JPS63124734U - - Google Patents
Info
- Publication number
- JPS63124734U JPS63124734U JP1697487U JP1697487U JPS63124734U JP S63124734 U JPS63124734 U JP S63124734U JP 1697487 U JP1697487 U JP 1697487U JP 1697487 U JP1697487 U JP 1697487U JP S63124734 U JPS63124734 U JP S63124734U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- cvd apparatus
- exhaust
- exhausted
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1697487U JPS63124734U (nl) | 1987-02-07 | 1987-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1697487U JPS63124734U (nl) | 1987-02-07 | 1987-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124734U true JPS63124734U (nl) | 1988-08-15 |
Family
ID=30809317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1697487U Pending JPS63124734U (nl) | 1987-02-07 | 1987-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124734U (nl) |
-
1987
- 1987-02-07 JP JP1697487U patent/JPS63124734U/ja active Pending