JPS63124616U - - Google Patents
Info
- Publication number
- JPS63124616U JPS63124616U JP1615087U JP1615087U JPS63124616U JP S63124616 U JPS63124616 U JP S63124616U JP 1615087 U JP1615087 U JP 1615087U JP 1615087 U JP1615087 U JP 1615087U JP S63124616 U JPS63124616 U JP S63124616U
- Authority
- JP
- Japan
- Prior art keywords
- code plate
- force
- code
- drive pin
- rotary table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000000609 electron-beam lithography Methods 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1615087U JPS63124616U (enrdf_load_stackoverflow) | 1987-02-06 | 1987-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1615087U JPS63124616U (enrdf_load_stackoverflow) | 1987-02-06 | 1987-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124616U true JPS63124616U (enrdf_load_stackoverflow) | 1988-08-15 |
Family
ID=30807747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1615087U Pending JPS63124616U (enrdf_load_stackoverflow) | 1987-02-06 | 1987-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124616U (enrdf_load_stackoverflow) |
-
1987
- 1987-02-06 JP JP1615087U patent/JPS63124616U/ja active Pending
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