JPS6190240U - - Google Patents

Info

Publication number

JPS6190240U

JPS6190240U JP17431484U JP17431484U JPS6190240U JP S6190240 U JPS6190240 U JP S6190240U JP 17431484 U JP17431484 U JP 17431484U JP 17431484 U JP17431484 U JP 17431484U JP S6190240 U JPS6190240 U JP S6190240U

Authority

JP

Japan

Prior art keywords

cleaning tank

wafer cleaning

supply pipe

pipe

bubbling structure

Prior art date

1984-11-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 7
• 230000005587 bubbling Effects 0.000 claims 2
• 238000005273 aeration Methods 0.000 claims 1
• 239000007788 liquid Substances 0.000 claims 1
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 238000009792 diffusion process Methods 0.000 description 1
• 229910001873 dinitrogen Inorganic materials 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1