JPS63127132U - - Google Patents
Info
- Publication number
- JPS63127132U JPS63127132U JP1959187U JP1959187U JPS63127132U JP S63127132 U JPS63127132 U JP S63127132U JP 1959187 U JP1959187 U JP 1959187U JP 1959187 U JP1959187 U JP 1959187U JP S63127132 U JPS63127132 U JP S63127132U
- Authority
- JP
- Japan
- Prior art keywords
- movable table
- probe
- probe card
- semiconductor
- located above
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000005498 polishing Methods 0.000 claims 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1959187U JPS63127132U (da) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1959187U JPS63127132U (da) | 1987-02-12 | 1987-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127132U true JPS63127132U (da) | 1988-08-19 |
Family
ID=30814325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1959187U Pending JPS63127132U (da) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127132U (da) |
-
1987
- 1987-02-12 JP JP1959187U patent/JPS63127132U/ja active Pending