JPS63127418A - Magnetic recording medium - Google Patents

Magnetic recording medium

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Publication number
JPS63127418A
JPS63127418A JP27253486A JP27253486A JPS63127418A JP S63127418 A JPS63127418 A JP S63127418A JP 27253486 A JP27253486 A JP 27253486A JP 27253486 A JP27253486 A JP 27253486A JP S63127418 A JPS63127418 A JP S63127418A
Authority
JP
Japan
Prior art keywords
magnetic recording
film
recording medium
vapor deposition
fine particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27253486A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP27253486A priority Critical patent/JPS63127418A/en
Publication of JPS63127418A publication Critical patent/JPS63127418A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a good S/N, error rate, etc., even in short wavelength recording by executing diagonal vapor deposition to provide underlying layers from both of the longitudinal direction of a high-polymer film on a fine particle coated layer on said film and depositing a thin ferromagnetic metallic film thereon. CONSTITUTION:The fine particle coated layer 8 consisting of fine particles 9 of carbon, etc., and a resin layer 10 of polyester, etc., is formed on the high- polymer film 7 consisting of PE terephthalate, etc. The underlying layers 11, 12 formed by the diagonal vapor deposition from both of the longitudinal direction are provided thereon. The thin ferromagnetic metallic film 13 consisting of Co-Ni, etc., and a protective layer 14 are laminated on said layers. As a result, the generation of voids by the shadowing which arises at the time of the diagonal vapor deposition of the ferromagnetic metal by the shape of the fine particles is hardly discovered and since the uniformity is thereby magnetically improved, the good characteristics such as S/N, error rate and peak shift are obtd. even in short wavelength recording and reproduction.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は高密度磁気記録に適する強磁性金属薄膜を磁気
記録層とする磁気記録媒体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic recording medium whose magnetic recording layer is a ferromagnetic metal thin film suitable for high-density magnetic recording.

従来の技術 近年、磁気記録の高密度化の進歩は目覚しく。Conventional technology In recent years, there has been remarkable progress in increasing the density of magnetic recording.

バインダ等の非磁性部分を磁気記録層内にもたない、強
磁性金属薄膜型の磁気記録媒体の実用化が強く望まれて
いる。〔例えば外国論文誌: IEEETRANSAC
TIONS  ON  MACiNETIC8Vol 
−MAG−21、No−3、P、P、 1217〜12
20(1985)参照〕 かかる構成の磁気記録媒体の課題は、信号出力対雑音比
(以下、S/Nと記す)と耐久性をバランスよく改良す
ることである。第2図は従来の磁気記録媒体の拡大断面
図である。第2図で、1はポリエチレンテレフタレート
フィルム等の高分子フィルム、2は微粒子塗布層で、5
iQ2やカーボン等の微粒子3をポリエステル樹脂4で
固定したものである。6は斜め蒸着膜、垂直磁化膜など
の強磁性金属薄膜、6はステアリン酸、バーフロロオV
ol 、MAG  21 、A 5 、 P 、P 、
 1624〜1526(1986)、米国特許第4,5
64,549号明細書。
There is a strong desire to put into practical use a ferromagnetic metal thin film type magnetic recording medium that does not have a non-magnetic part such as a binder in the magnetic recording layer. [For example, foreign journals: IEEEETRANSAC
TIONS ON MACiNETIC8Vol
-MAG-21, No-3, P, P, 1217-12
20 (1985)] The problem with magnetic recording media having such a structure is to improve the signal output-to-noise ratio (hereinafter referred to as S/N) and durability in a well-balanced manner. FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. In Figure 2, 1 is a polymer film such as polyethylene terephthalate film, 2 is a fine particle coating layer, and 5 is a polymer film such as a polyethylene terephthalate film.
Fine particles 3 such as iQ2 and carbon are fixed with polyester resin 4. 6 is a ferromagnetic metal thin film such as an obliquely deposited film or a perpendicular magnetization film, 6 is stearic acid, barfluoro V
ol, MAG 21, A 5, P, P,
1624-1526 (1986), U.S. Patent No. 4,5
No. 64,549.

特開昭65−113898号公報、特開昭59−924
28号公報等参照〕 かかる構成の磁気記録媒体は、走行性、スチル特性等が
改良され、実用に近い系といえる。
JP-A-65-113898, JP-A-59-924
See Publication No. 28, etc.] A magnetic recording medium having such a structure has improved running properties, still characteristics, etc., and can be said to be a system close to practical use.

発明が解決しようとする問題点 しかしながら上記した構成では、記録波長が0.8μm
近くまで短かくなると変調雑音が太きくなったり、ディ
ジタル記録でのエラー率が不十分である点やピークシフ
トが大きくなるなど改善が望まれている。本発明は上記
した事情に鑑みなされたもので、S/N、エラー率、ピ
ークシフトが改善された耐久性のある磁気記録媒体を提
供するものである。
Problems to be Solved by the Invention However, in the above configuration, the recording wavelength is 0.8 μm.
Improvements are desired, such as the modulation noise becoming thicker, the error rate in digital recording being insufficient, and the peak shift becoming large as the length becomes too short. The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a durable magnetic recording medium with improved S/N, error rate, and peak shift.

問題点を解決するための手段 上記問題点を解決するために本発明の磁気記録媒体は、
高分子フィルム上に微粒子塗布層を配し、該微粒子塗布
感上に斜め蒸着を長手方向の双方向から行った下地層を
配した上に強磁性金属薄膜を配したものである。
Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention comprises:
A fine particle coating layer is placed on a polymer film, and a ferromagnetic metal thin film is placed on top of the fine particle coating layer with an underlayer formed by diagonal vapor deposition from both directions in the longitudinal direction.

作  用 本発明の磁気記録媒体は上記した構成によシ、微粒子の
形状による強磁性金属の斜め蒸着時に起るシャドーイン
グによるボイド発生が殆んどなくなるため、磁気的によ
り均一性が増すことから、S/N 、エラー率、ピーク
シフトが改善され、形状効果は残されるので耐久性も低
下しないし、むしろボイドがなくなるために保存に関す
る耐久性は改善されることになる。
Effect: Due to the above-described structure, the magnetic recording medium of the present invention almost eliminates the generation of voids due to shadowing that occurs during oblique deposition of ferromagnetic metal due to the shape of fine particles, and therefore improves magnetic uniformity. , S/N, error rate, and peak shift are improved, and since the shape effect remains, durability does not deteriorate; on the contrary, since voids are eliminated, durability regarding storage is improved.

一実施例 以下、図面を参照しながら本発明の実施例の磁気記録媒
体について詳しく説明する。第1図は本発明の実施例に
係る磁気記録媒体の拡大断面図で、図中の7は、ポリエ
チレンテレフタレート、ポリエチレンフタレート、ポリ
カーボネート、セルロースディアセテート、ポリエーテ
ルサルフォン。
EMBODIMENT OF THE INVENTION Hereinafter, a magnetic recording medium according to an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and 7 in the figure represents polyethylene terephthalate, polyethylene phthalate, polycarbonate, cellulose diacetate, and polyether sulfone.

ポIJ 7二二レンサルフアイド、ポリアミド、ポリア
ミドイミド、ポリイミド等の高分子フィルムである。8
は微粒子塗布層で、カーボン、Ag2O3゜Sio2.
CaCo3.ポリエチレン球、ポリエステル球等の微粒
子9と、それを固定するポリエステル、ポリカーボネー
ト、ポリウレタン、エポキシ等の樹脂層1oから成るも
のである。
Polymer film made of polyamide, polyamide, polyamideimide, polyimide, etc. 8
is a fine particle coating layer, carbon, Ag2O3°Sio2.
CaCo3. It consists of fine particles 9 such as polyethylene spheres or polyester spheres, and a resin layer 1o of polyester, polycarbonate, polyurethane, epoxy, etc. to fix the fine particles 9.

11は長手方向の一方向から、斜め蒸着した下地層で、
不連続であることが好ましい。入射角は、50度以上、
更に好ましくは65度以上、電子ビーム蒸着法で行い、
構成元素は、Cr、Ni−Cr。
11 is a base layer deposited obliquely from one direction in the longitudinal direction;
Preferably, it is discontinuous. The angle of incidence is 50 degrees or more,
More preferably, it is performed by electron beam evaporation at 65 degrees or more,
Constituent elements are Cr and Ni-Cr.

Mo 、 T i 、Ge等が好ましい。12はもう一
方の長手方向から同様に斜め蒸着した下地層で、構成元
素は同じ種類で構成するのが好ましい。
Mo, Ti, Ge, etc. are preferred. Reference numeral 12 denotes a base layer which is similarly deposited obliquely from the other longitudinal direction, and is preferably composed of the same types of constituent elements.

この下地層でボイドを消滅させるには若干の条件出しが
必要であるが、必要ららばイオンブレーティング法によ
れば、蒸着原子のモビリティが大きくなるので、条件出
しが容易である。
In order to eliminate voids in this underlayer, it is necessary to set some conditions, but if necessary, the ion blating method increases the mobility of the deposited atoms, so it is easy to set the conditions.

13はCo−Ni 、Co−Fe 、Co −0、Co
−〇s、Co−P。
13 is Co-Ni, Co-Fe, Co-0, Co
-〇s, Co-P.

Co −T i 、 Co−Cr 、 Co−Cu 、
 Co −Mo 、 Co −Mg 。
Co-Ti, Co-Cr, Co-Cu,
Co-Mo, Co-Mg.

Co−W、Co−Cr −Nb 、Co−Ni −0、
Co−N1−P等を用い、スパッタリング法、電子ビー
ム蒸着法などで形成した強磁性金属薄膜、14は脂肪酸
、脂肪酸アミド、金属石けん、パーフロロカルボン酸。
Co-W, Co-Cr-Nb, Co-Ni-0,
A ferromagnetic metal thin film formed by a sputtering method, an electron beam evaporation method, etc. using Co--N1-P, etc., 14 is a fatty acid, a fatty acid amide, a metal soap, and a perfluorocarboxylic acid.

プラズマ重合膜、アモルファスカーボン膜等の単層又は
積層から成る保護層である。
This is a protective layer consisting of a single layer or a laminated layer of a plasma polymerized film, an amorphous carbon film, or the like.

以下、具体的な数値比較の一例を示す。An example of a specific numerical comparison is shown below.

厚みが12μmのポリエチレンテレフタレートフィルム
上に、直径150人のS 102微粒子を16ケ/(μ
m)2.ポリエステル樹脂30人で固定した微粒子塗布
層を配し、直径が50μmの円筒キャンに沿わせて、2
6 m / miRで巻き取りながらCrを電子ビーム
蒸着した。キャン温度は46℃とし、Crを1.4μm
/secの蒸着速度で、最小入射角66度で、均一に付
着した時の厚み換算で、64人となる量蒸着し、円筒キ
ャンに沿わせて反対方向に巻き取りながら、同じく、最
小入射角66度でCrを上記条件と同じで蒸着した。そ
の上に、直径が1mの円筒キャンに沿わせて、最小入射
角40度で。
On a polyethylene terephthalate film with a thickness of 12 μm, 16 particles/(μ
m)2. A fine particle coating layer fixed with 30 pieces of polyester resin was placed along a cylindrical can with a diameter of 50 μm, and 2
Cr was electron beam evaporated while winding at 6 m/miR. The can temperature is 46℃, and the Cr is 1.4μm.
At a deposition rate of /sec and a minimum incident angle of 66 degrees, an amount equivalent to a thickness of 64 when deposited uniformly was deposited, and while being wound in the opposite direction along the cylindrical can, the same minimum incident angle was Cr was deposited at 66 degrees under the same conditions as above. On top of that, along a cylindrical can with a diameter of 1 m, at a minimum angle of incidence of 40 degrees.

4 X 10−5Torrの酸素中にて、Co−N1(
旧;20wt%)を0.16μm電子ビーム蒸着したも
のをテープAとして準備した。テープBは、Co −N
 iの代りに、Co−Cr(Crを20.5wt%)タ
ーゲットを用いた高周波マグネトロンスパッタリング法
で垂直磁化膜を0.17μm形成したもので構成した、
比較例としてテープC,Dを準備した。テープCはCo
 −N i系のテープAの構成で、Crの斜め蒸着下地
を配さなかったもので、テープDは、同じく下地なしの
Co−Cr系(テープB)の構成のもので、テープA−
Dは全て、真空蒸着法でパーフロロ酢酸を55人蒸着し
た8ミリ幅の磁気テープである。
Co-N1 (
Tape A was prepared by electron beam evaporation of 0.16 μm of 20 wt %). Tape B is Co-N
Instead of i, a perpendicular magnetization film of 0.17 μm was formed by high-frequency magnetron sputtering using a Co-Cr (20.5 wt% Cr) target.
Tapes C and D were prepared as comparative examples. Tape C is Co
Tape A has the same structure as Ni-based tape A without a Cr diagonally vapor-deposited base. Tape D has the same Co-Cr base (tape B) without a base. Tape A-
All D are 8 mm wide magnetic tapes on which perfluoroacetic acid was deposited by 55 people using a vacuum deposition method.

テープAからDを、8ミリビデオテープレコーダを改造
して比較検討した。ヘッドはギャップ長がo、14μm
のフェライトヘッドを用いて、中心周波数をシフトして
、記録波長0.6pmを記録し、再生S/Nを比較した
。S/Nの初期直はテープAをo(dB)として相対比
較した結果テープBは+1.2(dB)、テープCは−
2,2(dB) 、テープDは−1,0(dB)テ、4
0’CB5%RHで再生を137回くシ返した時137
回目の再生時のS/NはテープA、B、C,D夫h−o
、3(dB)、+1.0(dB)。
Tapes A to D were compared and examined using a modified 8mm video tape recorder. The head has a gap length of o, 14 μm.
Using a ferrite head, the center frequency was shifted to record at a recording wavelength of 0.6 pm, and the reproduction S/N was compared. The initial S/N ratio was compared with tape A as o (dB), and as a result, tape B was +1.2 (dB) and tape C was -
2,2 (dB), Tape D is -1,0 (dB) Te, 4
137 when regenerating 137 times at 0'CB5%RH
The S/N for the second playback is tapes A, B, C, and D.
, 3 (dB), +1.0 (dB).

−3,9(dB)、−2,9(dB)であった。-3.9 (dB), -2.9 (dB).

ピット長0.22μmの矩形波信号を記録、再生した時
のピークシフト量は、テープA、B、C。
The amount of peak shift when recording and reproducing a rectangular wave signal with a pit length of 0.22 μm is for tapes A, B, and C.

Dは夫々、0.01pm以下、 0.04prn 、0
.03μmであった。また、エラー率はテープA、B、
C。
D is 0.01pm or less, 0.04prn, 0, respectively.
.. It was 03 μm. Also, the error rate is for tapes A, B,
C.

Dで夫々、7.6 Xl 0−6.6.9X 1 o−
6,3,9X10−5゜2.2X10″″5であった。
D respectively, 7.6 Xl 0-6.6.9X 1 o-
It was 6,3,9X10-5゜2.2X10''''5.

また、60 ℃90%RHに18日放置後(7) ’j
−5−率は夫々9X10−6.7.2X10−6゜8.
7X10 .5.lX10  であった。
In addition, after being left at 60 °C and 90% RH for 18 days (7) 'j
-5-rate is 9X10-6.7.2X10-6゜8.
7X10. 5. It was 1×10.

発明の効果 以上のように本発明によれば、S/N、エラー率。Effect of the invention As described above, according to the present invention, S/N, error rate.

ピークシフト等の特性は短波長記録再生でも良好でちり
、耐久性も良好であり、信頼性の高い高密度磁気記録媒
体が得られるといったすぐれた効果がある。
The properties such as peak shift are good even in short wavelength recording and reproduction, and the dust resistance and durability are also good, and there is an excellent effect that a highly reliable high-density magnetic recording medium can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例に係る磁気記録媒体の拡大断面
図、第2図は従来の磁気記録媒体の拡大断面図である。 7・・・・・・高分子フィルム、8・・・・・・微粒子
塗布層、11.12・・・・・・斜め蒸着下地層、13
・・・・・・強磁性金属薄膜。
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. 7... Polymer film, 8... Fine particle coating layer, 11.12... Oblique vapor deposition base layer, 13
...Ferromagnetic metal thin film.

Claims (1)

【特許請求の範囲】[Claims] 高分子フィルム上に微粒子塗布層を配し、該微粒子塗布
層上に斜め蒸着を長手方向の双方向から行った下地層を
配した上に強磁性金属薄膜を配して成ることを特徴とす
る磁気記録媒体。
A fine particle coating layer is arranged on a polymer film, and a ferromagnetic metal thin film is arranged on top of which a base layer is formed by diagonally vapor-depositing from both directions in the longitudinal direction. magnetic recording medium.
JP27253486A 1986-11-14 1986-11-14 Magnetic recording medium Pending JPS63127418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27253486A JPS63127418A (en) 1986-11-14 1986-11-14 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27253486A JPS63127418A (en) 1986-11-14 1986-11-14 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS63127418A true JPS63127418A (en) 1988-05-31

Family

ID=17515234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27253486A Pending JPS63127418A (en) 1986-11-14 1986-11-14 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS63127418A (en)

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