JPS63127825U - - Google Patents

Info

Publication number
JPS63127825U
JPS63127825U JP2028487U JP2028487U JPS63127825U JP S63127825 U JPS63127825 U JP S63127825U JP 2028487 U JP2028487 U JP 2028487U JP 2028487 U JP2028487 U JP 2028487U JP S63127825 U JPS63127825 U JP S63127825U
Authority
JP
Japan
Prior art keywords
sample
grinding
ground
analytical
rotates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2028487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525773Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987020284U priority Critical patent/JPH0525773Y2/ja
Publication of JPS63127825U publication Critical patent/JPS63127825U/ja
Application granted granted Critical
Publication of JPH0525773Y2 publication Critical patent/JPH0525773Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sawing (AREA)
JP1987020284U 1987-02-14 1987-02-14 Expired - Lifetime JPH0525773Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987020284U JPH0525773Y2 (en, 2012) 1987-02-14 1987-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987020284U JPH0525773Y2 (en, 2012) 1987-02-14 1987-02-14

Publications (2)

Publication Number Publication Date
JPS63127825U true JPS63127825U (en, 2012) 1988-08-22
JPH0525773Y2 JPH0525773Y2 (en, 2012) 1993-06-29

Family

ID=30815656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987020284U Expired - Lifetime JPH0525773Y2 (en, 2012) 1987-02-14 1987-02-14

Country Status (1)

Country Link
JP (1) JPH0525773Y2 (en, 2012)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178659A (en) * 1981-04-22 1982-11-02 Hitachi Seiko Ltd Grinding method of wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178659A (en) * 1981-04-22 1982-11-02 Hitachi Seiko Ltd Grinding method of wafer

Also Published As

Publication number Publication date
JPH0525773Y2 (en, 2012) 1993-06-29

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