JPS63127237A - Photosensitive composition - Google Patents
Photosensitive compositionInfo
- Publication number
- JPS63127237A JPS63127237A JP27443286A JP27443286A JPS63127237A JP S63127237 A JPS63127237 A JP S63127237A JP 27443286 A JP27443286 A JP 27443286A JP 27443286 A JP27443286 A JP 27443286A JP S63127237 A JPS63127237 A JP S63127237A
- Authority
- JP
- Japan
- Prior art keywords
- group
- polymer
- substituted
- tables
- formulas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 39
- 229920000642 polymer Polymers 0.000 claims abstract description 45
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 claims abstract description 25
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims abstract description 7
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 claims abstract description 5
- 150000001875 compounds Chemical class 0.000 claims description 26
- 125000000217 alkyl group Chemical group 0.000 claims description 18
- 239000000126 substance Substances 0.000 claims description 14
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 10
- 125000003118 aryl group Chemical group 0.000 claims description 8
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 claims description 8
- 229910052801 chlorine Inorganic materials 0.000 claims description 6
- 125000005843 halogen group Chemical group 0.000 claims description 6
- 125000005650 substituted phenylene group Chemical group 0.000 claims description 5
- 125000002947 alkylene group Chemical group 0.000 claims description 4
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 4
- 125000004442 acylamino group Chemical group 0.000 claims description 3
- 125000000623 heterocyclic group Chemical group 0.000 claims description 3
- 125000000547 substituted alkyl group Chemical group 0.000 claims description 3
- 125000003107 substituted aryl group Chemical group 0.000 claims description 3
- 229920003169 water-soluble polymer Polymers 0.000 claims description 3
- 125000003342 alkenyl group Chemical group 0.000 claims description 2
- 125000002490 anilino group Chemical group [H]N(*)C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 claims description 2
- 125000001951 carbamoylamino group Chemical group C(N)(=O)N* 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 125000005017 substituted alkenyl group Chemical group 0.000 claims description 2
- 125000005156 substituted alkylene group Chemical group 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 10
- 239000007864 aqueous solution Substances 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 3
- 239000012670 alkaline solution Substances 0.000 abstract 1
- -1 etc.) Chemical group 0.000 description 41
- 230000015572 biosynthetic process Effects 0.000 description 15
- 238000003786 synthesis reaction Methods 0.000 description 15
- 238000007639 printing Methods 0.000 description 14
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 12
- 239000000975 dye Substances 0.000 description 10
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- 229920003986 novolac Polymers 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 125000001424 substituent group Chemical group 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 4
- 125000003545 alkoxy group Chemical group 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000004115 Sodium Silicate Substances 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 3
- 125000004093 cyano group Chemical group *C#N 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 3
- 229910052911 sodium silicate Inorganic materials 0.000 description 3
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 3
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 2
- UZKWTJUDCOPSNM-UHFFFAOYSA-N 1-ethenoxybutane Chemical compound CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- NGNBDVOYPDDBFK-UHFFFAOYSA-N 2-[2,4-di(pentan-2-yl)phenoxy]acetyl chloride Chemical compound CCCC(C)C1=CC=C(OCC(Cl)=O)C(C(C)CCC)=C1 NGNBDVOYPDDBFK-UHFFFAOYSA-N 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- KHBQMWCZKVMBLN-UHFFFAOYSA-N Benzenesulfonamide Chemical group NS(=O)(=O)C1=CC=CC=C1 KHBQMWCZKVMBLN-UHFFFAOYSA-N 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical compound C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 2
- 125000000738 acetamido group Chemical group [H]C([H])([H])C(=O)N([H])[*] 0.000 description 2
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 description 2
- 125000005115 alkyl carbamoyl group Chemical group 0.000 description 2
- 125000005153 alkyl sulfamoyl group Chemical group 0.000 description 2
- 125000004390 alkyl sulfonyl group Chemical group 0.000 description 2
- 125000004422 alkyl sulphonamide group Chemical group 0.000 description 2
- 125000004414 alkyl thio group Chemical group 0.000 description 2
- 125000004397 aminosulfonyl group Chemical group NS(=O)(=O)* 0.000 description 2
- 125000004391 aryl sulfonyl group Chemical group 0.000 description 2
- 125000004421 aryl sulphonamide group Chemical group 0.000 description 2
- 125000005110 aryl thio group Chemical group 0.000 description 2
- 125000004104 aryloxy group Chemical group 0.000 description 2
- HRBFQSUTUDRTSV-UHFFFAOYSA-N benzene-1,2,3-triol;propan-2-one Chemical compound CC(C)=O.OC1=CC=CC(O)=C1O HRBFQSUTUDRTSV-UHFFFAOYSA-N 0.000 description 2
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 2
- 125000003917 carbamoyl group Chemical group [H]N([H])C(*)=O 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 125000005117 dialkylcarbamoyl group Chemical group 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-cresol Chemical compound CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- HNQIVZYLYMDVSB-UHFFFAOYSA-N methanesulfonimidic acid Chemical compound CS(N)(=O)=O HNQIVZYLYMDVSB-UHFFFAOYSA-N 0.000 description 2
- 125000002816 methylsulfanyl group Chemical group [H]C([H])([H])S[*] 0.000 description 2
- 125000004170 methylsulfonyl group Chemical group [H]C([H])([H])S(*)(=O)=O 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 125000003356 phenylsulfanyl group Chemical group [*]SC1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 2
- 125000003170 phenylsulfonyl group Chemical group C1(=CC=CC=C1)S(=O)(=O)* 0.000 description 2
- 238000006303 photolysis reaction Methods 0.000 description 2
- 230000015843 photosynthesis, light reaction Effects 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- SMUQFGGVLNAIOZ-UHFFFAOYSA-N quinaldine Chemical compound C1=CC=CC2=NC(C)=CC=C21 SMUQFGGVLNAIOZ-UHFFFAOYSA-N 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 235000019795 sodium metasilicate Nutrition 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 235000011149 sulphuric acid Nutrition 0.000 description 2
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- SKYXLDSRLNRAPS-UHFFFAOYSA-N 1,2,4-trifluoro-5-methoxybenzene Chemical compound COC1=CC(F)=C(F)C=C1F SKYXLDSRLNRAPS-UHFFFAOYSA-N 0.000 description 1
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical compound C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- DNJRKFKAFWSXSE-UHFFFAOYSA-N 1-chloro-2-ethenoxyethane Chemical compound ClCCOC=C DNJRKFKAFWSXSE-UHFFFAOYSA-N 0.000 description 1
- KTZVZZJJVJQZHV-UHFFFAOYSA-N 1-chloro-4-ethenylbenzene Chemical compound ClC1=CC=C(C=C)C=C1 KTZVZZJJVJQZHV-UHFFFAOYSA-N 0.000 description 1
- JZHGRUMIRATHIU-UHFFFAOYSA-N 1-ethenyl-3-methylbenzene Chemical compound CC1=CC=CC(C=C)=C1 JZHGRUMIRATHIU-UHFFFAOYSA-N 0.000 description 1
- RCSKFKICHQAKEZ-UHFFFAOYSA-N 1-ethenylindole Chemical compound C1=CC=C2N(C=C)C=CC2=C1 RCSKFKICHQAKEZ-UHFFFAOYSA-N 0.000 description 1
- CTXUTPWZJZHRJC-UHFFFAOYSA-N 1-ethenylpyrrole Chemical compound C=CN1C=CC=C1 CTXUTPWZJZHRJC-UHFFFAOYSA-N 0.000 description 1
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 1
- VEUMBMHMMCOFAG-UHFFFAOYSA-N 2,3-dihydrooxadiazole Chemical compound N1NC=CO1 VEUMBMHMMCOFAG-UHFFFAOYSA-N 0.000 description 1
- BJINVQNEBGOMCR-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethyl acetate Chemical compound COCCOCCOC(C)=O BJINVQNEBGOMCR-UHFFFAOYSA-N 0.000 description 1
- IBDVWXAVKPRHCU-UHFFFAOYSA-N 2-(2-methylprop-2-enoyloxy)ethyl 3-oxobutanoate Chemical compound CC(=O)CC(=O)OCCOC(=O)C(C)=C IBDVWXAVKPRHCU-UHFFFAOYSA-N 0.000 description 1
- XBYTTXAEDHUVAH-UHFFFAOYSA-N 2-(4-butoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC(OCCCC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 XBYTTXAEDHUVAH-UHFFFAOYSA-N 0.000 description 1
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 1
- JKNCOURZONDCGV-UHFFFAOYSA-N 2-(dimethylamino)ethyl 2-methylprop-2-enoate Chemical compound CN(C)CCOC(=O)C(C)=C JKNCOURZONDCGV-UHFFFAOYSA-N 0.000 description 1
- DPBJAVGHACCNRL-UHFFFAOYSA-N 2-(dimethylamino)ethyl prop-2-enoate Chemical compound CN(C)CCOC(=O)C=C DPBJAVGHACCNRL-UHFFFAOYSA-N 0.000 description 1
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 1
- AEPWOCLBLLCOGZ-UHFFFAOYSA-N 2-cyanoethyl prop-2-enoate Chemical compound C=CC(=O)OCCC#N AEPWOCLBLLCOGZ-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- WDQMWEYDKDCEHT-UHFFFAOYSA-N 2-ethylhexyl 2-methylprop-2-enoate Chemical compound CCCCC(CC)COC(=O)C(C)=C WDQMWEYDKDCEHT-UHFFFAOYSA-N 0.000 description 1
- NORSCOJMIBLOFM-UHFFFAOYSA-N 2-hydroxyethyl 2-methylprop-2-enoate;2-methylprop-2-enoic acid Chemical compound CC(=C)C(O)=O.CC(=C)C(=O)OCCO NORSCOJMIBLOFM-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- XLLXMBCBJGATSP-UHFFFAOYSA-N 2-phenylethenol Polymers OC=CC1=CC=CC=C1 XLLXMBCBJGATSP-UHFFFAOYSA-N 0.000 description 1
- CXJAFLQWMOMYOW-UHFFFAOYSA-N 3-chlorofuran-2,5-dione Chemical compound ClC1=CC(=O)OC1=O CXJAFLQWMOMYOW-UHFFFAOYSA-N 0.000 description 1
- QZYCWJVSPFQUQC-UHFFFAOYSA-N 3-phenylfuran-2,5-dione Chemical compound O=C1OC(=O)C(C=2C=CC=CC=2)=C1 QZYCWJVSPFQUQC-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 239000004254 Ammonium phosphate Substances 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- 239000004135 Bone phosphate Substances 0.000 description 1
- RENMDAKOXSCIGH-UHFFFAOYSA-N Chloroacetonitrile Chemical compound ClCC#N RENMDAKOXSCIGH-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 108091033322 FsrA Proteins 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical group CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 1
- 229930192627 Naphthoquinone Natural products 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical group CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000004111 Potassium silicate Substances 0.000 description 1
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 description 1
- UIIMBOGNXHQVGW-DEQYMQKBSA-M Sodium bicarbonate-14C Chemical compound [Na+].O[14C]([O-])=O UIIMBOGNXHQVGW-DEQYMQKBSA-M 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- LCXXNKZQVOXMEH-UHFFFAOYSA-N Tetrahydrofurfuryl methacrylate Chemical compound CC(=C)C(=O)OCC1CCCO1 LCXXNKZQVOXMEH-UHFFFAOYSA-N 0.000 description 1
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 1
- WYGWHHGCAGTUCH-ISLYRVAYSA-N V-65 Substances CC(C)CC(C)(C#N)\N=N\C(C)(C#N)CC(C)C WYGWHHGCAGTUCH-ISLYRVAYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 150000003926 acrylamides Chemical class 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 229920006397 acrylic thermoplastic Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 229910000148 ammonium phosphate Inorganic materials 0.000 description 1
- 235000019289 ammonium phosphates Nutrition 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 125000005116 aryl carbamoyl group Chemical group 0.000 description 1
- 239000000981 basic dye Substances 0.000 description 1
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- XZKRXPZXQLARHH-UHFFFAOYSA-N buta-1,3-dienylbenzene Chemical compound C=CC=CC1=CC=CC=C1 XZKRXPZXQLARHH-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- ZXJXZNDDNMQXFV-UHFFFAOYSA-M crystal violet Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1[C+](C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 ZXJXZNDDNMQXFV-UHFFFAOYSA-M 0.000 description 1
- OIWOHHBRDFKZNC-UHFFFAOYSA-N cyclohexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCCC1 OIWOHHBRDFKZNC-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229940061607 dibasic sodium phosphate Drugs 0.000 description 1
- WASQWSOJHCZDFK-UHFFFAOYSA-N diketene Chemical compound C=C1CC(=O)O1 WASQWSOJHCZDFK-UHFFFAOYSA-N 0.000 description 1
- XPPKVPWEQAFLFU-UHFFFAOYSA-N diphosphoric acid Chemical compound OP(O)(=O)OP(O)(O)=O XPPKVPWEQAFLFU-UHFFFAOYSA-N 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- BNIILDVGGAEEIG-UHFFFAOYSA-L disodium hydrogen phosphate Chemical compound [Na+].[Na+].OP([O-])([O-])=O BNIILDVGGAEEIG-UHFFFAOYSA-L 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- 238000005886 esterification reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical class CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 125000003709 fluoroalkyl group Chemical group 0.000 description 1
- VOOLKNUJNPZAHE-UHFFFAOYSA-N formaldehyde;2-methylphenol Chemical compound O=C.CC1=CC=CC=C1O VOOLKNUJNPZAHE-UHFFFAOYSA-N 0.000 description 1
- 238000005227 gel permeation chromatography Methods 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 125000001188 haloalkyl group Chemical group 0.000 description 1
- LNCPIMCVTKXXOY-UHFFFAOYSA-N hexyl 2-methylprop-2-enoate Chemical compound CCCCCCOC(=O)C(C)=C LNCPIMCVTKXXOY-UHFFFAOYSA-N 0.000 description 1
- LNMQRPPRQDGUDR-UHFFFAOYSA-N hexyl prop-2-enoate Chemical compound CCCCCCOC(=O)C=C LNMQRPPRQDGUDR-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000005457 ice water Substances 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- 229940107698 malachite green Drugs 0.000 description 1
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 description 1
- XJRBAMWJDBPFIM-UHFFFAOYSA-N methyl vinyl ether Chemical compound COC=C XJRBAMWJDBPFIM-UHFFFAOYSA-N 0.000 description 1
- CXKWCBBOMKCUKX-UHFFFAOYSA-M methylene blue Chemical compound [Cl-].C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 CXKWCBBOMKCUKX-UHFFFAOYSA-M 0.000 description 1
- 229960000907 methylthioninium chloride Drugs 0.000 description 1
- JESXATFQYMPTNL-UHFFFAOYSA-N mono-hydroxyphenyl-ethylene Natural products OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 1
- 229940088644 n,n-dimethylacrylamide Drugs 0.000 description 1
- YLGYACDQVQQZSW-UHFFFAOYSA-N n,n-dimethylprop-2-enamide Chemical compound CN(C)C(=O)C=C YLGYACDQVQQZSW-UHFFFAOYSA-N 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- YPHQUSNPXDGUHL-UHFFFAOYSA-N n-methylprop-2-enamide Chemical compound CNC(=O)C=C YPHQUSNPXDGUHL-UHFFFAOYSA-N 0.000 description 1
- AWGZKFQMWZYCHF-UHFFFAOYSA-N n-octylprop-2-enamide Chemical compound CCCCCCCCNC(=O)C=C AWGZKFQMWZYCHF-UHFFFAOYSA-N 0.000 description 1
- XFHJDMUEHUHAJW-UHFFFAOYSA-N n-tert-butylprop-2-enamide Chemical compound CC(C)(C)NC(=O)C=C XFHJDMUEHUHAJW-UHFFFAOYSA-N 0.000 description 1
- 150000002791 naphthoquinones Chemical class 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 150000002825 nitriles Chemical group 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229940065472 octyl acrylate Drugs 0.000 description 1
- ANISOHQJBAQUQP-UHFFFAOYSA-N octyl prop-2-enoate Chemical compound CCCCCCCCOC(=O)C=C ANISOHQJBAQUQP-UHFFFAOYSA-N 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 125000002092 orthoester group Chemical group 0.000 description 1
- 150000002905 orthoesters Chemical class 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 description 1
- 229910052913 potassium silicate Inorganic materials 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- FSOGITKTAMMWGP-UHFFFAOYSA-M potassium;2-phenylethenesulfinate Chemical compound [K+].[O-]S(=O)C=CC1=CC=CC=C1 FSOGITKTAMMWGP-UHFFFAOYSA-M 0.000 description 1
- FBCQUCJYYPMKRO-UHFFFAOYSA-N prop-2-enyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC=C FBCQUCJYYPMKRO-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 239000008262 pumice Substances 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 229940043267 rhodamine b Drugs 0.000 description 1
- 238000002390 rotary evaporation Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- AUHHYELHRWCWEZ-UHFFFAOYSA-N tetrachlorophthalic anhydride Chemical compound ClC1=C(Cl)C(Cl)=C2C(=O)OC(=O)C2=C1Cl AUHHYELHRWCWEZ-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- 229940001496 tribasic sodium phosphate Drugs 0.000 description 1
- KEROTHRUZYBWCY-UHFFFAOYSA-N tridecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCCOC(=O)C(C)=C KEROTHRUZYBWCY-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 238000005292 vacuum distillation Methods 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は平版印刷版、IC回路やフォトマスクの製造に
適する感光性組成物に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a photosensitive composition suitable for manufacturing lithographic printing plates, IC circuits and photomasks.
更に詳しくは、ポジ型に作用する0−ナフトキノンジア
ジド化合物とアルカリ水可溶性の特定のポリマーとから
なる感光性組成物に関するものである。More specifically, the present invention relates to a photosensitive composition comprising a positive-acting 0-naphthoquinonediazide compound and a specific alkaline water-soluble polymer.
0−ナフトキノンジアジド化合物とノボラック型フェノ
ール樹脂からなる感光性組成物は、非常に優れた感光性
組成物として平版印刷版の製造やフォトレジストとして
工業的に用いられてきた。A photosensitive composition composed of an 0-naphthoquinone diazide compound and a novolak type phenol resin has been used industrially as an extremely excellent photosensitive composition in the production of lithographic printing plates and as a photoresist.
しかし主体として用いられるノボラック型フェノール樹
脂の性質上基板に対する密着性が悪いこと、皮膜がもろ
いこと、耐摩耗性が劣り、平版印刷版に用いたときの耐
刷力が十分でないこと等の改良すべき点があり応用面で
の限界があった。However, due to the nature of the novolak type phenolic resin used as the main material, it has poor adhesion to the substrate, brittle film, poor abrasion resistance, and insufficient printing durability when used in lithographic printing plates. There were some drawbacks and limitations in terms of application.
かかる問題を解決するため種々のポリマーが、バインダ
ーとして検討されてきた。たとえば特公昭52−410
50号公報に記載されているポリIJ’ロキンスチレン
またはヒドロキシスチレン共重合体は確かに皮膜性が改
良されたが、耐摩耗性が劣るという欠点を有していた。In order to solve this problem, various polymers have been investigated as binders. For example, Tokuko Sho 52-410
Although the polyIJ' loquinstyrene or hydroxystyrene copolymer described in Japanese Patent No. 50 did have improved film properties, it had the drawback of poor abrasion resistance.
また、特開昭51−34711号公報中にはアクリル酸
誘導体の構造単位を分子構造中に有するポリマーをバイ
ンダーとして用いることが提案されているが、かかるポ
リマーは適正な現像条件の範囲が狭いという問題があっ
た。Furthermore, in JP-A-51-34711, it is proposed to use a polymer having a structural unit of an acrylic acid derivative in its molecular structure as a binder, but it is said that such a polymer has a narrow range of appropriate development conditions. There was a problem.
従って本発明の目的は適正な現像条件の範囲が広く、耐
刷力の大きい平版印刷版を与える感光性組成物を提供す
ることである。本発明の他の目的は基板に対する密着性
が良く、柔軟な皮膜を与える感光性組成物を提供するこ
とである。Therefore, an object of the present invention is to provide a photosensitive composition that can be used in a wide range of appropriate development conditions and provides a lithographic printing plate with high printing durability. Another object of the present invention is to provide a photosensitive composition that has good adhesion to a substrate and provides a flexible film.
〔問題点を解決するための手段〕
上記問題点は、数あるポリマーのなかから活性メチレン
基を有するポリマーを選択し、これをポジ型に作用する
感光材料と組合せることによって解決できた。[Means for Solving the Problems] The above problems could be solved by selecting a polymer having an active methylene group from among many polymers and combining it with a photosensitive material that acts in a positive tone.
すなわち、本発明は、活性メチレン基を有するポリマー
とポジ型に作用する感光性化合物又は感光性混合物とを
含有することを特徴とする感光性組成物を提供する。That is, the present invention provides a photosensitive composition containing a polymer having an active methylene group and a positively acting photosensitive compound or a photosensitive mixture.
本発明で用いる活性メチレン基を有するポリマーとして
は、分子内に活性メチレン基を有するすべてのポリマー
を使用することができるが、PKaが4〜11、より好
ましくは5〜9の活性メチレン基を分子構造中に有し、
かつ水不溶でアルカリ水可溶のものが好ましい。As the polymer having an active methylene group used in the present invention, any polymer having an active methylene group in the molecule can be used. have in the structure,
Moreover, those which are insoluble in water and soluble in alkaline water are preferred.
すなわち、本発明で用いるポリマーは、分子構造中に活
性メチレン基を有するので、解離により、アルカリ水で
ある現像液に溶解することを特徴とするが、PKaが上
記範囲にあると、一層良好な性能が得られるからである
。That is, since the polymer used in the present invention has an active methylene group in its molecular structure, it is characterized by dissociation in a developing solution, which is alkaline water. This is because performance can be obtained.
上記ポリマーとしては、カルボニル基、スルホニル基か
ら選ばれた少くとも1つ以上の基と直接結合した活性メ
チレン基を分子構造中に有し、かつ水不溶、アルカリ水
可溶のポリマーが好ましく、又、下記一般式〔■〕又は
CI[]で表わされるポリマーが好ましい。The above polymer preferably has an active methylene group directly bonded to at least one group selected from carbonyl groups and sulfonyl groups in its molecular structure, and is water-insoluble and alkaline water-soluble; , a polymer represented by the following general formula [■] or CI [] is preferred.
(式中、Aは水素原子、塩素原子または炭素数1ないし
4のアルキル基を表わし、
−NH−、フェニレン基、置換フェニレン基ヲ表ワ−C
N 、−NO□、−R3、を表わす。又、mSnは0ま
たは1を表わすが、同時に0になることはない。(In the formula, A represents a hydrogen atom, a chlorine atom, or an alkyl group having 1 to 4 carbon atoms, and -NH-, a phenylene group, a substituted phenylene group, and -C
N, -NO□, -R3. Further, mSn represents 0 or 1, but it cannot be 0 at the same time.
R+ は、アルキレン基、フェニレンL 置換フルキレ
ン基、置換フェニレン基を表わし、XとYにはさまれた
CH2は、XまたはBのカルボニル基またはスルホニル
基と直接結合している。R+ represents an alkylene group, a phenylene L-substituted fullkylene group, or a substituted phenylene group, and CH2 sandwiched between X and Y is directly bonded to the carbonyl group or sulfonyl group of X or B.
R2はアルキル基、アルケニル基、アリール基および置
換アルキル基、置換アルケニル基、置換アリール基を表
わし、R3は、ハロゲン原子で水素の一部または全部が
置換されたアルキル基を表わす。)
(式中、Dは水素原子、塩素原子または炭素数1ないし
4個のアルキル基を表わし、Eは、−COO−1−CO
NR4−または置換もしくは無置換のフェニル基を表わ
し、Fは置換もしくは無置換のアルキレン基、フェニレ
ン基またはアラルキレン基を表わし、Gは−CONR1
−、−NR,C0NR4−1〜NR1C0D−1−NR
,CO−、−Ol:ONRじ、−NR,−、−C[]0
−、−0CO−、−CO−1−〇−1−302−、−N
R4SO□−または−SO□NR,−を表わす。R4は
水素原子または置換もしくは無置換のアルキル基または
アリール基を表わす。R1が同一分子中に2個以上ある
時は同じでも異なっていても良い。R2 represents an alkyl group, an alkenyl group, an aryl group, a substituted alkyl group, a substituted alkenyl group, or a substituted aryl group, and R3 represents an alkyl group in which part or all of the hydrogen atoms are substituted with halogen atoms. ) (wherein, D represents a hydrogen atom, a chlorine atom, or an alkyl group having 1 to 4 carbon atoms, and E represents -COO-1-CO
NR4- or a substituted or unsubstituted phenyl group, F represents a substituted or unsubstituted alkylene group, phenylene group or aralkylene group, G is -CONR1
-, -NR,C0NR4-1~NR1C0D-1-NR
,CO-,-Ol:ONRji,-NR,-,-C[]0
-, -0CO-, -CO-1-〇-1-302-, -N
R4SO□- or -SO□NR,-. R4 represents a hydrogen atom or a substituted or unsubstituted alkyl group or aryl group. When there are two or more R1s in the same molecule, they may be the same or different.
flSm、nは0または1を表わす。ただし、11m、
nが同時に0であることはない。Qは式%式%
R5は無置換または置換アニリノ基、アシルアミノ基、
ウレイド基を表わし、R6は、置換または無置換のアル
キル基、アリール基または複素環基を表わし、Rs S
Reのいずれかの部分で前記一般式[1)のGに連結す
る。)
上記一般式(1)又は(II)で表わされる化合物にお
いて、Aとしては水素原子、メチル基が好カルボニル基
がAと結合した炭素に直接結合するのが好ましい。又、
置換フェニレン基としては、F、Cj!SDrなどのハ
ロゲン原子やアルキル基、アルコキシ基、ニトロ基、シ
アノ基で置換された°フェニレン基などが好ましい。X
は、好ましくはは−C)12−CH2−、−CH2−、
フェニレン基が好ましい。flSm,n represents 0 or 1. However, 11m,
n is never 0 at the same time. Q is the formula % formula % R5 is an unsubstituted or substituted anilino group, an acylamino group,
represents a ureido group, R6 represents a substituted or unsubstituted alkyl group, aryl group or heterocyclic group, Rs S
Any part of Re is connected to G in the general formula [1]. ) In the compound represented by the above general formula (1) or (II), it is preferable that A is a hydrogen atom or a methyl group is directly bonded to the carbon to which the carbonyl group is bonded to A. or,
Substituted phenylene groups include F, Cj! Preferred are phenylene groups substituted with halogen atoms such as SDr, alkyl groups, alkoxy groups, nitro groups, and cyano groups. X
is preferably -C)12-CH2-, -CH2-,
A phenylene group is preferred.
してはアルキル基が好ましく、特にメチル基が好ましい
。−R8としては−CF3、−CtlF2、−CF2C
Faが好ましい。An alkyl group is preferable, and a methyl group is particularly preferable. -R8 is -CF3, -CtlF2, -CF2C
Fa is preferred.
一般式〔II〕におけるDとしては、特に水素原子、メ
チル基が好ましく、一般式t”III)におけるR6と
しては、アルキル基、置換アルキル基(例えばフルオロ
アルキルの如きハロアルキル、シアノアルキノヘベンジ
ルアルキルなど)、アリール基または置換アリール基〔
置換基としてはアルキル基(例えばメチル基、エチル基
など)、アルコキシ基(例えばメトキシ基、エトキシ基
など)、アリールオキシ基(例えばフェニルオキシ基な
ど)、アルコキシカルボニル基(例えばメトキシカルボ
ニル基など)、アシルアミ7基(例えばアセチルアミノ
基)、カルバモイル基、アルキルカルバモイル基(例え
ばメチルカルバモイル基、エチルカルバモイル基など)
、ジアルキルカルバモイル基(例えばジメチルカルバモ
イル基)、アリールカルバモイル基(例えばフェニルカ
ルバモイル基)、アルキルスルホニル基(例えばメチル
スルホニル基)、アリールスルホニル基(例えばフェニ
ルスルホニル基)、アルキルスルホンアミド基(例えば
メタンスルホンアミド基)、アリールスルホンアミド基
(例えばフェニルスルホンアミド基)、スルファモイル
基、アルキルスルファモイル基(例えばエチルスルファ
モイル基)、ジアルキルスルファモイル基(例えばジメ
チルスルファモイル基)、アルキルチオ基(例えばメチ
ルチオ基、アリールチオ基(例えばフェニルチオ基)、
シアノ基、ニトロ基、ハロゲン原子(例えばフッ素、塩
素、臭素など)が挙げられ、この置換基が2個以上ある
ときは同じでも異なってもよい。D in the general formula [II] is particularly preferably a hydrogen atom or a methyl group, and R6 in the general formula t"III) is an alkyl group, a substituted alkyl group (for example, haloalkyl such as fluoroalkyl, cyanoalkynohebenzylalkyl, etc.). ), aryl group or substituted aryl group [
Examples of substituents include alkyl groups (e.g., methyl group, ethyl group, etc.), alkoxy groups (e.g., methoxy group, ethoxy group, etc.), aryloxy groups (e.g., phenyloxy group, etc.), alkoxycarbonyl groups (e.g., methoxycarbonyl group, etc.), Acylamide 7 group (e.g. acetylamino group), carbamoyl group, alkylcarbamoyl group (e.g. methylcarbamoyl group, ethylcarbamoyl group, etc.)
, dialkylcarbamoyl group (e.g. dimethylcarbamoyl group), arylcarbamoyl group (e.g. phenylcarbamoyl group), alkylsulfonyl group (e.g. methylsulfonyl group), arylsulfonyl group (e.g. phenylsulfonyl group), alkylsulfonamide group (e.g. methanesulfonamide) group), arylsulfonamide group (e.g. phenylsulfonamide group), sulfamoyl group, alkylsulfamoyl group (e.g. ethylsulfamoyl group), dialkylsulfamoyl group (e.g. dimethylsulfamoyl group), alkylthio group (e.g. Methylthio group, arylthio group (e.g. phenylthio group),
Examples include a cyano group, a nitro group, and a halogen atom (for example, fluorine, chlorine, bromine, etc.), and when there are two or more of these substituents, they may be the same or different.
特に好ましい置換基としてはハロゲン原子、アルキル基
、アルコキシ基、アルコキシカルボニル基、シアノ基が
挙げられる。〕、複素環基(例えばトリアゾール、チア
ゾール、ベンズチアゾール、フラン、ピリジン、キナル
ジン、ベンズオキサゾール、ピリミジン、オキサゾール
、イミダゾールなど)である。Particularly preferred substituents include a halogen atom, an alkyl group, an alkoxy group, an alkoxycarbonyl group, and a cyano group. ], heterocyclic groups (eg triazole, thiazole, benzthiazole, furan, pyridine, quinaldine, benzoxazole, pyrimidine, oxazole, imidazole, etc.).
一般式〔I〕のR1、R2−1一般式〔II、〕のEl
FSRa 、Rsにおける置換基としては、アルキル基
(例えばメチル基、エチル基など)、アルコキシ基(例
えばメトキシ基、エトキシ基など)、アリールオキシ基
(例えばフェニルオキシ基など)、アルコキシカルボニ
ル基(例えばメトキシカルボニル基など)、アシルアミ
ノ基(例えばアセチルアミノ基)、カルバモイル基、ア
ルキルカルバモイル基(例えばメチルカルバモイル基、
エチルカルバモイル基ナト)、ジアルキルカルバモイル
基(例えばジメチルカルバモイル基)、アリールカフ1
/ハモイル基(例、tばフェニルカルバモイル基)、ア
ルキルスルホニル基(例えばメチルスルホニル基)、ア
リールスルホニル基(例えばフェニルスルホニル基)、
アルキルスルホンアミド基(例えばメタンスルホンアミ
ド基)、アリールスルホンアミド基(例えばフェニルス
ルホンアミド基)、スルファモイル基、アルキルスルフ
ァモイル基(例エバエチルスルファモイル基)、ジアル
キルスルファモイル基(例えばジメチルスルファモイル
基)、アルキルチオ基(例えばメチルチオ基、アリール
チオ基(例えばフェニルチオ基)、シアン基、ニトロ基
、ハロゲン原子(例えばフッ素、塩素、臭素など)が挙
げられ、この置換基が2個以上あるときは同じでも異な
ってもよい。R1, R2-1 of general formula [I], El of general formula [II,]
Substituents for FSRa and Rs include alkyl groups (e.g., methyl group, ethyl group, etc.), alkoxy groups (e.g., methoxy group, ethoxy group, etc.), aryloxy groups (e.g., phenyloxy group, etc.), alkoxycarbonyl groups (e.g., methoxy group, etc.). carbonyl group, etc.), acylamino group (e.g. acetylamino group), carbamoyl group, alkylcarbamoyl group (e.g. methylcarbamoyl group,
ethylcarbamoyl group), dialkylcarbamoyl group (e.g. dimethylcarbamoyl group), aryl cuff 1
/hamoyl group (e.g. phenylcarbamoyl group), alkylsulfonyl group (e.g. methylsulfonyl group), arylsulfonyl group (e.g. phenylsulfonyl group),
Alkylsulfonamide groups (e.g. methanesulfonamide group), arylsulfonamide groups (e.g. phenylsulfonamide group), sulfamoyl groups, alkylsulfamoyl groups (e.g. evaethylsulfamoyl group), dialkylsulfamoyl groups (e.g. dimethyl Sulfamoyl group), alkylthio group (e.g. methylthio group, arylthio group (e.g. phenylthio group), cyanide group, nitro group, halogen atom (e.g. fluorine, chlorine, bromine, etc.), and there are two or more of these substituents. The times may be the same or different.
本発明で用いる上記ポリマーとしては、広範囲の分子量
を有するものを使用することができるが、ポリスチレン
を標準としてゲルパーミェーションクロマトグラフィー
で測定した時に重量平均分子量で500〜i、ooo、
oooが好ましく、さらに好ましくは4.000〜30
0,000である。The polymer used in the present invention can have a wide range of molecular weights, but the weight average molecular weight is 500 to i, ooo when measured by gel permeation chromatography using polystyrene as a standard.
ooo is preferable, more preferably 4.000 to 30
It is 0,000.
本発明における感光性組成物中、活性メチレン基を有す
るポリマーの量は、3〜90重量%、好ましくは10〜
70重量%、さらに好ましくは15〜50重量%である
。In the photosensitive composition of the present invention, the amount of the polymer having active methylene groups is 3 to 90% by weight, preferably 10 to 90% by weight.
It is 70% by weight, more preferably 15 to 50% by weight.
本発明で用いる活性メチレン基を有するポリマーは一般
式CI)または一般式〔II〕の構造単位だけの繰り返
し構造を有するポリマーまたは一般式〔IDと一般式〔
II)のコポリマーでも良いが、通常使用されているビ
ニル系モノマーの一種以上を組み合せた繰り返し構造を
有する多元系共重合体であっても良い。かかる多元系共
重合体の場合、一般式〔■〕で示される構造単位を10
モル%以上含むのが好ましく、20モル%以上含むのが
さらに好ましい。一般式〔■〕又は[IDで示される構
造単位と組み合せて用いられる構造単位としては、例え
ばエチレン、プロピレン、インブチレン、ブタジェン、
イソブチレンなどのエチレン不飽和オレフィン類、例え
ばスチレン、α−メチルスチレン、0−メチルスチレン
、m−メチルスチレン、p−メ酸1so−ブチル、アク
リル酸n−ブチル、アクリル酸ヘキシル、アクリル酸オ
クチル、アクリル酸2−ヒドロキシエチル、アクリル酸
2−シアンエチル、アクリル酸グリシジノペアクリル酸
ジメチルアミノエチルなどのアクリル酸およびそのエス
テル類、例えばメタクリル酸、メタクリル酸メチノペメ
タクリル酸エチノペメタクリル酸n−ブチル、メタクリ
ル酸1so−ブチル、メタクリル酸tert−ブチル、
メタクリル酸ヘキシル、メタクリル酸2−エチルヘキシ
ル、メタクリル酸うウリノペメタクリル酸トリデシル、
メタクリル酸シクロヘキシル、メタクリル酸ベンジル、
メククリル酸2−ヒドロキシエチル、メタクリル酸2−
ヒドロキシプロピノペメタクリル酸ジメチルアミノエチ
ル、メタクリル酸ジエチルアミノエチノペメククリル酸
グリシジノベメタクリル酸テトラヒドロフルフリル、メ
タクリル酸アリルなどのメタクリル酸およびそのエステ
ル類、例えば酢酸ビニノペブロピオン酸ビニル、酪酸ビ
ニノベカプロン酸ビニノペ安息香酸ビニルなどのビニル
エステルチルスチレン、○−クロロスチレン、p−クロ
ロスチレンなどのスチレン類、例えばアクリル酸、アク
リル酸メチル、アクリル酸エチル、アクリル類、例えば
メチルビニルエーテル、エチルビニルエーテル、インブ
チルビニルエーテ/lz。The polymer having an active methylene group used in the present invention is a polymer having a repeating structure consisting only of structural units of general formula CI) or general formula [II], or a polymer having a repeating structure of only structural units of general formula CI) or general formula [ID and general formula [
The copolymer II) may be used, but it may also be a multicomponent copolymer having a repeating structure in which one or more types of commonly used vinyl monomers are combined. In the case of such a multicomponent copolymer, 10 structural units represented by the general formula [■]
The content is preferably mol % or more, and more preferably 20 mol % or more. Structural units used in combination with the structural unit represented by the general formula [■] or [ID include, for example, ethylene, propylene, inbutylene, butadiene,
Ethylenically unsaturated olefins such as isobutylene, such as styrene, α-methylstyrene, 0-methylstyrene, m-methylstyrene, 1so-butyl p-methate, n-butyl acrylate, hexyl acrylate, octyl acrylate, acrylic Acrylic acid and its esters such as 2-hydroxyethyl acrylate, 2-cyanethyl acrylate, glycidinope acrylate, dimethylaminoethyl acrylate, e.g. methacrylic acid, metinope methacrylate, etinope methacrylate, n-butyl methacrylate. , 1so-butyl methacrylate, tert-butyl methacrylate,
Hexyl methacrylate, 2-ethylhexyl methacrylate, urinope methacrylate, tridecyl methacrylate,
cyclohexyl methacrylate, benzyl methacrylate,
2-hydroxyethyl meccrylate, 2-methacrylate
Hydroxypropinope dimethylaminoethyl methacrylate, diethylaminoethinopione methacrylate, glycidinobe mecacrylate, tetrahydrofurfuryl methacrylate, methacrylic acid and its esters such as allyl methacrylate, e.g. vinyl acetate, vinylpepropionate, butyric acid Vinyl esters such as vinyl benzoate, vinyl styrene, ○-chlorostyrene, and p-chlorostyrene, such as acrylic acid, methyl acrylate, ethyl acrylate, acrylics, such as methyl vinyl ether, ethyl vinyl ether, and vinyl esters such as vinyl benzoate. Butyl vinyl ether/lz.
β−クロロエチルビニルエーテル、シクロヘキシルビニ
ルエーテルなどのビニルエーテル類、アクリロニトリル
、メククリロニトリル、例えばアクリルアミド、N−メ
チルアクリルアミド、N、 N−ジメチルアクリルアミ
ド、N−tert−ブチルアクリルアミド、N−オクチ
ルアクリルアミド、ジアセトンアクリルアミドなどのア
クリルアミド類、例t+fN−ビニルピロール、N−ビ
ニル力ルハソーノペN−ビニルインドール、N−ビニル
ヒロリドンなどのN−ビニル化合物などのビニル系単量
体の不飽和二重結合を開裂せしめた構造で示されるもの
をあげることができる。Vinyl ethers such as β-chloroethyl vinyl ether and cyclohexyl vinyl ether, acrylonitrile, meccrylonitrile, such as acrylamide, N-methylacrylamide, N,N-dimethylacrylamide, N-tert-butylacrylamide, N-octylacrylamide, diacetone acrylamide, etc. Acrylamides, such as N-vinyl compounds such as N-vinylpyrrole, N-vinyl indole, and N-vinylhyrrolidone, have a structure in which the unsaturated double bonds of vinyl monomers are cleaved. I can give what is shown.
その他、特開昭58−203433号公報に開示されて
いるフェノール性水酸基を有する置換スチレン類もあげ
ることができる。In addition, substituted styrenes having a phenolic hydroxyl group as disclosed in JP-A-58-203433 can also be mentioned.
本発明で用いる活性メチレン基を有するポリマーの代表
的な具体例を次に示す。なお下記例示化合物においてX
Nyおよび2は、それぞれの構造単位のモル%を表わす
。Typical specific examples of polymers having active methylene groups used in the present invention are shown below. In addition, in the following exemplified compounds,
Ny and 2 represent the mole % of the respective structural units.
X:y=26:74
X:’1=34:66
X:y=33:67
x:y:z÷24ニア1:5
x:y=72:28
x:y=69:31
Δ11
x:y二80:20
本発明で、上記活性メチレン基を有するポリマーと併用
するポジ型に作用する感光性化合物としては、0−ナフ
トキノンジアジド化合物が好ましく、特公昭43−28
403号公報に記載されている1、2−ジアゾナフトキ
ノンスルホン酸クロライドとピロガロール−アセトン樹
脂とのエステルであるものが最も好ましい。その他の好
適なオルトキノンジアジド化合物としては、米国特許第
3.046,120号および同第3.188.210号
明細書中に記載されている1、2−ジアゾナフトキノン
スルホン酸クロライドとフェノール−ホルムアルデヒド
樹脂とのエステルがある。その他の有用な0−ナフトキ
ノンジアジド化合物としては、数多くの特許に報告され
、知られている。たとえば、特開昭47−5303号、
同町48−63802号、同町48−63803号、同
町48−96575号、同町49−38701号、同町
48−13354号、特公昭41−11222号、同町
45−9610号、同町49−17481号公報、米国
特許第2,797.213号、同第3,454,400
号、同第3.544,323号、同第3,573,91
7号、同第3.674.495号、同第3,785.8
25号、英国特許第1、227.602号、同第1,2
51.345号、同第1.267.005号、同第1.
329.888号、同第1.330,932号、ドイツ
特許第854,890号などの各明細書中に記載されて
いるものをあげることができる。X:y=26:74 X:'1=34:66 X:y=33:67 x:y:z÷24 near 1:5 x:y=72:28 x:y=69:31 Δ11 x: y280:20 In the present invention, as the positive-acting photosensitive compound to be used in combination with the polymer having an active methylene group, an 0-naphthoquinone diazide compound is preferable, and is disclosed in Japanese Patent Publication No. 43-28
Most preferred is the ester of 1,2-diazonaphthoquinonesulfonic acid chloride and pyrogallol-acetone resin described in Japanese Patent No. 403. Other suitable orthoquinone diazide compounds include the 1,2-diazonaphthoquinone sulfonic acid chloride and phenol-formaldehyde resins described in U.S. Pat. Nos. 3,046,120 and 3,188,210. There is an ester with. Other useful 0-naphthoquinone diazide compounds are known and reported in numerous patents. For example, JP-A No. 47-5303,
The same town No. 48-63802, the same town No. 48-63803, the same town No. 48-96575, the same town No. 49-38701, the same town No. 48-13354, the same town No. 41-11222, the same town No. 45-9610, the same town No. 49-17481, U.S. Patent No. 2,797.213, U.S. Patent No. 3,454,400
No. 3,544,323, No. 3,573,91
No. 7, No. 3.674.495, No. 3,785.8
No. 25, British Patent No. 1, 227.602, British Patent No. 1, 2
No. 51.345, No. 1.267.005, No. 1.
Examples include those described in German Patent No. 329.888, German Patent No. 1.330,932, and German Patent No. 854,890.
またO−ナフトキノンジアジド化合物以外にポジ型に作
用する感光性化合物又は感光性混合物として、例えば特
公昭56−2696号の明細書に記載されているオルト
ニトロカルビノールエステル基を有するポリマー化合物
も本発明に使用することができる。In addition to the O-naphthoquinone diazide compound, as a photosensitive compound or photosensitive mixture that acts in a positive manner, for example, a polymer compound having an orthonitrocarbinol ester group described in the specification of Japanese Patent Publication No. 56-2696 may also be used in the present invention. It can be used for.
更に光分解により酸を発生する化合物と、酸により解離
するC−0−C基又はC−0−3i基を有する化合物と
の混合物も本発明に使用することができる。このような
化合物としては、例えば光分解により酸を発生する化合
物と、アセタール又は0、N−アセタール化合物との組
合せ(特開昭48−89003号)、オルトエステル又
はアミドアセクール化合物との組合せく特開昭51−1
20714号)、主鎖にアセタール又はケクール基を有
するポリマーとの組合せく特開昭53−133429号
)、エノールエーテル化合物との組合せ(特開昭55−
12995号)、N−アシルイミノ炭酸化合物との組合
せ(特開昭55−1126236号)、主鎖にオルトエ
ステル基を有するポリマーとの組合せ(特開昭56−1
7345号)、シリルエステル化合物との組合せく特開
昭60−10247号)及びシリルエーテル化合物との
組合せ(特開昭60−37549号、特開昭60−12
1446号)などが挙げられる。Furthermore, a mixture of a compound that generates an acid upon photolysis and a compound having a C-0-C group or a C-0-3i group that dissociates with an acid can also be used in the present invention. Examples of such compounds include, for example, a combination of a compound that generates an acid by photolysis and an acetal or 0,N-acetal compound (JP-A-48-89003), a combination with an orthoester or an amide acecool compound, etc. JP-A-51-1
20714), a combination with a polymer having an acetal or kecoul group in the main chain (JP-A-53-133429), a combination with an enol ether compound (JP-A-55-1986)
12995), a combination with an N-acylimino carbonate compound (JP-A-55-1126236), a combination with a polymer having an orthoester group in the main chain (JP-A-56-1)
7345), combinations with silyl ester compounds (JP-A-60-10247) and combinations with silyl ether compounds (JP-A-60-37549, JP-A-60-12)
No. 1446).
本発明の感光性組成物中、これらのポジ型に作用する感
光性化合物又は感光性混合物の量は10〜50重量%、
好ましくは20〜40重量%である。In the photosensitive composition of the present invention, the amount of these positively acting photosensitive compounds or photosensitive mixtures is 10 to 50% by weight,
Preferably it is 20 to 40% by weight.
本発明の組成物中には、上記ポリマーの他にフェノール
ホルムアルデヒド樹脂、クレゾールホルムアルデヒド樹
脂、フェノール変性キシレン樹脂、ポリヒドロキシスチ
レン、ポリハロゲン化ヒドロキシスチレン等、公知のア
ルカリ可溶性の高分子化合物を含有させることができる
。かかるアルカリ可溶性の高分子化合物は全組成物の7
0重量%以下の添加量で用いられるのがよい。In addition to the above polymers, the composition of the present invention may contain known alkali-soluble polymer compounds such as phenol formaldehyde resin, cresol formaldehyde resin, phenol-modified xylene resin, polyhydroxystyrene, polyhalogenated hydroxystyrene, etc. I can do it. Such an alkali-soluble polymer compound accounts for 7% of the total composition.
It is preferable to use the additive in an amount of 0% by weight or less.
本発明の組成物中には、感度を高めるために環状酸無水
物、露光後直ちに可視像を得るための焼出し剤、画像着
色剤として染料やその他のフィラーなどを加えることが
できる。環状酸無水物としては米国特許第4.115.
128号明細書に記載されているように無水フタル酸、
テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸
、3.6−ニンドオキシーΔ4−テトラヒドロ無水フタ
ル酸、テトラクロル無水フタル酸、無水マレイン酸、ク
ロル無水マレイン酸、α−フェニル無水マレイン酸、無
水コハク酸、ピロメリット酸等がある。これらの環状酸
無水物を全組成物中の1から15重量%含有させること
によって感度を最大3倍程度に高めることができる。露
光後直ちに可視像を得るための焼出し剤としては露光に
よって酸を放出する感光性化合物と塩を形成し得る有機
染料の組合せを代表としてあげることができる。具体的
には特開昭50−36209号公報、特開昭53−81
28号公報に記載されている0−ナフトキノンジアジド
−4−スルホン酸ハロゲニドと塩形成性有機染料の組合
せや特開昭53−36223号公報、゛特開昭54−7
4728号公報に記載されているトリハロメチル化合物
と塩形成性有機染料の組合せをあげることができる。画
像の着色剤として前記の塩形成性有機染料以外に他の染
料も用いることができる。塩形成性有機染料を含めて好
適な染料として油溶性染料および塩基染料をあげること
ができる。具体的には、オイルイエロー#101、オイ
ルイエロー#130、オイルピンク#312、オイルグ
リーンBG、オイルブルーBO3,オイルブルー#60
3、オイルブラックBY、オイルブラックBS、オイル
ブラックT−505(以上、オリエント化学工業株式会
社製)、クリスタルバイオレット(CI42555)、
メチルバイオレット(CI42535)、ローダミンB
(CI4517QB)、マラカイトグリーン(CI42
000)、メチレンブルー(CI52015)などをあ
げることができる。The composition of the present invention may contain a cyclic acid anhydride to increase sensitivity, a printout agent to obtain a visible image immediately after exposure, a dye as an image coloring agent, and other fillers. As a cyclic acid anhydride, US Pat. No. 4.115.
128, phthalic anhydride,
Tetrahydrophthalic anhydride, hexahydrophthalic anhydride, 3.6-nindooxy-Δ4-tetrahydrophthalic anhydride, tetrachlorophthalic anhydride, maleic anhydride, chloromaleic anhydride, α-phenylmaleic anhydride, succinic anhydride, pyromellitic acid etc. By containing these cyclic acid anhydrides in an amount of 1 to 15% by weight based on the total composition, the sensitivity can be increased up to about 3 times. Typical print-out agents for obtaining a visible image immediately after exposure include a combination of a photosensitive compound that releases an acid upon exposure and an organic dye that can form a salt. Specifically, JP-A-50-36209, JP-A-53-81
The combination of 0-naphthoquinonediazide-4-sulfonic acid halide and salt-forming organic dye described in JP-A No. 28, JP-A-53-36223, and JP-A-54-7
Examples include the combination of a trihalomethyl compound and a salt-forming organic dye described in Japanese Patent No. 4728. In addition to the above-mentioned salt-forming organic dyes, other dyes can also be used as image coloring agents. Suitable dyes include oil-soluble dyes and basic dyes, including salt-forming organic dyes. Specifically, oil yellow #101, oil yellow #130, oil pink #312, oil green BG, oil blue BO3, oil blue #60.
3. Oil Black BY, Oil Black BS, Oil Black T-505 (manufactured by Orient Chemical Industry Co., Ltd.), Crystal Violet (CI42555),
Methyl violet (CI42535), rhodamine B
(CI4517QB), malachite green (CI42
000), methylene blue (CI52015), etc.
本発明の組成物は、上記各成分を溶解する溶媒に溶かし
て支持体上に塗布する。ここで使用する溶媒としては、
エチレンジクロライド、シクロヘキサノン、メチルエチ
ルケトン、エチレングリコールモノメチルエーテル、プ
ロピレングリコールモノメチルエーテル、エチレングリ
コールモノエチルエーテル、2−メトキシエチルアセテ
ート、プロピレングリコールモノメチルエーテルアセテ
ート、ジエチレングリコールモノメチルエーテルアセテ
ート、トルエン、酢酸エチルなどがあり、これらの溶媒
を単独あるいは混合して使用する。The composition of the present invention is applied onto a support after being dissolved in a solvent that dissolves each of the above components. The solvent used here is
These include ethylene dichloride, cyclohexanone, methyl ethyl ketone, ethylene glycol monomethyl ether, propylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl acetate, propylene glycol monomethyl ether acetate, diethylene glycol monomethyl ether acetate, toluene, and ethyl acetate. Solvents may be used alone or in combination.
そして、上記成分中の濃度(固形分)は、2〜50重量
%である。また、塗布量は用途により異なるが、例えば
感光性平版印刷版についていえば一般的に固形分として
0.5〜3.0g/rn’が好ましい。塗布量が少(な
るにつれ感光性は大になるが、感光膜の物性は低下する
。The concentration (solid content) of the above components is 2 to 50% by weight. Further, although the coating amount varies depending on the application, for example, for photosensitive planographic printing plates, it is generally preferable that the solid content is 0.5 to 3.0 g/rn'. As the coating amount decreases, the photosensitivity increases, but the physical properties of the photosensitive film deteriorate.
本発明の感光性組成物を用いて平版印刷版を製造する場
合、その支持体としては、親水化処理したアルミニウム
板、たとえばシリケート処理アルミニウム板、陽極酸化
アルミニウム板、砂目立てしたアルミニウム板、シリケ
ート電着したアルミニウム板があり、その低亜鉛板、ス
テンレス板、クローム処理鋼板、親水化処理したプラス
チックフィルムや紙を上げることができる。When producing a lithographic printing plate using the photosensitive composition of the present invention, the support may be a hydrophilized aluminum plate, such as a silicate-treated aluminum plate, an anodized aluminum plate, a grained aluminum plate, or a silicate plate. There are coated aluminum plates, low zinc plates, stainless steel plates, chrome-treated steel plates, hydrophilized plastic films and paper.
本発明の感光性組成物にたいする現像液としては、珪酸
ナトリウム、珪酸カリウム、水酸化ナトリウム、水酸化
カリウム、水酸化リチウム、第三リン酸ナトリウム、第
ニリン酸ナトリウム、第三リン酸アンモニウム、第ニリ
ン酸アンモニウム、メタ珪酸ナトリウム、重炭酸ナトリ
ウム、アンモニア水などのような無機アルカリ剤の水溶
液が適当であり、それらの濃度が0.1〜10重量%、
好ましくは0.5〜5重量%になるように添加される。Examples of developing solutions for the photosensitive composition of the present invention include sodium silicate, potassium silicate, sodium hydroxide, potassium hydroxide, lithium hydroxide, tribasic sodium phosphate, dibasic sodium phosphate, tribasic ammonium phosphate, diphosphoric acid, Aqueous solutions of inorganic alkaline agents such as ammonium acid, sodium metasilicate, sodium bicarbonate, aqueous ammonia, etc. are suitable, and their concentration is 0.1 to 10% by weight,
It is preferably added in an amount of 0.5 to 5% by weight.
また、該アルカリ性水溶液には、必要に応じ界面活性剤
やアルコールなどのような有機溶媒を加えることもでき
る。Moreover, a surfactant and an organic solvent such as alcohol can be added to the alkaline aqueous solution as required.
本発明により活性メチレン基を有するポリマーとポジ型
に作用する感光性化合物及び/又は感光性組成物を組合
せると、基板に対する密着性が良く、耐摩耗性が優れる
上に適正な現像条件の範囲が広い(現像許容性が広い)
感光性組成物を得ることができる。According to the present invention, when a polymer having an active methylene group is combined with a photosensitive compound and/or a photosensitive composition that acts positively, good adhesion to the substrate, excellent abrasion resistance, and a suitable range of developing conditions can be obtained. (wide development tolerance)
A photosensitive composition can be obtained.
つぎに、実施例をあげて本発明をさらに詳細に説明する
。なお、下記実施例におけるパーセントは、他に指定の
ない限り、すべて重量%である。Next, the present invention will be explained in more detail by giving Examples. All percentages in the examples below are by weight unless otherwise specified.
本文中に示した活性メチレン基を有するポリマーΔ1、
A3及びA6の合成例を次に示す。Polymer Δ1 having active methylene groups as shown in the text,
Synthesis examples of A3 and A6 are shown below.
合成例1(例示化合物A1の合成)
モノマーの合成
ジケテン120g、酢酸エチル150mβをフラスコ中
に入れ氷冷し、これにヒドロキシエチルメタクリレ−)
130g、)リエチルアミン1.4ml、ヒドロキノン
2.0g、酢酸エチル50mβの混合物を約15分かけ
て滴下したのち、徐々に加熱して75〜80℃で1時間
反応させた。反応物を300mβの水で3回洗浄したの
ち、硫酸マグネシウムで乾燥した。ロータリーエバポレ
ーク−で溶媒を留去したのち、減圧蒸留により精製し、
(沸点70〜75℃/ 0.5 mmHg )アセトア
セトキシエチルメタクリレート(以下AAEMAと略す
)85、6 gを得た(収率40%)。Synthesis Example 1 (Synthesis of Exemplary Compound A1) Synthesis of Monomers 120 g of diketene and 150 mβ of ethyl acetate were placed in a flask and cooled on ice, and hydroxyethyl methacrylate (methacrylate) was added to the flask.
A mixture of 1.4 ml of ethylamine, 2.0 g of hydroquinone, and 50 mβ of ethyl acetate was added dropwise over about 15 minutes, and the mixture was gradually heated and reacted at 75 to 80° C. for 1 hour. The reaction product was washed three times with 300 mβ water and then dried over magnesium sulfate. After removing the solvent using a rotary evaporation lake, the product is purified by vacuum distillation.
(Boiling point: 70-75°C/0.5 mmHg) 85.6 g of acetoacetoxyethyl methacrylate (hereinafter abbreviated as AAEMA) was obtained (yield: 40%).
重合
AAEMA 16.07 g (0,075モル)、メ
チルエチルケトン30.5 gを入れたフラスコ中に、
60℃で、重合開始剤V−65〔2,2’−アゾビス−
(2,4−ジメチルワレロニトリル)、和光純薬製)
0.100 gを加えて攪拌した。2時間後、さらにV
−650,100gを加え、計4時間攪拌したのち、内
容物をn−へキサン1.5β中に注ぎ、生成した固体を
ろ別した。減圧乾燥し、例示化合物A1のポリマー13
.7 gを得た(収率85%、重量平均分子量42,0
00)。In a flask containing 16.07 g (0,075 mol) of polymerized AAEMA and 30.5 g of methyl ethyl ketone,
At 60°C, polymerization initiator V-65 [2,2'-azobis-
(2,4-dimethylvaleronitrile), manufactured by Wako Pure Chemical Industries)
0.100 g was added and stirred. After 2 hours, more V
After adding -650,100 g and stirring for a total of 4 hours, the contents were poured into 1.5β n-hexane, and the produced solid was filtered out. Polymer 13 of Exemplary Compound A1 was dried under reduced pressure.
.. 7 g (yield 85%, weight average molecular weight 42.0
00).
合成例2(例示化合物A3の合成)
重合
合成例1で得たAAEMA21.4gとエチルアクリレ
−) 5.0 gをメチルエチルケトン77m1中に溶
解し、合成例1と同様に■−65を0.14gずつ2回
にわけて加え60℃で計4時間攪拌して反応させた。次
に、合成例1と同様の後処理により例示化合物A3のポ
リマー17yOgを得た(収率86%;重量平均分子量
21,000)。Synthesis Example 2 (Synthesis of Exemplified Compound A3) 21.4 g of AAEMA obtained in Polymerization Synthesis Example 1 and 5.0 g of ethyl acrylate were dissolved in 77 ml of methyl ethyl ketone, and 0.14 g of ■-65 was added in the same manner as in Synthesis Example 1. The mixture was added in two portions and stirred at 60° C. for a total of 4 hours to react. Next, the same post-treatment as in Synthesis Example 1 was carried out to obtain 17yOg of a polymer of Exemplary Compound A3 (yield: 86%; weight average molecular weight: 21,000).
合成例3(例示化合物へ6の合成)
モノマーの合成
スチレンスルフィン酸カリウム41.6 g(0,20
モル)、N、N−ジメチルホルムアミド200mj2を
入れた三日フラスコ中に、モノクロルアセトニトリル1
8.9g(0,25モル)を内温か30〜40℃となる
ように40分間かけて滴下した。引き続き室温で3時間
攪拌したのち、スルホン酸ナトリウム20gをとかした
氷水400mf中に注いだ。INHCβを加えてpH1
〜3に調整し、析出した固体をろ別した。この固体をエ
タノール500m1に加熱して溶解し、活性炭を加えて
攪拌したのち、活性炭をろ過により除去した。ろ液を濃
縮し、目的物のモノマー 4(シアノメチルスルフィニ
ル)−スチレン10.8 gt−f8だ(収率26%)
。Synthesis Example 3 (Synthesis of 6 to Exemplary Compound) Monomer Synthesis Potassium styrene sulfinate 41.6 g (0,20
In a three-day flask containing 200 mj2 of N,N-dimethylformamide, 1 mol of monochloroacetonitrile was added.
8.9 g (0.25 mol) was added dropwise over 40 minutes so that the internal temperature was 30 to 40°C. After stirring for 3 hours at room temperature, 20 g of sodium sulfonate was poured into 400 mf of ice water. Add INHCβ to pH 1
The precipitated solid was filtered out. This solid was heated and dissolved in 500 ml of ethanol, activated carbon was added and stirred, and then the activated carbon was removed by filtration. Concentrate the filtrate to obtain the target monomer 4(cyanomethylsulfinyl)-styrene 10.8 gt-f8 (yield 26%)
.
重合
4−(シアノメチルスルフィニル)−スチレン20.7
3g(0,1モル)、酢酸エチル69.1 gを入れた
合成例1と同様なフラスコ中で■−65を同様な方法に
より、0.14 gずつ2回加え計4時間攪拌し合成例
1と同様の後処理を行ない例示化合物A6のポリマー1
7.0 gを得た(収率82%;重量平均分子量23,
000)。Polymerized 4-(cyanomethylsulfinyl)-styrene 20.7
In a flask similar to Synthesis Example 1 containing 3 g (0.1 mol) and 69.1 g of ethyl acetate, 0.14 g of ■-65 was added twice in the same manner as in Synthesis Example 1, and stirred for a total of 4 hours. Polymer 1 of Exemplary Compound A6 was subjected to the same post-treatment as in 1.
7.0 g was obtained (yield 82%; weight average molecular weight 23,
000).
尚、A2、A5、A7及びA8のポリマーは合成例1に
準じて行った。Note that polymers A2, A5, A7, and A8 were prepared according to Synthesis Example 1.
実施例1
厚さ0.30のアルミニウム板をナイロングラシト40
0メツシユのパミストンの水懸濁液を用いその表面を砂
目室てした後、よく水で洗浄した。Example 1 An aluminum plate with a thickness of 0.30 was coated with nylon graphite 40
The surface was gritted using a water suspension of 0 mesh pumice stone, and then thoroughly washed with water.
10%水酸化す) IJウムに70℃で60秒間浸漬し
てエツチングした後、流水で水洗後20%HNO3で中
和洗浄、水洗した。これをV、=12.7Vの条件下で
正弦波の交番波形電流を用いて1%硝酸水溶液中で16
0ク一ロン/dm2の陽極特電気量で電解粗面化処理を
行った。その表面粗さを測定したところ、0.6μ(R
a表示)であった。ひきつづいて30%のH2SO4水
溶液中に浸漬し55℃で2分間デスマットした後、20
%H2SO4水溶液中、電流密度2A/dm2において
厚さが2.7 g /ゴになるように陽極酸化した。After etching by immersing in IJum (10% hydroxide) at 70° C. for 60 seconds, washing with running water, neutralizing with 20% HNO3, and washing with water. This was conducted in a 1% nitric acid aqueous solution using a sinusoidal alternating waveform current under the condition of V = 12.7V.
Electrolytic surface roughening treatment was performed using an anode special electricity amount of 0 coron/dm2. When the surface roughness was measured, it was found to be 0.6μ (R
a). Subsequently, it was immersed in a 30% H2SO4 aqueous solution and desmutted at 55°C for 2 minutes.
% H2SO4 aqueous solution at a current density of 2 A/dm2 to a thickness of 2.7 g/g.
このようにして得られたアルミニウム支持体上に次の感
光液をホワイラーを用いて塗布し、100℃で2分間乾
燥させた。The following photosensitive solution was applied onto the thus obtained aluminum support using a whiler and dried at 100° C. for 2 minutes.
ナフトキノン−(1,2)−ジ
アジド−(2)−5−スルホニル
クロリドとクレゾールノボラ
ツタ樹脂のエステル化反応生
成物 0.75 gm−タレ
ゾールノボラック樹脂 1.40 gテトラヒドロ無
水フタル酸 0.15 g第1表に記載のポリマ
ー 0.70 g2−(p−ブトキシフェニル
)
−4,6−ビス(トリクロル
メチル)−S−トリアジン 0.02 gナフトキ
ノン−1,2−ジアジ
ビー4−スルりン酸クロライ
ド
0.03gクリスタルバイオレット
0.01 gオイルブルー#603 0
.015g(オリエント化学工業株式
%式%
乾燥後の塗布量は2.1g/m’であった。これらの感
光性平版印刷版をそれぞれ2KWのメタルノ1ライドラ
ンプで1mの距離よりポジ透明原画を通して40秒間露
光した。露光した感光性平版印刷版を4%メタケイ酸ナ
トリウム水溶液に1分間浸漬して現像しその後は常法に
従って処理して、平版印刷版を得た。こうして得られた
平版印刷版をオフセット印刷機にかけて印刷し耐剛性の
テストを行なった。耐刷性の劣るものは少ない枚数で画
像部が摩耗してインキが付着しなくなり、正常な印刷物
が得られなくなる。Esterification reaction product of naphthoquinone-(1,2)-diazide-(2)-5-sulfonyl chloride and cresol novolac ivy resin 0.75 gm- Talesol novolac resin 1.40 g Tetrahydrophthalic anhydride 0.15 g Polymers listed in Table 1 0.70 g 2-(p-butoxyphenyl)-4,6-bis(trichloromethyl)-S-triazine 0.02 g Naphthoquinone-1,2-diazibi-4-sulphosphoric acid chloride
0.03g crystal violet
0.01 g Oil Blue #603 0
.. 015 g (Orient Kagaku Kogyo Co., Ltd. % formula %) The coating weight after drying was 2.1 g/m'. The exposed photosensitive lithographic printing plate was immersed in a 4% sodium metasilicate aqueous solution for 1 minute to develop it, and then treated according to a conventional method to obtain a lithographic printing plate.The lithographic printing plate thus obtained was We tested the rigidity by printing on an offset printing machine.If the printing durability is poor, the image area will wear out after a small number of sheets, and the ink will no longer adhere to it, making it impossible to obtain a normal printed product.
また適正現像条件の範囲の広さく現像許容性)を調べる
ため、前記の現像液に5分間浸漬して現像して1分間浸
漬して現像した場合との調子再現性の変化を調べた。は
とんど変化がなかったものを○、大きく変化したものを
×、その中間をΔで表示した。また感光性組成物の基板
に対する密着性や、柔軟性を調べるために、露光後画像
部にダイヤモンド針で一定荷重をかけてキズをつけ、現
像後印刷してキズのつき易さを調べた。キズがつきにく
いものを○、きわめてつき易いものを×1その中間を△
で表示した。これらの結果を第1表に示すが、第1表か
らあきらかなように本発明の感光性組成物は、きわめて
すぐれた性能を有することがわかる。In addition, in order to investigate the wide range of appropriate development conditions (development acceptability), changes in tone reproducibility were investigated when developing by immersing in the developer for 5 minutes and developing by immersing for 1 minute. ○ indicates that there was almost no change, × indicates that there was a large change, and ∆ indicates that there is a significant change. In addition, in order to examine the adhesion and flexibility of the photosensitive composition to the substrate, the image area was scratched after exposure by applying a constant load with a diamond needle, and after development, the composition was printed and the ease of scratching was examined. ○ for items that are hard to get scratched, 1 for items that are extremely easy to get scratched, △ for those in between.
It was displayed in These results are shown in Table 1, and it is clear from Table 1 that the photosensitive composition of the present invention has extremely excellent performance.
実施例2
実施例1と同様にして作製した支持体上に、次の感光液
をホヮイラーを用いて塗布し、100℃で2分間乾燥さ
せた。Example 2 The following photosensitive solution was applied onto a support prepared in the same manner as in Example 1 using a wheeler, and dried at 100° C. for 2 minutes.
ナフトキノン(1,2)−ジアジド
−(2)−5−スルホニルクロリドと
ピロガロール−アセトン樹脂との
エステル化物 0.90 g(米国
特許第3.635.709号明
細書実施例1に記載されているも
の)
例示化合物Nα1 第2表に記載クレゾ
ールノボラック樹脂(m−ク
レゾール、p−クレゾールの比
5対5 ) 2.1 gから第2表の例
示化合物A1の添
前置を引いた量
2−トリクロロメチル−5−(4
−ヒドロキシスチリル)−1゜
3.4−オキサジアゾール 0.04 g無水フ
タル酸 0.20 g油溶性染料
(CI42595) 0.03gエチレンジクロ
ライド 15gメチルセロソルブ
8g乾燥後の塗布量は2.5g/m’
であった。これらの感光性平版印刷版を実施例1と同様
な方法で評価した結果を第2表に示すが、第2表から、
本発明の感光性組成物が優れた性能を有することがわか
る。Esterified product of naphthoquinone (1,2)-diazide-(2)-5-sulfonyl chloride and pyrogallol-acetone resin 0.90 g (described in Example 1 of U.S. Pat. No. 3,635,709) Exemplary compound Nα1 Cresol novolak resin (ratio of m-cresol, p-cresol 5:5) listed in Table 2 2.1 g minus the addition prefix of Exemplary compound A1 in Table 2 2-trichloro Methyl-5-(4-hydroxystyryl)-1゜3.4-oxadiazole 0.04 g Phthalic anhydride 0.20 g Oil-soluble dye (CI42595) 0.03 g Ethylene dichloride 15 g Methyl cellosolve
8g coating amount after drying is 2.5g/m'
Met. Table 2 shows the results of evaluating these photosensitive lithographic printing plates in the same manner as in Example 1.
It can be seen that the photosensitive composition of the present invention has excellent performance.
手続補正書
特許庁長官 黒 1)明 雄 殿 「■l、事件の
表示 昭和61年特許願第274432号2、発明
の名称 感光性組成物
3、補正をする者
事件との関係 出頼人
名 称 (520)富士写真フィルム株式会社4、代
理人Procedural amendment Commissioner of the Patent Office Black 1) Mr. Akihiro "■l, Indication of the case 1985 Patent Application No. 274432 2, Title of the invention Photosensitive composition 3, Person making the amendment Relationship with the case Name of originator (520) Fuji Photo Film Co., Ltd. 4, Agent
Claims (4)
する感光性化合物又は感光性混合物とを含有することを
特徴とする感光性組成物。(1) A photosensitive composition comprising a polymer having an active methylene group and a positively acting photosensitive compound or a photosensitive mixture.
〜11の活性メチレン基を分子構造中に有し、かつ水不
溶、アルカリ水可溶のポリマーである特許請求の範囲第
(1)項記載の感光性組成物。(2) The polymer having an active methylene group has a PKa;
The photosensitive composition according to claim 1, which is a water-insoluble but alkaline water-soluble polymer having from 11 to 11 active methylene groups in its molecular structure.
基、スルホニル基から選ばれた少くとも1つ以上の基と
直接結合した活性メチレン基を分子構造中に有し、かつ
水不溶、アルカリ水可溶のポリマーである特許請求の範
囲第(1)項記載の感光性組成物。(3) The polymer having an active methylene group has an active methylene group directly bonded to at least one group selected from a carbonyl group and a sulfonyl group in its molecular structure, and is water-insoluble and alkaline water-soluble. The photosensitive composition according to claim 1, which is a polymer of
〔 I 〕または〔II〕で示される構造単位を分子構造中
に有する水不溶、アルカリ水可溶のポリマーである特許
請求の範囲第(1)項記載の感光性組成物。 ▲数式、化学式、表等があります▼・・・・・( I ) (式中、Aは水素原子、塩素原子または炭素数1ないし
4のアルキル基を表わし、 Bは▲数式、化学式、表等があります▼、▲数式、化学
式、表等があります▼、▲数式、化学式、表等がありま
す▼、▲数式、化学式、表等があります▼、▲数式、化
学式、表等があります▼、−NH−、フェニレン基、置
換フェニレン基を表わし、 Xは▲数式、化学式、表等があります▼、▲数式、化学
式、表等があります▼、▲数式、化学式、表等がありま
す▼、▲数式、化学式、表等があります▼、 Yは▲数式、化学式、表等があります▼、▲数式、化学
式、表等があります▼、▲数式、化学式、表等がありま
す▼、▲数式、化学式、表等があります▼、−CN、−
NO_2、−R_3、を表わす。又、 m、nは0または1を表わすが、同時に0になることは
ない。 R_1は、アルキレン基、フェニレン基、置換アルキレ
ン基、置換フェニレン基を表わし、XとYにはさまれた
CH_2は、XまたはBのカルボニル基またはスルホニ
ル基と直接結合している。 R_2はアルキル基、アルケニル基、アリール基および
置換アルキル基、置換アルケニル基、置換アリール基を
表わし、R_3は、ハロゲン原子で水素の一部または全
部が置換されたアルキル基を表わす。) ▲数式、化学式、表等があります▼・・・・(II) (式中、Dは水素原子、塩素原子または炭素数1ないし
4個のアルキル基を表わし、Eは、−COO−、−CO
NR_4−または置換もしくは無置換のフェニル基を表
わし、Fは置換もしくは無置換のアルキレン基、フェニ
レン基またはアラルキレン基を表わし、Gは−CONR
_4−、−NR_4CONR_4−、−NR_4COO
−、−NR_4CO−、−OCONR_4−、−NR_
4−、−COO−、−OCO−、−CO−、−O−、−
SO_2−、−NR_4SO_2−または−SO_2N
R_4−を表わす。R_4は水素原子または置換もしく
は無置換のアルキル基またはアリール基を表わす。R_
4が同一分子中に2個以上ある時は同じでも異なってい
ても良い。 l、m、nは0または1を表わす。ただし、l、m、n
が同時に0であることはない。Qは式(III)で表わさ
れ、 ▲数式、化学式、表等があります▼・・・・・・・(I
II) R_5は無置換または置換アニリノ基、アシルアミノ基
、ウレイド基を表わし、R_6は、置換または無置換の
アルキル基、アリール基または複素環基を表わし、R_
5、R_6のいずれかの部分で前記一般式〔II〕のGに
連結する。)(4) The polymer having an active methylene group is a water-insoluble, alkaline water-soluble polymer having a structural unit represented by the following general formula [I] or [II] in its molecular structure. ) The photosensitive composition described in item 1. ▲There are mathematical formulas, chemical formulas, tables, etc.▼・・・・・・(I) (In the formula, A represents a hydrogen atom, a chlorine atom, or an alkyl group having 1 to 4 carbon atoms, and B is a ▲mathematical formula, chemical formula, table, etc. There are ▼, ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼, ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼, ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼, ▲ There are mathematical formulas, chemical formulas, tables, etc. ▼, -NH -, represents a phenylene group, a substituted phenylene group, , there are tables, etc. ▼, Y is ▲ there are mathematical formulas, chemical formulas, tables, etc. ▼, ▲ there are mathematical formulas, chemical formulas, tables, etc. ▼, ▲ there are mathematical formulas, chemical formulas, tables, etc. ▼, ▲ there are mathematical formulas, chemical formulas, tables, etc. Yes ▼, -CN, -
It represents NO_2, -R_3. Also, m and n represent 0 or 1, but they cannot be 0 at the same time. R_1 represents an alkylene group, a phenylene group, a substituted alkylene group, or a substituted phenylene group, and CH_2 sandwiched between X and Y is directly bonded to the carbonyl group or sulfonyl group of X or B. R_2 represents an alkyl group, an alkenyl group, an aryl group, a substituted alkyl group, a substituted alkenyl group, or a substituted aryl group, and R_3 represents an alkyl group in which part or all of the hydrogen atoms are substituted with a halogen atom. ) ▲There are mathematical formulas, chemical formulas, tables, etc.▼...(II) (In the formula, D represents a hydrogen atom, a chlorine atom, or an alkyl group having 1 to 4 carbon atoms, and E represents -COO-, - C.O.
NR_4- or a substituted or unsubstituted phenyl group, F represents a substituted or unsubstituted alkylene group, phenylene group or aralkylene group, G is -CONR
_4-, -NR_4CONR_4-, -NR_4COO
-, -NR_4CO-, -OCONR_4-, -NR_
4-, -COO-, -OCO-, -CO-, -O-, -
SO_2-, -NR_4SO_2- or -SO_2N
Represents R_4-. R_4 represents a hydrogen atom or a substituted or unsubstituted alkyl group or aryl group. R_
When there are two or more 4's in the same molecule, they may be the same or different. l, m, n represent 0 or 1. However, l, m, n
are never 0 at the same time. Q is expressed by formula (III), and there are ▲mathematical formulas, chemical formulas, tables, etc.▼・・・・・・・・・(I
II) R_5 represents an unsubstituted or substituted anilino group, acylamino group, or ureido group; R_6 represents a substituted or unsubstituted alkyl group, aryl group, or heterocyclic group;
5. Any part of R_6 is connected to G in the general formula [II]. )
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61274432A JPH0654382B2 (en) | 1986-11-18 | 1986-11-18 | Photosensitive composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61274432A JPH0654382B2 (en) | 1986-11-18 | 1986-11-18 | Photosensitive composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63127237A true JPS63127237A (en) | 1988-05-31 |
JPH0654382B2 JPH0654382B2 (en) | 1994-07-20 |
Family
ID=17541595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61274432A Expired - Fee Related JPH0654382B2 (en) | 1986-11-18 | 1986-11-18 | Photosensitive composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0654382B2 (en) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63311247A (en) * | 1987-06-12 | 1988-12-20 | Konica Corp | Photosensitive composition |
JPS6435433A (en) * | 1987-07-01 | 1989-02-06 | Basf Ag | Radiation sensitive mixture for photosensitive layer forming material |
JPH01250945A (en) * | 1988-03-30 | 1989-10-05 | Sumitomo Chem Co Ltd | Positive type resist composition |
JPH0239154A (en) * | 1988-07-29 | 1990-02-08 | Fuji Photo Film Co Ltd | Photosensitive planographic printing plate |
JPH02156241A (en) * | 1988-12-08 | 1990-06-15 | Fuji Photo Film Co Ltd | Photosensitive composition |
JPH02167550A (en) * | 1988-12-21 | 1990-06-27 | Fuji Photo Film Co Ltd | Photosensitive composition |
JPH02213847A (en) * | 1989-02-15 | 1990-08-24 | Fuji Photo Film Co Ltd | Photosensitive composition |
EP0410606A2 (en) | 1989-07-12 | 1991-01-30 | Fuji Photo Film Co., Ltd. | Siloxane polymers and positive working light-sensitive compositions comprising the same |
JPH05150453A (en) * | 1991-11-27 | 1993-06-18 | Fuji Photo Film Co Ltd | Photosensitive composition |
EP0671661A2 (en) * | 1994-03-08 | 1995-09-13 | Fuji Photo Film Co., Ltd. | Photosensitive lithographic printing plate |
US6444395B1 (en) | 1999-03-12 | 2002-09-03 | Matsushita Electric Industrial Co., Ltd. | Pattern formation material and method |
US6808857B2 (en) | 2001-05-21 | 2004-10-26 | Kodak Polychrome Graphics Llc | Negative-working photosensitive composition and negative-working photosensitive lithographic printing plate |
JP2006045540A (en) * | 2004-07-02 | 2006-02-16 | Sumitomo Chemical Co Ltd | Copolymer |
JP2006048021A (en) * | 2004-07-02 | 2006-02-16 | Sumitomo Chemical Co Ltd | Radiation sensitive resin composition |
EP2365389A1 (en) | 2010-03-08 | 2011-09-14 | Fujifilm Corporation | Positive-working lithographic printing plate precursor for infrared laser and process for making lithographic printing plate |
EP2527379A1 (en) | 2011-05-27 | 2012-11-28 | Rohm and Haas Electronic Materials LLC | Polymer and photoresist comprising the polymer |
US8609318B2 (en) * | 2010-08-05 | 2013-12-17 | Jsr Corporation | Radiation-sensitive resin composition, method for forming resist pattern and polymer |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53133429A (en) * | 1977-04-25 | 1978-11-21 | Hoechst Ag | Radiation sensitive copying conposite and method of forming relief |
JPS60133440A (en) * | 1983-12-22 | 1985-07-16 | Sanyo Kokusaku Pulp Co Ltd | Image forming material and image forming method |
JPS61217034A (en) * | 1985-03-22 | 1986-09-26 | Fuji Photo Film Co Ltd | Photosensitive composition and photosensitive material |
-
1986
- 1986-11-18 JP JP61274432A patent/JPH0654382B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53133429A (en) * | 1977-04-25 | 1978-11-21 | Hoechst Ag | Radiation sensitive copying conposite and method of forming relief |
JPS60133440A (en) * | 1983-12-22 | 1985-07-16 | Sanyo Kokusaku Pulp Co Ltd | Image forming material and image forming method |
JPS61217034A (en) * | 1985-03-22 | 1986-09-26 | Fuji Photo Film Co Ltd | Photosensitive composition and photosensitive material |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63311247A (en) * | 1987-06-12 | 1988-12-20 | Konica Corp | Photosensitive composition |
JPS6435433A (en) * | 1987-07-01 | 1989-02-06 | Basf Ag | Radiation sensitive mixture for photosensitive layer forming material |
JPH01250945A (en) * | 1988-03-30 | 1989-10-05 | Sumitomo Chem Co Ltd | Positive type resist composition |
JPH0239154A (en) * | 1988-07-29 | 1990-02-08 | Fuji Photo Film Co Ltd | Photosensitive planographic printing plate |
JPH02156241A (en) * | 1988-12-08 | 1990-06-15 | Fuji Photo Film Co Ltd | Photosensitive composition |
JPH02167550A (en) * | 1988-12-21 | 1990-06-27 | Fuji Photo Film Co Ltd | Photosensitive composition |
JPH02213847A (en) * | 1989-02-15 | 1990-08-24 | Fuji Photo Film Co Ltd | Photosensitive composition |
EP0410606A2 (en) | 1989-07-12 | 1991-01-30 | Fuji Photo Film Co., Ltd. | Siloxane polymers and positive working light-sensitive compositions comprising the same |
JPH05150453A (en) * | 1991-11-27 | 1993-06-18 | Fuji Photo Film Co Ltd | Photosensitive composition |
EP0671661A2 (en) * | 1994-03-08 | 1995-09-13 | Fuji Photo Film Co., Ltd. | Photosensitive lithographic printing plate |
US5582952A (en) * | 1994-03-08 | 1996-12-10 | Fuji Photo Film Co., Ltd. | Photosensitive lithographic printing plate containing a two-equivalent coupler residue-containing polymer |
US6444395B1 (en) | 1999-03-12 | 2002-09-03 | Matsushita Electric Industrial Co., Ltd. | Pattern formation material and method |
US6808857B2 (en) | 2001-05-21 | 2004-10-26 | Kodak Polychrome Graphics Llc | Negative-working photosensitive composition and negative-working photosensitive lithographic printing plate |
JP2006045540A (en) * | 2004-07-02 | 2006-02-16 | Sumitomo Chemical Co Ltd | Copolymer |
JP2006048021A (en) * | 2004-07-02 | 2006-02-16 | Sumitomo Chemical Co Ltd | Radiation sensitive resin composition |
EP2365389A1 (en) | 2010-03-08 | 2011-09-14 | Fujifilm Corporation | Positive-working lithographic printing plate precursor for infrared laser and process for making lithographic printing plate |
US8609318B2 (en) * | 2010-08-05 | 2013-12-17 | Jsr Corporation | Radiation-sensitive resin composition, method for forming resist pattern and polymer |
EP2527379A1 (en) | 2011-05-27 | 2012-11-28 | Rohm and Haas Electronic Materials LLC | Polymer and photoresist comprising the polymer |
US8603728B2 (en) | 2011-05-27 | 2013-12-10 | Rohm And Haas Electronic Materials Llc | Polymer composition and photoresist comprising the polymer |
Also Published As
Publication number | Publication date |
---|---|
JPH0654382B2 (en) | 1994-07-20 |
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