JPS63126856U - - Google Patents
Info
- Publication number
- JPS63126856U JPS63126856U JP1715887U JP1715887U JPS63126856U JP S63126856 U JPS63126856 U JP S63126856U JP 1715887 U JP1715887 U JP 1715887U JP 1715887 U JP1715887 U JP 1715887U JP S63126856 U JPS63126856 U JP S63126856U
- Authority
- JP
- Japan
- Prior art keywords
- reflection
- substrate
- observation
- holding mechanism
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1715887U JPH0531563Y2 (enExample) | 1987-02-10 | 1987-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1715887U JPH0531563Y2 (enExample) | 1987-02-10 | 1987-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63126856U true JPS63126856U (enExample) | 1988-08-18 |
| JPH0531563Y2 JPH0531563Y2 (enExample) | 1993-08-13 |
Family
ID=30809663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1715887U Expired - Lifetime JPH0531563Y2 (enExample) | 1987-02-10 | 1987-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0531563Y2 (enExample) |
-
1987
- 1987-02-10 JP JP1715887U patent/JPH0531563Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0531563Y2 (enExample) | 1993-08-13 |
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