JPS63125668A - Ｔａ−Ｗ系非晶質合金薄膜の製造方法 - Google Patents

Ｔａ−Ｗ系非晶質合金薄膜の製造方法

Info

Publication number
JPS63125668A
JPS63125668A JP27018486A JP27018486A JPS63125668A JP S63125668 A JPS63125668 A JP S63125668A JP 27018486 A JP27018486 A JP 27018486A JP 27018486 A JP27018486 A JP 27018486A JP S63125668 A JPS63125668 A JP S63125668A
Authority
JP
Japan
Prior art keywords
alloy
substrate
amorphous
thin film
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27018486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582466B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Yoshitake
務 吉武
Yoshimi Kubo
佳実 久保
Hitoshi Igarashi
五十嵐　等
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP27018486A priority Critical patent/JPS63125668A/ja
Publication of JPS63125668A publication Critical patent/JPS63125668A/ja
Publication of JPH0582466B2 publication Critical patent/JPH0582466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP27018486A 1986-11-12 1986-11-12 Ｔａ−Ｗ系非晶質合金薄膜の製造方法 Granted JPS63125668A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27018486A JPS63125668A (ja) 1986-11-12 1986-11-12 Ｔａ−Ｗ系非晶質合金薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27018486A JPS63125668A (ja) 1986-11-12 1986-11-12 Ｔａ−Ｗ系非晶質合金薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS63125668A true JPS63125668A (ja) 1988-05-28
JPH0582466B2 JPH0582466B2 (enrdf_load_stackoverflow) 1993-11-19

Family

ID=17482693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27018486A Granted JPS63125668A (ja) 1986-11-12 1986-11-12 Ｔａ−Ｗ系非晶質合金薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS63125668A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0582466B2 (enrdf_load_stackoverflow) 1993-11-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term