JPS63128411U - - Google Patents
Info
- Publication number
- JPS63128411U JPS63128411U JP1871687U JP1871687U JPS63128411U JP S63128411 U JPS63128411 U JP S63128411U JP 1871687 U JP1871687 U JP 1871687U JP 1871687 U JP1871687 U JP 1871687U JP S63128411 U JPS63128411 U JP S63128411U
- Authority
- JP
- Japan
- Prior art keywords
- measuring device
- length measuring
- correction
- measurement
- measurement beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1871687U JPS63128411U (nl) | 1987-02-13 | 1987-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1871687U JPS63128411U (nl) | 1987-02-13 | 1987-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63128411U true JPS63128411U (nl) | 1988-08-23 |
Family
ID=30812642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1871687U Pending JPS63128411U (nl) | 1987-02-13 | 1987-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63128411U (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006133035A (ja) * | 2004-11-04 | 2006-05-25 | Nec Electronics Corp | レーザ干渉測定装置およびレーザ干渉測定方法 |
| JP2009236554A (ja) * | 2008-03-26 | 2009-10-15 | Mitsutoyo Corp | ２波長レーザ干渉計評価校正方法、評価校正装置および評価校正システム |
-
1987
- 1987-02-13 JP JP1871687U patent/JPS63128411U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006133035A (ja) * | 2004-11-04 | 2006-05-25 | Nec Electronics Corp | レーザ干渉測定装置およびレーザ干渉測定方法 |
| JP2009236554A (ja) * | 2008-03-26 | 2009-10-15 | Mitsutoyo Corp | ２波長レーザ干渉計評価校正方法、評価校正装置および評価校正システム |