、また高周波伝送ケーブルの高
周波が他のケーブルに誘導することによって生ずる高周
波ノイズの影響も少ない効果がある。Furthermore, there is no need to provide a stand for placing the high-frequency output circuit near the analysis tube, unlike in the methods shown in Figures 3 and 4.
This has the effect of not requiring a large space for placing high-frequency output circuit parts around the analysis tube, and also has the effect of reducing the effects of high-frequency noise caused by the high-frequency waves of the high-frequency transmission cable being guided to other cables.
第１図は本発明のブロック図、第２図はその高周波増幅
部及び高周波出カドランス部の回路図、第３図及び第４
図及び第５図はいずれも従来例のブロック図である。
（１）・・・高周波発振部 （り・・・高周波増幅部
（３）・・・高周波出カドランス部
（４）・・・分析管 （６）・・・高周波伝送
ケーブル手続補正口Figure 1 is a block diagram of the present invention, Figure 2 is a circuit diagram of its high frequency amplification section and high frequency output unit, and Figures 3 and 4.
Both FIG. 5 and FIG. 5 are block diagrams of conventional examples. (1)...High frequency oscillation section (Ri...High frequency amplification section (3)...High frequency output section (4)...Analysis tube (6)...High frequency transmission cable procedure correction port
Claims (1)
から成る高周波出力回路を備え、該高周波出力トランス
部の出力が四重極電極に印加される四重型質量分析計に
おいて、高周波発振部と高周波増幅部及び該増幅部に接
続された高周波出力トランス部とを分離配置すると共に
高周波伝送ケーブルで互いに接続し、該高周波増幅部及
び高周波出力トランスを分析管に直結したことを特徴と
する四重極型質量分析計。A quadruple mass spectrometer is equipped with a high-frequency output circuit consisting of a high-frequency oscillation section, a high-frequency amplification section, and a high-frequency output transformer section, and the output of the high-frequency output transformer section is applied to a quadrupole electrode. and a high-frequency output transformer connected to the amplification section are arranged separately and connected to each other by a high-frequency transmission cable, and the high-frequency amplification section and the high-frequency output transformer are directly connected to an analysis tube. Analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61274114A JPH0750597B2 (en) | 1986-11-19 | 1986-11-19 | Quadrupole mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61274114A JPH0750597B2 (en) | 1986-11-19 | 1986-11-19 | Quadrupole mass spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63128545A true JPS63128545A (en) | 1988-06-01 |
| JPH0750597B2 JPH0750597B2 (en) | 1995-05-31 |
Family
ID=17537206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61274114A Expired - Lifetime JPH0750597B2 (en) | 1986-11-19 | 1986-11-19 | Quadrupole mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0750597B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10600628B1 (en) | 2018-11-15 | 2020-03-24 | Mks Instruments, Inc. | Resonant transmission line to deliver precision RF voltage |
| GB2587442A (en) * | 2019-03-04 | 2021-03-31 | Micromass Ltd | Transformer for applying an AC voltage to electrodes |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59128748A (en) * | 1983-01-13 | 1984-07-24 | Mitsubishi Electric Corp | Accelerating voltage power supply for electron beam welding |
| JPS61140049A (en) * | 1984-12-12 | 1986-06-27 | Fumio Watanabe | Quadrupole type mass spectrometer |
-
1986
- 1986-11-19 JP JP61274114A patent/JPH0750597B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59128748A (en) * | 1983-01-13 | 1984-07-24 | Mitsubishi Electric Corp | Accelerating voltage power supply for electron beam welding |
| JPS61140049A (en) * | 1984-12-12 | 1986-06-27 | Fumio Watanabe | Quadrupole type mass spectrometer |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10600628B1 (en) | 2018-11-15 | 2020-03-24 | Mks Instruments, Inc. | Resonant transmission line to deliver precision RF voltage |
| WO2020102029A1 (en) * | 2018-11-15 | 2020-05-22 | Mks Instruments, Inc. | Resonant transmission line to deliver precision rf voltage |
| GB2587442A (en) * | 2019-03-04 | 2021-03-31 | Micromass Ltd | Transformer for applying an AC voltage to electrodes |
| GB2587442B (en) * | 2019-03-04 | 2022-02-16 | Micromass Ltd | Transformer for applying an AC voltage to electrodes |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0750597B2 (en) | 1995-05-31 |
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