JPS63124638U - - Google Patents

Info

Publication number
JPS63124638U
JPS63124638U JP1518587U JP1518587U JPS63124638U JP S63124638 U JPS63124638 U JP S63124638U JP 1518587 U JP1518587 U JP 1518587U JP 1518587 U JP1518587 U JP 1518587U JP S63124638 U JPS63124638 U JP S63124638U
Authority
JP
Japan
Prior art keywords
shear
type
strain
longitudinal direction
generating portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1518587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH06742Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987015185U priority Critical patent/JPH06742Y2/ja
Publication of JPS63124638U publication Critical patent/JPS63124638U/ja
Application granted granted Critical
Publication of JPH06742Y2 publication Critical patent/JPH06742Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1987015185U 1987-02-04 1987-02-04 半導体圧力変換器 Expired - Lifetime JPH06742Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987015185U JPH06742Y2 (ja) 1987-02-04 1987-02-04 半導体圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987015185U JPH06742Y2 (ja) 1987-02-04 1987-02-04 半導体圧力変換器

Publications (2)

Publication Number Publication Date
JPS63124638U true JPS63124638U (US20020193084A1-20021219-M00002.png) 1988-08-15
JPH06742Y2 JPH06742Y2 (ja) 1994-01-05

Family

ID=30805882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987015185U Expired - Lifetime JPH06742Y2 (ja) 1987-02-04 1987-02-04 半導体圧力変換器

Country Status (1)

Country Link
JP (1) JPH06742Y2 (US20020193084A1-20021219-M00002.png)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114689A (en) * 1977-03-17 1978-10-06 Hitachi Ltd Semiconductor strain gauge type diaphragm
JPS53139989A (en) * 1977-05-13 1978-12-06 Hitachi Ltd Pressure sensor
JPS5730922A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Sensor for pressure difference and pressure
JPS61295672A (ja) * 1985-06-25 1986-12-26 Yokogawa Electric Corp 半導体圧力センサ及び圧力測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114689A (en) * 1977-03-17 1978-10-06 Hitachi Ltd Semiconductor strain gauge type diaphragm
JPS53139989A (en) * 1977-05-13 1978-12-06 Hitachi Ltd Pressure sensor
JPS5730922A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Sensor for pressure difference and pressure
JPS61295672A (ja) * 1985-06-25 1986-12-26 Yokogawa Electric Corp 半導体圧力センサ及び圧力測定装置

Also Published As

Publication number Publication date
JPH06742Y2 (ja) 1994-01-05

Similar Documents

Publication Publication Date Title
JPS63124638U (US20020193084A1-20021219-M00002.png)
JPS6196347U (US20020193084A1-20021219-M00002.png)
JPS6247150U (US20020193084A1-20021219-M00002.png)
JPS63124637U (US20020193084A1-20021219-M00002.png)
JPS62154659U (US20020193084A1-20021219-M00002.png)
JPS62162854U (US20020193084A1-20021219-M00002.png)
JPS6410664U (US20020193084A1-20021219-M00002.png)
JPH0277648U (US20020193084A1-20021219-M00002.png)
JPS63115733U (US20020193084A1-20021219-M00002.png)
JPH02135835U (US20020193084A1-20021219-M00002.png)
JPS61162069U (US20020193084A1-20021219-M00002.png)
JPS6450454U (US20020193084A1-20021219-M00002.png)
JPH02105108U (US20020193084A1-20021219-M00002.png)
JPH0225844U (US20020193084A1-20021219-M00002.png)
JPH01157445U (US20020193084A1-20021219-M00002.png)
JPS6355559U (US20020193084A1-20021219-M00002.png)
JPS61205155U (US20020193084A1-20021219-M00002.png)
JPS62162641U (US20020193084A1-20021219-M00002.png)
JPS6230161U (US20020193084A1-20021219-M00002.png)
JPH0299332U (US20020193084A1-20021219-M00002.png)
JPS61177463U (US20020193084A1-20021219-M00002.png)
JPS63110053U (US20020193084A1-20021219-M00002.png)
JPS61190840U (US20020193084A1-20021219-M00002.png)
JPH0199035U (US20020193084A1-20021219-M00002.png)
JPH0213753U (US20020193084A1-20021219-M00002.png)