JPS63124665U - - Google Patents
Info
- Publication number
- JPS63124665U JPS63124665U JP1657787U JP1657787U JPS63124665U JP S63124665 U JPS63124665 U JP S63124665U JP 1657787 U JP1657787 U JP 1657787U JP 1657787 U JP1657787 U JP 1657787U JP S63124665 U JPS63124665 U JP S63124665U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- thin
- peripheral portion
- supporting member
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 3
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1657787U JPS63124665U (pt) | 1987-02-09 | 1987-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1657787U JPS63124665U (pt) | 1987-02-09 | 1987-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124665U true JPS63124665U (pt) | 1988-08-15 |
Family
ID=30808562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1657787U Pending JPS63124665U (pt) | 1987-02-09 | 1987-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124665U (pt) |
-
1987
- 1987-02-09 JP JP1657787U patent/JPS63124665U/ja active Pending