JPS63127825U - - Google Patents

Info

Publication number
JPS63127825U
JPS63127825U JP2028487U JP2028487U JPS63127825U JP S63127825 U JPS63127825 U JP S63127825U JP 2028487 U JP2028487 U JP 2028487U JP 2028487 U JP2028487 U JP 2028487U JP S63127825 U JPS63127825 U JP S63127825U
Authority
JP
Japan
Prior art keywords
sample
grinding
ground
analytical
rotates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2028487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0525773Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987020284U priority Critical patent/JPH0525773Y2/ja
Publication of JPS63127825U publication Critical patent/JPS63127825U/ja
Application granted granted Critical
Publication of JPH0525773Y2 publication Critical patent/JPH0525773Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sawing (AREA)
JP1987020284U 1987-02-14 1987-02-14 Expired - Lifetime JPH0525773Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987020284U JPH0525773Y2 (enrdf_load_stackoverflow) 1987-02-14 1987-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987020284U JPH0525773Y2 (enrdf_load_stackoverflow) 1987-02-14 1987-02-14

Publications (2)

Publication Number Publication Date
JPS63127825U true JPS63127825U (enrdf_load_stackoverflow) 1988-08-22
JPH0525773Y2 JPH0525773Y2 (enrdf_load_stackoverflow) 1993-06-29

Family

ID=30815656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987020284U Expired - Lifetime JPH0525773Y2 (enrdf_load_stackoverflow) 1987-02-14 1987-02-14

Country Status (1)

Country Link
JP (1) JPH0525773Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178659A (en) * 1981-04-22 1982-11-02 Hitachi Seiko Ltd Grinding method of wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57178659A (en) * 1981-04-22 1982-11-02 Hitachi Seiko Ltd Grinding method of wafer

Also Published As

Publication number Publication date
JPH0525773Y2 (enrdf_load_stackoverflow) 1993-06-29

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